The Phase Diagram of QCD and Some Issues of Large N_c (open access)

The Phase Diagram of QCD and Some Issues of Large N_c

The large N{sub c} limit provides a good phenomenology of meson spectra and interactions, I discuss some problems with applying the large N{sub c} approximation to the description of baryons, and point out a number of apparent paradoxes and phenomenological difficulties.
Date: February 28, 2009
Creator: McLerran, L.
System: The UNT Digital Library
Photoelectron Spectroscopy under Ambient Pressure and Temperature Conditions (open access)

Photoelectron Spectroscopy under Ambient Pressure and Temperature Conditions

We describe the development and applications of novel instrumentation for photoemission spectroscopy of solid or liquid surfaces in the presence of gases under ambient conditions or pressure and temperature. The new instrument overcomes the strong scattering of electrons in gases by the use of an aperture close to the surface followed by a differentially-pumped electrostatic lens system. In addition to the scattering problem, experiments in the presence of condensed water or other liquids require the development of special sample holders to provide localized cooling. We discuss the first two generations of Ambient Pressure PhotoEmission Spectroscopy (APPES) instruments developed at synchrotron light sources (ALS in Berkeley and BESSY in Berlin), with special focus on the Berkeley instruments. Applications to environmental science and catalytic chemical research are illustrated in two examples.
Date: February 27, 2009
Creator: Ogletree, D. Frank; Bluhm, Hendrik; Hebenstreit, Eleonore B. & Salmeron, Miquel
System: The UNT Digital Library
The Response of Long-Span Bridges to Low Frequency, Near-Fault Earthquake Ground Motions (open access)

The Response of Long-Span Bridges to Low Frequency, Near-Fault Earthquake Ground Motions

Historical seismic hazard characterizations did not include earthquake ground motion waveforms at frequencies below approximately 0.2 Hz (5 seconds period). This resulted from limitations in early strong motion instrumentation and signal processing techniques, a lack of measurements in the near-field of major earthquakes and therefore no observational awareness, and a delayed understanding in the engineering community of the potential significance of these types of motions. In recent years, there is a growing recognition of the relevance of near-fault, low frequency motions, particularly for long-period structures such as large bridges. This paper describes a computationally based study of the effects of low frequency (long-period) near-fault motions on long-span bridge response. The importance of inclusion of these types of motions for long span cable supported bridges is demonstrated using actual measured broad-band, near-fault motions from large earthquakes.
Date: February 27, 2009
Creator: McCallen, David; Astaneh-Asl, A.; Larsen, S.C. & Hutchings, Larry
System: The UNT Digital Library
2009 CLEO Plenary Session - OPN Article Questions (open access)

2009 CLEO Plenary Session - OPN Article Questions

None
Date: February 26, 2009
Creator: Moses, Edward
System: The UNT Digital Library
Dataflow System: Is It A Viable Scalable Graph Analysis Engine? (open access)

Dataflow System: Is It A Viable Scalable Graph Analysis Engine?

None
Date: February 26, 2009
Creator: Yoo, A
System: The UNT Digital Library
The Dawn of a New Era for High Energy Density Physics (open access)

The Dawn of a New Era for High Energy Density Physics

The field of High Energy Density (HED) physics is on the verge of a revolutionary event - the achievement of fusion ignition in the laboratory. New laser facilities, the OMEGA Extended Performance (EP) laser at the University of Rochester and the National Ignition Facility (NIF) at Lawrence Livermore National Laboratory, greatly extend the range of high energy density (HED) plasma conditions (including ignition) accessible in the laboratory. These conditions are among the most extreme obtainable, with pressures in excess of {approx}1,000,000 atmospheres. Experiments at these facilities will elucidate fundamental new science in astrophysics, materials science, laser-matter interactions, and other areas. The demonstration of fusion ignition will be the culmination of decades of research, and for the first time, will open the burning plasma regime to laboratory exploration. Ignition will spur the development of advanced options for clean, environmentally sustainable energy.
Date: February 26, 2009
Creator: Moses, E.; McCrory, R.; Meyerhofer, D. & Keane, C.
System: The UNT Digital Library
On the importance of nuclear quantum motions in near edge x-ray absorption fine structure (NEXAFS) spectroscopy of molecules (open access)

On the importance of nuclear quantum motions in near edge x-ray absorption fine structure (NEXAFS) spectroscopy of molecules

We report the effects of sampling nuclear quantum motion with path integral molecular dynamics (PIMD) on calculations of the nitrogen K-edge spectra of two isolated organic molecules. S-triazine, a prototypical aromatic molecule occupying primarily its vibrational ground state at room temperature, exhibits substantially improved spectral agreement when nuclear quantum effects are included via PIMD, as compared to the spectra obtained from either a single fixed-nuclei based calculation or from a series of configurations extracted from a classical molecular dynamics trajectory. Nuclear quantum dynamics can accurately explain the intrinsic broadening of certain features. Glycine, the simplest amino acid, is problematic due to large spectral variations associated with multiple energetically accessible conformations at the experimental temperature. This work highlights the sensitivity of NEXAFS to quantum nuclear motions in molecules, and the necessity of accurately sampling such quantum motion when simulating their NEXAFS spectra.
Date: February 26, 2009
Creator: Schwartz, Craig P.; Uejio, Janel S.; Saykally, Richard J. & Prendergast, David
System: The UNT Digital Library
The (3He,tf) as a surrogate reaction to determine (n,f) cross sections in the 10 to 20 MeV energy range (open access)

The (3He,tf) as a surrogate reaction to determine (n,f) cross sections in the 10 to 20 MeV energy range

The surrogate reaction 238U(3He,tf) is used to determine the 237Np(n,f) cross section indirectly over an equivalent neutron energy range from 10 to 20 MeV. A self-supporting ~;;761 mu g/cm2 metallic 238U foil was bombarded with a 42 MeV 3He2+ beam from the 88-Inch Cyclotron at Lawrence Berkeley National Laboratory (LBNL). Outgoing charged particles and fission fragments were identified using the Silicon Telescope Array for Reaction Studies (STARS), consists of two 140 mu m and one 1000 mu m Micron S2 type silicon detectors. The 237Np(n,f) cross sections, determined indirectly, were compared with the 237Np(n,f) cross section data from direct measurements, the Evaluated Nuclear Data File (ENDF/B-VII.0), and the Japanese Evaluated Nuclear Data Library (JENDL 3.3) and found to closely follow those datasets. Use of the (3He,tf) reaction as a surrogate to extract (n,f) cross section in the 10 to 20 MeV equivalent neutron energy is found to be suitable.
Date: February 25, 2009
Creator: Basunia, M. S.; Clark, R. M.; Goldblum, B. L.; Bernstein, L. A.; Phair, L.; Burke, J. T. et al.
System: The UNT Digital Library
Real-Time Molecular Monitoring of Chemical Environment in ObligateAnaerobes during Oxygen Adaptive Response (open access)

Real-Time Molecular Monitoring of Chemical Environment in ObligateAnaerobes during Oxygen Adaptive Response

Determining the transient chemical properties of the intracellular environment canelucidate the paths through which a biological system adapts to changes in its environment, for example, the mechanisms which enable some obligate anaerobic bacteria to survive a sudden exposure to oxygen. Here we used high-resolution Fourier Transform Infrared (FTIR) spectromicroscopy to continuously follow cellular chemistry within living obligate anaerobes by monitoring hydrogen bonding in their cellular water. We observed a sequence of wellorchestrated molecular events that correspond to changes in cellular processes in those cells that survive, but only accumulation of radicals in those that do not. We thereby can interpret the adaptive response in terms of transient intracellular chemistry and link it to oxygen stress and survival. This ability to monitor chemical changes at the molecular level can yield important insights into a wide range of adaptive responses.
Date: February 25, 2009
Creator: Holman, Hoi-Ying N.; Wozei, Eleanor; Lin, Zhang; Comolli, Luis R.; Ball, David. A.; Borglin, Sharon et al.
System: The UNT Digital Library
Response Predicting LTCC Firing Shrinkage: A Response Surface Analysis Study (open access)

Response Predicting LTCC Firing Shrinkage: A Response Surface Analysis Study

The Low Temperature Cofired Ceramic (LTCC) technology is used in a variety of applications including military/space electronics, wireless communication, MEMS, medical and automotive electronics. The use of LTCC is growing due to the low cost of investment, short development time, good electrical and mechanical properties, high reliability, and flexibility in design integration (3 dimensional (3D) microstructures with cavities are possible)). The dimensional accuracy of the resulting x/y shrinkage of LTCC substrates is responsible for component assembly problems with the tolerance effect that increases in relation to the substrate size. Response Surface Analysis was used to predict product shrinkage based on specific process inputs (metal loading, layer count, lamination pressure, and tape thickness) with the ultimate goal to optimize manufacturing outputs (NC files, stencils, and screens) in achieving the final product design the first time. Three (3) regression models were developed for the DuPont 951 tape system with DuPont 5734 gold metallization based on green tape thickness.
Date: February 25, 2009
Creator: Girardi, Michael; Barner, Gregg; Lopez, Cristie; Duncan, Brent & Zawicki, Larry
System: The UNT Digital Library
The role of reaction affinity and secondary minerals in regulating chemical weathering rates at the Santa Cruz Soil Chronosequence, California (open access)

The role of reaction affinity and secondary minerals in regulating chemical weathering rates at the Santa Cruz Soil Chronosequence, California

In order to explore the reasons for the apparent discrepancy between laboratory and field weathering rates and to determine the extent to which weathering rates are controlled by the approach to thermodynamic equilibrium, secondary mineral precipitation and flow rates, a multicomponent reactive transport model (CrunchFlow) was used to interpret soil profile development and mineral precipitation and dissolution rates at the 226 ka marine terrace chronosequence near Santa Cruz, CA. Aqueous compositions, fluid chemistry, transport, and mineral abundances are well characterized (White et al., 2008, GCA) and were used to constrain the reaction rates for the weathering and precipitating minerals in the reactive transport modeling. When primary mineral weathering rates are calculated with either of two experimentally determined rate constants, the nonlinear, parallel rate law formulation of Hellmann and Tisser and [2006] or the aluminum inhibition model proposed by Oelkers et al. [1994], modeling results are consistent with field-scale observations when independently constrained clay precipitation rates are accounted for. Experimental and field rates, therefore, can be reconciled at the Santa Cruz site. Observed maximum clay abundances in the argillic horizons occur at the depth and time where the reaction fronts of the primary minerals overlap. The modeling indicates that the argillic …
Date: February 25, 2009
Creator: Maher, K.; Steefel, C. I.; White, A.F. & Stonestrom, D.A.
System: The UNT Digital Library
Analysis of systematic errors in lateral shearing interferometry for EUV optical testing (open access)

Analysis of systematic errors in lateral shearing interferometry for EUV optical testing

Lateral shearing interferometry (LSI) provides a simple means for characterizing the aberrations in optical systems at EUV wavelengths. In LSI, the test wavefront is incident on a low-frequency grating which causes the resulting diffracted orders to interfere on the CCD. Due to its simple experimental setup and high photon efficiency, LSI is an attractive alternative to point diffraction interferometry and other methods that require spatially filtering the wavefront through small pinholes which notoriously suffer from low contrast fringes and improper alignment. In order to demonstrate that LSI can be accurate and robust enough to meet industry standards, analytic models are presented to study the effects of unwanted grating and detector tilt on the system aberrations, and a method for identifying and correcting for these errors in alignment is proposed. The models are subsequently verified by numerical simulation. Finally, an analysis is performed of how errors in the identification and correction of grating and detector misalignment propagate to errors in fringe analysis.
Date: February 24, 2009
Creator: Miyakawa, Ryan; Naulleau, Patrick & Goldberg, Kenneth A.
System: The UNT Digital Library
Characterizing the Properties of Clusters of Galaxies As a Function of Luminosity and Redshift (open access)

Characterizing the Properties of Clusters of Galaxies As a Function of Luminosity and Redshift

Abstract: We report the application of the new Monte Carlo method, Smoothed Particle Inference (SPI, described in a pair of companion papers), towards analysis and interpretation of X-ray observations of clusters of galaxies with the XMM-Newton satellite. Our sample consists of publicly available well-exposed observations of clusters at redshifts z > 0.069, totaling 101 objects. We determine the luminosity and temperature structure of the X-ray emitting gas, with the goal to quantify the scatter and the evolution of the L{sub X} - T relation, as well as to investigate the dependence on cluster substructure with redshift. This work is important for the establishment of the potential robustness of mass estimates from X-ray data which in turn is essential towards the use of clusters for measurements of cosmological parameters. We use the luminosity and temperature maps derived via the SPI technique to determine the presence of cooling cores, via measurements of luminosity and temperature contrast. The L{sub X}-T relation is investigated, and we confirm that L{sub X} {proportional_to} T{sup 3}. We find a weak redshift dependence ({proportional_to} (1 + z){sup {beta}{sub LT}}, {beta}{sub LT} = 0.50 {+-} 0.34), in contrast to some Chandra results. The level of dynamical activity is established …
Date: February 24, 2009
Creator: Andersson, K.; Peterson, J. R.; Madejski, G. & Goobar, A.
System: The UNT Digital Library
High quality copy number and genotype data from FFPE samples using Molecular Inversion Probe (MIP) microarrays (open access)

High quality copy number and genotype data from FFPE samples using Molecular Inversion Probe (MIP) microarrays

A major challenge facing DNA copy number (CN) studies of tumors is that most banked samples with extensive clinical follow-up information are Formalin-Fixed Paraffin Embedded (FFPE). DNA from FFPE samples generally underperforms or suffers high failure rates compared to fresh frozen samples because of DNA degradation and cross-linking during FFPE fixation and processing. As FFPE protocols may vary widely between labs and samples may be stored for decades at room temperature, an ideal FFPE CN technology should work on diverse sample sets. Molecular Inversion Probe (MIP) technology has been applied successfully to obtain high quality CN and genotype data from cell line and frozen tumor DNA. Since the MIP probes require only a small ({approx}40 bp) target binding site, we reasoned they may be well suited to assess degraded FFPE DNA. We assessed CN with a MIP panel of 50,000 markers in 93 FFPE tumor samples from 7 diverse collections. For 38 FFPE samples from three collections we were also able to asses CN in matched fresh frozen tumor tissue. Using an input of 37 ng genomic DNA, we generated high quality CN data with MIP technology in 88% of FFPE samples from seven diverse collections. When matched fresh frozen …
Date: February 24, 2009
Creator: Wang, Yuker; Carlton, Victoria E. H.; Karlin-Neumann, George; Sapolsky, Ronald; Zhang, Li; Moorhead, Martin et al.
System: The UNT Digital Library
The impact of biogenic carbon emissions on aerosol absorption inMexico City (open access)

The impact of biogenic carbon emissions on aerosol absorption inMexico City

In order to determine the wavelength dependence of atmospheric aerosol absorption in the Mexico City area, the absorption angstrom exponents (AAEs) were calculated from aerosol absorption measurements at seven wavelengths obtained with a seven-channel aethalometer during two field campaigns, the Mexico City Metropolitan Area study in April 2003 (MCMA 2003) and the Megacity Initiative: Local and Global Research Observations in March 2006 (MILAGRO). The AAEs varied from 0.76 to 1.56 in 2003 and from 0.54 to 1.52 in 2006. The AAE values determined in the afternoon were consistently higher than the corresponding morning values, suggesting the photochemical formation of absorbing secondary organic aerosols (SOA) in the afternoon. The AAE values were compared to stable and radiocarbon isotopic measurements of aerosol samples collected at the same time to determine the sources of the aerosol carbon. The fraction of modern carbon (fM) in the aerosol samples, as determined from {sup 14}C analysis, showed that 70% of the carbonaceous aerosols in Mexico City were from modern sources, indicating a significant impact from biomass burning during both field campaigns. The {sup 13}C/{sup 12}C ratios of the aerosol samples illustrate the significant impact of Yucatan forest fires (C-3 plants) in 2003 and local grass fires …
Date: February 24, 2009
Creator: Marley, Nancy A.; Gaffney, Jeffrey S.; Tackett, Michael J.; Sturchio, Neil C.; Hearty, Linnea; Martinez, Nancy et al.
System: The UNT Digital Library
STEAM REFORMING TECHNOLOGY DEMONSTRATION FOR THE DESTRUCTION OF ORGANICS ON ACTUAL DOE SAVANNAH RIVER SITE TANK 48H WASTE 9138 (open access)

STEAM REFORMING TECHNOLOGY DEMONSTRATION FOR THE DESTRUCTION OF ORGANICS ON ACTUAL DOE SAVANNAH RIVER SITE TANK 48H WASTE 9138

This paper describes the design of the Bench-scale Steam Reformer (BSR); a processing unit for demonstrating steam reforming technology on actual radioactive waste [1]. It describes the operating conditions of the unit used for processing a sample of Savannah River Site (SRS) Tank 48H waste. Finally, it compares the results from processing the actual waste in the BSR to processing simulant waste in the BSR to processing simulant waste in a large pilot scale unit, the Fluidized Bed Steam Reformer (FBSR), operated at Hazen Research Inc. in Golden, CO. The purpose of this work was to prove that the actual waste reacted in the same manner as the simulant waste in order to validate the work performed in the pilot scale unit which could only use simulant waste.
Date: February 24, 2009
Creator: Burket, P
System: The UNT Digital Library
AdS/CFT and Light-Front Holography: A Theory of Strong Interactions (open access)

AdS/CFT and Light-Front Holography: A Theory of Strong Interactions

Recent developments in the theory of strong interactions are discussed in the framework of the AdS/CFT duality between string theories of gravity in a higher dimension Anti-de Sitter space and conformal quantum field theories in physical space-time. This novel theoretical approach, combined with 'light-front holography', leads to new insights into the quark and gluon structure of hadrons and a viable first approximation to quantum chromodynamics, the fundamental theory of the strong and nuclear interactions.
Date: February 23, 2009
Creator: Brodsky, Stanley J. & Teramond, Guy F.de
System: The UNT Digital Library
Collecting EUV mask images through focus by wavelength tuning (open access)

Collecting EUV mask images through focus by wavelength tuning

Using an extreme-ultraviolet (EUV) microscope to produce high-quality images of EUV reticles, we have developed a new wavelength tuning method to acquire through-focus data series with a higher level of stability and repeatability than was previously possible. We utilize the chromatic focal-length dependence of a diffractive Fresnel zoneplate objective lens, and while holding the mask sample mechanically still, we tune the wavelength through a narrow range, in small steps. In this paper, we demonstrate the method and discuss the relative advantages that this data collection technique affords.
Date: February 23, 2009
Creator: Goldberg, Kenneth A.; Mochi, Iacopo & Huh, Sungmin
System: The UNT Digital Library
Comparison of fast 3D simulation and actinic inspection for EUV masks with buries defects (open access)

Comparison of fast 3D simulation and actinic inspection for EUV masks with buries defects

Aerial images for isolated defects and the interactions of defects with features are compared between the Actinic Inspection Tool (AIT) at Lawrence Berkeley National Laboratory (LBNL) and the fast EUV simulation program RADICAL. Comparisons between AIT images from August 2007 and RADICAL simulations are used to extract aberrations. At this time astigmatism was the dominant aberration with a value of 0.55 waves RMS. Significant improvements in the imaging performance of the AIT were made between August 2007 and December 2008. A good match will be shown between the most recent AIT images and RADICAL simulations without aberrations. These comparisons will demonstrate that a large defect, in this case 7nm tall on the surface, is still printable even if it is centered under the absorber line. These comparisons also suggest that the minimum defect size is between 1.5nm and 0.8nm surface height because a 1.5nm defect was printable but a 0.8nm was not. Finally, the image of a buried defect near an absorber line through focus will demonstrate an inversion in the effect of the defect from a protrusion of the dark line into the space to a protrusion of the space into the line.
Date: February 23, 2009
Creator: Clifford, C. H.; Wiraatmadja, S.; Chan, T. T.; Neureuther, A. R.; Goldberg, K. A.; Mochi, I. et al.
System: The UNT Digital Library
The consequences of failure should be considered in siting geologic carbon sequestration projects (open access)

The consequences of failure should be considered in siting geologic carbon sequestration projects

Geologic carbon sequestration is the injection of anthropogenic CO{sub 2} into deep geologic formations where the CO{sub 2} is intended to remain indefinitely. If successfully implemented, geologic carbon sequestration will have little or no impact on terrestrial ecosystems aside from the mitigation of climate change. However, failure of a geologic carbon sequestration site, such as large-scale leakage of CO{sub 2} into a potable groundwater aquifer, could cause impacts that would require costly remediation measures. Governments are attempting to develop regulations for permitting geologic carbon sequestration sites to ensure their safety and effectiveness. At present, these regulations focus largely on decreasing the probability of failure. In this paper we propose that regulations for the siting of early geologic carbon sequestration projects should emphasize limiting the consequences of failure because consequences are easier to quantify than failure probability.
Date: February 23, 2009
Creator: Price, P. N. & Oldenburg, C. M.
System: The UNT Digital Library
Dalitz Plot Analysis of B+- --> pi+-pi+-pi-+ Decays (open access)

Dalitz Plot Analysis of B+- --> pi+-pi+-pi-+ Decays

The authors present a Dalitz-plot analysis of charmless B{sup {+-}} decays to the final state {pi}{sup {+-}}{pi}{sup {+-}}{pi}{sup {-+}} using a sample of (465 {+-} 5) x 10{sup 6} B{bar B} pairs collected by the BABAR experiment at {radical}s = 10.58 GeV. They measure the branching fractions {Beta}(B{sup {+-}} {yields} {pi}{sup {+-}}{pi}{sup {+-}}{pi}{sup {-+}}) = (15.2 {+-} 0.6 {+-} 1.2 {+-} 0.4) x 10{sup -6}, {Beta}(B{sup {+-}} {yields} {rho}{sup 0}(770){pi}{sup {+-}}) = (8.1 {+-} 0.7 {+-} 1.2{sub -1.1}{sup +0.4}) x 10{sup -6}, {Beta}(B{sup {+-}} {yields} f{sub 2}(1270){pi}{sup {+-}}) = (1.57 {+-} 0.42 {+-} 0.16{sub -0.19}{sup +0.53}) x 10{sup -6}, and {Beta}(B{sup {+-}} {yields} {pi}{sup {+-}}{pi}{sup {+-}}{pi}{sup {-+}} nonresonant) = (5.3 {+-} 0.7 {+-} 0.6{sub -0.5}{sup +1.1}) x 10{sup -6}, where the uncertainties are statistical, systematic, and model-dependent, respectively. Measurements of branching fractions for the modes B{sup {+-}} {yields} {rho}{sup 0}(1450){pi}{sup {+-}} and B{sup {+-}} {yields} f{sub 0}(1370){pi}{sup {+-}} are also presented. They observe no significant direct CP asymmetries for the above modes, and there is no evidence for the decays B{sup {+-}} {yields} f{sub 0}(980){pi}{sup {+-}}, B{sup {+-}} {yields} {chi}{sub c0}{pi}{sup {+-}}, or B{sup {+-}} {yields} {chi}{sub c2}{pi}{sup {+-}}.
Date: February 23, 2009
Creator: Collaboration, The BABAR & Aubert, B.
System: The UNT Digital Library
Deliquescence and efflorescence of small particles: Unifying perspectives from nucleation theory (open access)

Deliquescence and efflorescence of small particles: Unifying perspectives from nucleation theory

We examine size dependent deliquescence/efflorescence phase transformation for particles down to several nanometers in size. A thin layer criterion (TLC) is introduced to define a deliquescence relative humidity (DRH) for small particles. The usual bulk deliquescence conditions are recovered in the limit of large dry particle size. Nano-size particles are shown to deliquesce to metastable states via a nucleation process at relative humidity just below the DRH. The nucleation barrier is located at a critical solution layer thickness and vanishes at the DRH defined by the TLC. Methods from nucleation theory form the basis for the analysis and yield new insights into the theory, facilitate the interpretation of measurements, and point to unification of deliquescence and efflorescence processes for particles in the nano regime. Methods include thermodynamic area constructions, Legendre transforms relating the binary free-energy surfaces for deliquescence and efflorescence processes, and application of nucleation theorems.
Date: February 23, 2009
Creator: McGraw,R. & Lewis, E.
System: The UNT Digital Library
Duality, Entropy and ADM Mass in Supergravity (open access)

Duality, Entropy and ADM Mass in Supergravity

We consider the Bekenstein-Hawking entropy-area formula in four dimensional extended ungauged supergravity and its electric-magnetic duality property. Symmetries of both"large" and"small" extremal black holes are considered, as well as the ADM mass formula for N=4 and N=8 supergravity, preserving different fraction of supersymmetry. The interplay between BPS conditions and duality properties is an important aspect of this investigation.
Date: February 23, 2009
Creator: Cerchiai, Bianca L.; Ferrara, Sergio; Marrani, Alessio & Zumino, Bruno
System: The UNT Digital Library
Inspection 13.2 nm table-top full-field microscope (open access)

Inspection 13.2 nm table-top full-field microscope

We present results on a table-top microscope that uses an EUV stepper geometry to capture full-field images with a halfpitch spatial resolution of 55 nm. This microscope uses a 13.2 nm wavelength table-top laser for illumination and acquires images of reflective masks with exposures of 20 seconds. These experiments open the path to the realization of high resolution table-top imaging systems for actinic defect characterization.
Date: February 23, 2009
Creator: Brizuela, F.; Wang, Y.; Brewer, C. A.; Pedaci, F.; Chao, W.; Anderson, E. H. et al.
System: The UNT Digital Library