Laser-produced plasmas are source candidates for EUV lithography. The radiation angular distribution for several target materials is investigated and source debris is characterized.

This document contains the Quarterly Technical Progress Report for the Micronized Magnetite Testing Project being performed at PETC`s Process Research Facility (PRF). This second quarterly report covers the period from October, 1994 through December, 1994. The main accomplishments of Custom Coals and the project subcontractors, during this period, included: (1) Submitted all overdue project documents and kept up with routine reporting requirements; (2) Worked with CLI Corporation, the design subcontractor, and completed the circuit design and finalized all design drawings; (3) Specified and procured all of the process equipment for the circuit, as well as a number of ancillary equipment, instruments, and supplies; (4) Assisted Vangura Iron Inc. in detailing and constructing the structural and platework steel; (5) Subcontracted Rizzo & Sons to perform the circuit mechanical and electrical installation, and prepared for January 23rd installation start date; (6) Organized and prepared for coal and magnetite procurement; (7) Specified and organized an operating personnel plan for the commissioning and testing tasks in the project; (8) Assessed analytical challenges for project, and began to research problem areas. This report contains a short discussion of the project description, objectives, budget, schedule, and teaming arrangement. It also includes a detailed discussion of the …

The US Department of Energy (DOE) has more than 2.5 million tons of radioactive scrap metal (RSM) that is either in inventory or expected to be generated over the next 25 years as major facilities within the weapons complex are decommissioned. Since much of this metal cannot be decontaminated easily, past practice has been to either retain this material in inventory or ship it to DOE disposal sites for burial. In an attempt to conserve natural resources and to avoid burial of this material at DOE disposal sites, options are now being explored to ``beneficially reuse`` this material. Under the beneficial reuse concept, RSM that cannot be decontaminated and free released is used in applications where the inherent contamination is not a detriment to its end use. This paper describes initiatives currently in progress in the United States that support the DOE beneficial reuse concept.

An aquifer test agreement between the US Department of Energy (USDOE) and the US Geological Survey (USGS) was set up to log and measure the aquifer response in two observation wells, IB and 4C at the Hallam Nuclear Facility, Hallam, Nebraska. Observation wells 1B and 4C are owned by the USDOE and were installed by HWS Technologies Inc. of Lincoln, Nebraska, in June 1993. These observation wells were measured monthly from September 1993 to August 1994 by using a graduated steel tape. The accuracy of these water-level measurements is approximately {plus_minus}0.02 foot. Also well 1B contained a submersible pressure transducer to record hourly water-level data during this same period. During access of the wells, personnel wear clean disposable latex gloves, a hard hat, and safety glasses. Directly following each measurement the steel-tape was rinsed with deionized water and the effluent was disposed of in a 55-gallon drum. For the aquifer tests, observation wells 1B and 4C had submersible pressure transducers installed to monitor water-level responses. These pressure transducers were connected to an electronic data logger (edl) to record the water levels, atmospheric pressure from a barometric pressure gauge, and rainfall data from a tipping-bucket rain gauge. The data recorded on …

The cost of fabricating state-of-the-art integrated circuits (ICs) has been increasing and it will likely be economic rather than technical factors that ultimately limit the progress of ICs toward smaller devices. It is estimated that lithography currently accounts for approximately one-third the total cost of fabricating modem ICs({sup 1}). It is expected that this factor will be fairly stable for the forseeable future, and as a result, any lithographic process must be cost-effective before it can be considered for production. Additionally, the capital equipment cost for a new fabrication facility is growing at an exponential rate (2); it will soon require a multibillion dollar investment in capital equipment alone to build a manufacturing facility. In this regard, it is vital that any advanced lithography candidate justify itself on the basis of cost effectiveness. EUV lithography is no exception and close attention to issues of wafer fabrication costs have been a hallmark of its early history. To date, two prior cost analyses have been conducted for EUV lithography (formerly called {open_quotes}Soft X-ray Projection Lithography{close_quotes}). The analysis by Ceglio, et. al., provided a preliminary system design, set performance specifications and identified critical technical issues for cost control. A follow-on analysis by Early, …

Any potential lithography must demonstrate an industrially-compatable reticle pattern repair process before the lithographic process can be seriously considered for production. Repair of clear defects on ELTV reticles (i.e., regions on the mask which are reflective and should be non-reflective) requires the deposition of a thin layer of absorbing material. This process has been demonstrated in commercially available tools which were originally developed to repair proximity-print x-ray lithography masks. However, the repair of opaque defects (i.e., the recovery of reflectivity from regions on the reticle covered with an absorber) is more difficult. Opaque defect repair requires the removal of the absorber layer without damaging the underlying multilayer, a process which could degrade the mirror reflectivity. While opaque defect repair processes have been demonstrated in a research environment these processes may not be commercially suitable. We are developing reticle repair processes that will be consistent with a commercially available repair tool. In this paper, we report on our first results.

The temperature rise in a Mo/a-Si multilayer x-ray reflective film due to radiation absorption is modeled for the first condenser mirror in a projection lithography system such as the one designed by the Advanced Microtechnology Program at LLNL. The radiation load is pulsed at 1000 Hz with a time average intensity of 500mW/cm{sup 2}. This intensity is the expected maximum on the first condenser mirror. The temperature rise is calculated using the integral transform technique. The film is assumed to have the thermal properties of its poorly conducting substrate, yielding a more conservative (higher) temperature estimate. The surface temperature rise is found to range between 35.6{degrees}C and 76.3{degrees}C. The stress due to this rise is greatest in the molybdenum film and ranges between 73MPa and 166MPa compressive. This fluctuating stress level, however, is believed to be insufficient, by a factor of five or so, to cause fatigue failure of the film.

Test procedures for the gas/liquid sampler. Characterization of the Spent Nuclear Fuel, SNF, sealed in canisters at KW-Basin is needed to determine the state of storing SNF wet. Samples of the liquid and the gas in the closed canisters will be taken to gain characterization information. Sampling equipment has been designed to retrieve gas and liquid from the closed canisters in KW basin. This plan is written to outline the test requirements for this developmental sampling equipment.

We have demonstrated the operation of a high average power, all solid state laser and target system for EUV lithography. The laser operates at 1.06 {mu}m with a pulse repetition rate of 200 Hz. Each pulse contains up to 400 mJ of energy and is less than 10 ns in duration. The ELTV conversion efficiency measured with the laser is independent of the laser repetition rate. Operating at 200 Hz, the laser has been used for lithography using a 3 bounce Kohler illuminator.

This is a data package supporting the Hydrogen Recombiner Catalyst Performance and Carbon Monoxide Sorption Capacity Test Report, WHC-SD-WM-TRP-211, Rev 0. This report contains 10 appendices which consist of the following: Mass spectrometer analysis reports: HRC samples 93-001 through 93-157; Gas spectrometry analysis reports: HRC samples 93-141 through 93-658; Mass spectrometer procedure PNL-MA-299 ALO-284; Alternate analytical method for ammonia and water vapor; Sample log sheets; Job Safety analysis; Certificate of mixture analysis for feed gases; Flow controller calibration check; Westinghouse Standards Laboratory report on Bois flow calibrator; and Sorption capacity test data, tables, and graphs.

A magnetic survey was conducted at the K-Area Bingham Pump Outage Pit to locate buried metallic construction material placed in the pit. The survey was defined by survey lines spaced 10 feet apart and oriented subperpendicular to the pit elongation direction with survey stations spaced at 5-foot intervals along each line. This arrangement resulted in a 10-foot by 5-foot rectangular grid node pattern. The magnetic survey resolved a linear array of magnetic field and gradient anomalies that result from ferric material buried in the pit. The magnetic survey also resolved other isolated anomalies from ferric sources such as signs and monuments located on the surface. Comparison of the magnetic survey data with radar transects collected in a previous survey indicates that the magnetic anomalies, in most cases, correlate well with diffractions in the radar data. At locations where the anomalies and diffractions do not correlate well, it appears that the radar transect did not pass directly over the anomaly source, resulting in off-line, three-dimensional (3-D) effects in the radar data. Based on the comparison of the two methods, the magnetic data resolves the part of the trench containing the ferrous material; however, the radar data are sensitive to disturbed soil …

This test studied the ability of a blend of nuclear-grade, noble-metal catalysts to catalyze a hydrogen/nitrous oxide reaction in an effort to mitigate a potential hydrogen (H{sub 2}) gas buildup in the Hanford Site Grout Disposal Facility. For gases having H{sub 2} and a stoichiometric excess of either nitrous oxide or oxygen, the catalyst blend can effectively catalyze the H{sub 2} oxidation reaction at a rate exceeding 380 {mu}moles of H{sub 2} per hour per gram of catalyst ({mu}mol/h/g) and leave the gas with less than a 0.15 residual H{sub 2} Concentration. This holds true in gases with up to 2.25% water vapor and 0.1% methane. This should also hold true for gases with up to 0.1% carbon monoxide (CO) but only until the catalyst is exposed to enough CO to block the catalytic sites and stop the reaction. Gases with ammonia up to 1% may be slightly inhibited but can have reaction rates greater than 250 {mu}mol/h/g with less than a 0.20% residual H{sub 2} concentration. The mechanism for CO poisoning of the catalyst is the chemisorption of CO to the active catalyst sites. The CO sorption capacity (SC) of the catalyst is the total amount of CO that …

Good illumination uniformity at the mask and wafer planes, and high wafer thoroughput in the EUVL front-end test bed facility at LLNL require graded period multilayer (ML) coatings on several of the optics. The ML deposition was accomplished using a newly developed deposition technique which avoids the use of {open_quotes}uniformity masks{close_quotes} to define the spatial dependence of the ML period variation. The capabilities of the process in providing the specified ML coatings are discussed for both EUVL condenser and imaging systems.

The US Department of Energy (DOE) is preparing to request the US Environmental Protection Agency to certify compliance with the radioactive waste disposal standards found in 40 CFR Part 191 for the Waste Isolation Pilot Plant (WIPP). The DOE will also need to demonstrate compliance with a number of other State and Federal standards and, in particular, the Land Disposal Restrictions of the Resource Conservation and Recovery Act (RCRA), 40 CFR Part 268. Demonstrating compliance with these regulations requires an assessment of the long-term performance of the WIPP disposal system. Re-evaluation and extension of past scenario development for the WIPP forms an integral part of the ongoing performance assessment (PA) process.

Mo/Si multilayers, were removed from superpolished zerodur and fused silica substrates with a dry etching process that, under suitable processing conditions, produces negligible change in either the substrate surface figure or surface roughness. Full recovery of the initial normal incidence extreme ultra-violet (EUV) reflectance response has been demonstrated on reprocessed substrates.

Tanks 103-SY; 101-AW; 103-, 104-, and 105-AN are on the Flammable Gas Watch List. Recently, standard hydrogen monitoring system (SHMS) cabinets have been installed in the vent header of each of these tanks. Grab samples have been taken once per week, and a gas chromatograph was installed on tank 104-AN as a field test. The data that have been collected since gas monitoring began on these tanks are summarized in this document.

Document issued by the Office of the Attorney General of Texas in Austin, Texas, providing an interpretation of Texas law. It provides the opinion of the Texas Attorney General, Dan Morales, regarding a legal question submitted for clarification; Whether a county may pay travel expenses of an applicant for the position of county forensic pathologist (RQ-712)

Document issued by the Office of the Attorney General of Texas in Austin, Texas, providing an interpretation of Texas law. It provides the opinion of the Texas Attorney General, Dan Morales, regarding a legal question submitted for clarification; Whether articles 2.12 and 2.13, Code of Criminal Procedure, authorize peace officers to enforce city ordinances (RQ-719)

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MAXIGASP and POPGASP are environmental dosimetry codes that are based on the NRC dispersion module, XOQDOQ, and the NRC dosimetry module, GASPAR. XOQDOQ and GASPAR have been verified previously. The four remaining modules of MAXIGASP and POPGASP control input/output functions and data transfer. The results of MAXIGASP and POPGASP have been verified by comparison of hand calculated doses with program input.

A four-bounce two-element projection system designed to achieve 0.14 {mu}m resolution over a 1.2 {times} 5 mm{sup 2} ring field has been fabricated. The radiation transport properties of both the individual multilayer-coated optics and the assembled system has been measured. The individual mirror measurements demonstrated that the coatings were within 0.03 nm of d-spacing specifications; however, the mirrors exhibited significant scatter which reduced reflectance below the design specification of 60%. The peak radiation transport efficiency of the assembled projector was 7% at 13.2 nm. To the best of the authors` knowledge, this represented the first measurement of the radiation transport efficiency of a multi-element optical system for EUV lithography. Experiments performed at LLNL`s front-end test bed facility were consistent with the measured transport efficiency.

In this report, we summarize recent work at LLNL on the compact torus (CT) acceleration project. The CT accelerator is a novel technique for projecting plasmas to high velocities and reaching high energy density states. The accelerator exploits magnetic confinement in the CT to stably transport plasma over large distances and to directed kinetic energies large in comparison with the CT internal and magnetic energy. Applications range from heating and fueling magnetic fusion devices, generation of intense pulses of x-rays or neutrons for weapons effects and high energy-density fusion concepts.

In 1992, the Air-Conditioning and Refrigeration Technology Institute, Inc. (ARTI) contracted Radian Corporation to ascertain whether an improved accelerated test method or procedure could be developed that would allow prediction of the life of motor insulation materials used in hermetic motors for air-conditioning and refrigeration equipment operated with alternative refrigerant/lubricant mixtures. Phase 1 of the project, Conceptual Design of an accelerated test method and apparatus, was successfully completed in June 1993. The culmination of that effort was the concept of the Simulated Stator Unit (SSU) test. The objective of the Phase 2 limited proof-of-concept demonstration was to: answer specific engineering/design questions; design and construct an analog control sequencer and supporting apparatus; and conduct limited tests to determine the viability of the SSU test concept. This report reviews the SSU test concept, and describes the results through the conclusion of the proof-of-concept prototype tests in March 1995. The technical design issues inherent in transforming any conceptual design to working equipment have been resolved, and two test systems and controllers have been constructed. Pilot tests and three prototype tests have been completed, concluding the current phase of work. One prototype unit was tested without thermal stress loads. Twice daily insulation property measurements …

This document provides the initial functions and requirements for leakage detection and monitoring applicable to past and potential future leakage from the Hanford Site`s 149 single-shell high-level waste tanks. This mission is a part of the overall mission of the Westinghouse Hanford Company Tank Waste Remediation System division to remediate the tank waste in a safe and acceptable manner. Systems engineering principles are being applied to this effort. This document reflects the an initial step in the systems engineering approach to decompose the mission into primary functions and requirements. The document is considered approximately 30% complete relative to the effort required to produce a final version that can be used to support demonstration and/or procurement of technologies. The functions and requirements in this document apply to detection and monitoring of below ground leaks from SST containment boundaries and the resulting soil contamination. Leakage detection and monitoring is invoked in the TWRS Program in three fourth level functions: (1) Store Waste, (2) Retrieve Waste, and (3) Disposition Excess Facilities (as identified in DOE/RL-92-60 Rev. 1, Tank Waste Remediation System Functions and Requirements).