Performance of a palladium membrane reactor using a Ni catalyst for fusion fuel impurities processing (open access)

Performance of a palladium membrane reactor using a Ni catalyst for fusion fuel impurities processing

The palladium membrane reactor (PNM) provides a means to recover hydrogen isotopes from impurities expected to be present in fusion reactor exhaust. This recovery is based on reactions such as water-gas shift and steam reforming for which conversion is equilibrium limited. By including a selectively permeable membrane such as Pd/Ag in the catalyst bed, hydrogen isotopes can be removed from the reacting environment, thus promoting the reaction to complete conversion. Such a device has been built and operated at the Tritium Systems Test Assembly (TSTA) at Los Alamos National Laboratory (LANL). For the reactions listed above, earlier study with this unit has shown that hydrogen single-pass recoveries approaching 100% can be achieved. It was also determined that a nickel catalyst is a feasible choice for use with a PMR appropriate for fusion fuel impurities processing. The purpose of this study was to systematically assess the performance of the PMR using a nickel catalyst over a range of temperatures, feed compositions and flowrates. Reactions which were studied are the water-gas shift reaction and steam reforming.
Date: July 1, 1994
Creator: Willms, R. S.; Wilhelm, R. & Okuno, K.
Object Type: Article
System: The UNT Digital Library
Characterization of porosity via secondary reactions. Quarterly technical progress report, 1 January 1994--31 March 1994 (open access)

Characterization of porosity via secondary reactions. Quarterly technical progress report, 1 January 1994--31 March 1994

The following was accomplished during the reporting period: (1) CO TPD spectra were obtained as a function of heating rate from Wyodak coal char samples gasified in 0.1 MPa oxygen at 390{degrees}C to 10% burn-off. (2) The spectra were corrected for high temperature CO evolution from the sample bucket. (3) The spectra were fit to two desorption features using both Gaussian and first order desorption peak shapes. The conclusions derived from these data and their analysis include: (4) The CO TPD spectra can be adequately represented by the sum of two Gaussian or first order desorption peaks. (5) The first order peak fits indicated that the second peak decreases at the expense of the first with decreasing heating rate. This is consistent with the theory that the second peak arises from CO rechemisorption. (6) Small angle neutron scattering data were obtained on char samples using the SAD diffractometer at the IPNS at Argonne National Laboratory. Data were obtained for both ``dry`` samples and the same samples saturated with deuterated toluene for ``contrast-matching.`` (7) The data demonstrate that contrast-matching techniques can be quite useful for decoupling gasification porosity from non-accessible porosity.
Date: July 1, 1994
Creator: Calo, J. M.; Zhang, L.; Hall, P. J. & Antxustegi, M. M.
Object Type: Report
System: The UNT Digital Library
Alpha detection as a probe for counter proliferation (open access)

Alpha detection as a probe for counter proliferation

An indication of the presence of special nuclear material (SNM) can be obtained by the detection of alpha particles from the decay of the SNM. Current techniques for detecting alpha particles have a number of limitations. Sensitive conventional detection of SNM traces involves off-site laboratory analysis -- but at the loss of an on-site confirmation. Fieldable detection instruments, on the other hand, are delicate and have poor sensitivity. New long-range alpha detection (LRAD) technology mitigates these limitations. An LRAD-based instrument relies on the detection of the hundreds of thousands of ions produced in ambient air by one emitted alpha particle. The ions can be transported to an ion detector at a distance much greater than the range of the original alpha particle. The LRAD-based monitors have the characteristics of high sensitivity, fast (real-time) response, ruggedness, and reliability. Many of the designs are quite portable. In this paper, several scenarios are identified for which particular LRAD-based detectors can provide confirmation of proliferation activity.
Date: July 1, 1994
Creator: Koster, J. E.; Johnson, J. P.; MacArthur, D. W. & Walters, S. G.
Object Type: Article
System: The UNT Digital Library
Fusion safety regulations in the United States: Progress and trends (open access)

Fusion safety regulations in the United States: Progress and trends

This paper explores the issue of regulations as they apply to current and future fusion experimental machines. It addresses fusion regulatory issues, current regulations used for fusion, the Tokamak Fusion Test Reactor experience with regulations, and future regulations to achieve fusion`s safety and environmental potential.
Date: July 1, 1994
Creator: DeLooper, J.
Object Type: Article
System: The UNT Digital Library
EIA Directory of Electronic Products, Second quarter 1994 (open access)

EIA Directory of Electronic Products, Second quarter 1994

EIA makes available for public use a series of machine-readable data files and computer models, on magnetic tapes; selected data files/models are also available on PC diskettes. The data files include: petroleum, natural gas, electricity, coal, integrated statistics, and consumption. Models include: petroleum, natural gas, electricity, coal, nuclear, and multifuel. On-line files and compact discs include: electronic publishing system, federal bulletin board, economic bulletin board, national trade data bank, national economic/social/environmental data bank, and FedWorld Gateway. For each product listed in this directory, an abstract describes the data published. Contact persons are provided, as are indexes.
Date: July 26, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
An experimental and numerical study of the modifications of mixed-layer structure by inhomogeneous surface fluxes and secondary circulations (open access)

An experimental and numerical study of the modifications of mixed-layer structure by inhomogeneous surface fluxes and secondary circulations

The problem of scale interactions in the planetary boundary layer (PBL), i.e., how forcing mechanisms of differing spatial and temporal scales affect the properties of the PBL, has been a subject of considerable interest for some time. One aspect of this problem that has received increasing attention in recent years is the representation, in mesoscale and general circulation models. of the effects of subgrid-scale inhomogeneities in surface properties. Differences in sensible and latent heat fluxes between adjacent areas can result in secondary circulations. modifications to the boundary layer structure, and the transport of heat and moisture from one area to another. Despite their potential included on local PBL properties, such effects can not be resolved by numerical models whose scale is too coarse; thus, suitable parameterizations that account for these phenomena are needed. In this paper the authors present some results of wind and temperature measurements over an area with significant variations in surface fluxes on scales of O(10 km). They then use fine resolution numerical simulations to show how synoptic, topographical, and thermal forcing combine to affect the properties of the PBL in the region. Specifically, they consider the relative importance of topography and land-use differences on the generation …
Date: July 1, 1994
Creator: Zhong, S. & Doran, J. C.
Object Type: Report
System: The UNT Digital Library
Plasma shape experiments for an optimized tokamak (open access)

Plasma shape experiments for an optimized tokamak

In this paper we present results from recent experiments at DIII-D which measured the plasma stability and confinement performance product, {beta}{tau}{sub E}, in one previously studied and three new plasma shapes. One important goal of these experiments was to identify performance vs shape trends which would identify a shape compatible with both high performance and the planned effort to decrease the power flux to the divertor floor using a closed ``slot`` divertor geometry. power flux to the divertor floor using a closed ``slot`` divertor geometry. The closed divertor hardware must be designed for a reduced set of plasma shapes, so care must be taken to choose the shape that optimizes {beta}{tau}{sub E} and divertor performance. The four shapes studied form a matrix of moderate and high elongations ({kappa} {congruent} 1.8 and 2.1) and low and high triangularities ({delta} {congruent} 0.3 and 0.9). All configurations were double-null diverted (DND), held fixed during a shot, with neutral beam heating. The shapes span a range of X-point locations compatible with the envisioned closed divertor. We find that from shape to shape, a shot`s transient normalized performance, {beta}{sub N}H, where {beta}{sub N} {equivalent_to} {beta}/(I{sup p})/aB{sub T} and H {equivalent_to} {tau}{sub E}/{tau}{sub E}{sup ITER-89P}, increases …
Date: July 1, 1994
Creator: Hyatt, A. W.; Osborne, T. H. & Lazarus, E. A.
Object Type: Article
System: The UNT Digital Library
Silicon nitride and oxynitride film formation using electron cyclotron resonance plasmas (open access)

Silicon nitride and oxynitride film formation using electron cyclotron resonance plasmas

Growth of dielectrics from electron cyclotron resonance (ECR) plasmas can provide for low-temperature surface passivation and gate-quality insulation. Properties of SiN{sub x} and SiN{sub x}O{sub y} were measured on three model substrates: Si, GaAs, and InSb. The hydrogen incorporated into as-grown SiN{sub x} was primarily bonded to nitrogen and the total H content decreased with increasing deposition temperature (100--600 C). A model for the thermal release of H from Si-H bonds and two types of N-H bonds described the energetics of the H stability. A thermally-grown SiO{sub 2} layer improved the interface between ECR-deposited SiN{sub x} and Si, yielding an interface-state density of 1.5 {times} 10{sup 11} cm{sup {minus}2} eV{sup {minus}1} (midgap). The thermal release of H from SiN{sub x} on GaAs passivated non-radiative recombination centers. The difference in adhesion of Si{sub 3}N{sub 4} on InSb and the adhesion of Si{sub 3}ON{sub 2} on InSb was described in terms of the strength of the bonding at the dielectric-InSb interface, and the room-temperature growth of a high-quality dielectric on InSb was demonstrated.
Date: July 1, 1994
Creator: Barbour, J. C.
Object Type: Article
System: The UNT Digital Library
Proceedings of the Third NRC/ASME Symposium on Valve and Pump Testing. Volume 2, Session 3A--Session 4B (open access)

Proceedings of the Third NRC/ASME Symposium on Valve and Pump Testing. Volume 2, Session 3A--Session 4B

The 1994 Symposium on Valve and Pump Testing, jointly sponsored by the Board of Nuclear Codes and Standards of the American Society of Mechanical Engineers and by the Nuclear Regulatory Commission, provides a forum for the discussion of current programs and methods for inservice testing and motor-operated valve testing at nuclear power plants. The symposium also provides an opportunity to discuss the need to improve that testing in order to help ensure the reliable performance of pumps and valves. The participation of industry representatives, regulators, and consultants results in the discussion of a broad spectrum of ideas and perspectives regarding the improvement of inservice testing of pumps and valves at nuclear power plants. Individual papers have been cataloged separately.
Date: July 1, 1994
Creator: unknown
Object Type: Article
System: The UNT Digital Library
Ion exchange and absorption techniques to apply catalysts for liquefaction of lower rank coals (open access)

Ion exchange and absorption techniques to apply catalysts for liquefaction of lower rank coals

Samples of Beulah-zap lignite, Black Thunder and Wyodak subbituminous, and Illinois No. 6 high volatile bituminous coals have been prepared by acid treatment to remove exchangeable cations. Subsequent treatments were made with solutions of catalytic metals including iron or cobalt or nickel to exchange with the acid sites, or with molybdate to adsorb on the surface. Samples were then subjected to liquefaction conditions in microautoclave tubular microreactors and solvent extraction was used to establish total conversion or yields of oils, asphaltenes and preasphaltenes. Results of the liquefaction experiments are compared with the catalyst loadings.
Date: July 1, 1994
Creator: Vorres, K. S.; Cronauer, D. C.; Curtis, C. W. & Brannan, C. J.
Object Type: Article
System: The UNT Digital Library
Transverse momentum dependence of Bose-Einstein correlations in S+nucleus collisions at 200 GeV/nucleon (open access)

Transverse momentum dependence of Bose-Einstein correlations in S+nucleus collisions at 200 GeV/nucleon

The NA35 experiment has collected a high statistics set of momentum analyzed negative hadrons near and forward of mid-rapidity for central collisions of 200 GeV/Nucleon {sup 32}S projectiles incident on S, Ag and Au targets. Using two pion momentum space correlations in order to study the size of the source of particle production, small dependences upon transverse momentum are found for the transverse source dimensions; however for the heaviest system, R{sub long} decreases by about 40% as transverse momentum is increased over the interval 50 < P{sub T} < 600 MeV/c. Preliminary model calculations using a microscopic phase space approach (RQMD) appear to reproduce the observed characteristics of the data.
Date: July 1, 1994
Creator: Morse, R. J. & Collaboration, NA35
Object Type: Article
System: The UNT Digital Library
Listing of awardee names: Active awards (open access)

Listing of awardee names: Active awards

This catalog/directory presents DOE`s procurement and assistance data system, arranged according to awardee name, bin, completion date, description of work, division, vendor ID, city, state, congressional district, contract value, obligations to date, P/S.
Date: July 1, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
Information Management Strategic Plan. Information: The fuel for success (open access)

Information Management Strategic Plan. Information: The fuel for success

Reliable information is key to the ultimate success of the Departmental Strategic Plan. To help ensure that success, this Information Management Strategic Plan has been developed, which evolved from and directly supports the Departmental Strategic Plan and the Human Resources and Administration Strategic Plan.
Date: July 1, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
Tank exhaust comparison with 40 CFR 61.93, Subpart H, and other referenced guidelines for Tank Farms National Emission Standards for Hazardous Air Pollutant (NESHAP) designated stacks (open access)

Tank exhaust comparison with 40 CFR 61.93, Subpart H, and other referenced guidelines for Tank Farms National Emission Standards for Hazardous Air Pollutant (NESHAP) designated stacks

The US Environmental Protection Agency (EPA) promulgated National Emission Standards other than Radon from US Department of Energy (DOE) Facilities (40 CFR 61, Subpart H) on December 15, 1989. The regulations specify procedures, equipment, and test methods that.are to be used to measure radionuclide emissions from exhaust stacks that are designated as National Emission Standards for Hazardous Air Pollutant (NESHAP) stacks. Designated NESHAP stacks are those that have the potential to cause any member of the public to receive an effective dose equivalent (EDE) greater than or equal to 0.1 mrem/year, assuming all emission controls were removed. Tank Farms currently has 33 exhaust stacks, 15 of which are designated NESHAP stacks. This document assesses the compliance status of the monitoring and sampling systems for the designated NESHAP stacks.
Date: July 1, 1994
Creator: Bachand, D. D. & Crummel, G. M.
Object Type: Report
System: The UNT Digital Library
Biological upgrading of coal liquids. Quarterly report, January 1, 1994--March 31, 1994 (open access)

Biological upgrading of coal liquids. Quarterly report, January 1, 1994--March 31, 1994

A biological process for upgrading of coal liquids would offer significant advantages, such as operation at ordinary temperature and pressure with better energy efficiency. Of greater importance is the fact that microorganisms do not require an external supply of hydrogen for heteroatom removal, obtaining the required hydrogen from water. Furthermore, the biocatalysts are continuously regenerated by growth on the heteroatom compounds. Ring structures are degraded as the heteroatoms are removed. The heteroatoms are in an innocuous form, such as NH{sub 3}, SO{sub 4}{sup =}, CO{sub 2} and H{sub 2}O. Therefore, there is significant potential for the development of an economical biological process for upgrading coal liquids. This report describes experiments to screen known bacteria and develop isolates for N, O and S removal and aromaticity reduction.
Date: July 1, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
Sonic enhanced ash agglomeration and sulfur capture. Nineteenth quarterly technical progress report, January 3, 1994--March 27, 1994 (open access)

Sonic enhanced ash agglomeration and sulfur capture. Nineteenth quarterly technical progress report, January 3, 1994--March 27, 1994

A major concern with the utilization of coal in directly fired gas turbines is the control of particulate emissions and reduction of sulfur dioxide, and alkali vapor from combustion of coal, up-stream of the gas turbine. Much research and development has been sponsored on methods for particulate emissions control and the direct injection of calcium-based sorbents to reduce SO{sub 2} emission levels. The results of this research and development indicate that both acoustic agglomeration of particulates and direct injection of sorbents have the potential to become a significant emissions control strategy. The Sonic Enhanced Ash Agglomeration and Sulfur Capture program focuses upon the application of an MTCI proprietary invention (Patent No. 5,197,399) for simultaneously enhancing sulfur capture and particulate agglomeration of the combustor effluent. This application can be adapted as either a ``hot flue gas cleanup`` subsystem for the current concepts for combustor islands or as an alternative primary pulse combustor island in which slagging, sulfur capture, particulate agglomeration and control, and alkali gettering as well as NO{sub x} control processes become an integral part of the pulse combustion process. The goal of the program is to support the DOE mission in developing coal-fired combustion gas turbines. In particular, the …
Date: July 1, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
Tevatron lower temperature operation (open access)

Tevatron lower temperature operation

This year saw the completion of three accelerator improvement projects (AIP) and two capital equipment projects pertaining to the Tevatron cryogenic system. The projects result in the ability to operate the Tevatron at lower temperature, and thus higher energy. Each project improves a subsystem by expanding capabilities (refrigerator controls), ensuring reliability (valve box, subatmospheric hardware, and compressor D), or enhancing performance (cold compressors and coldbox II). In January of 1994, the Tevatron operated at an energy of 975 GeV for the first time. This was the culmination, of many years of R&D, power testing in a sector (one sixth) of the Tevatron, and final system installation during the summer of 1993. Although this is a modest increase in energy, the discovery potential for the Top quark is considerably improved.
Date: July 1, 1994
Creator: Theilacker, J. C.
Object Type: Report
System: The UNT Digital Library
The development of an integrated multistage fluid bed retorting process. Quarterly report, January 1994--March 1994 (open access)

The development of an integrated multistage fluid bed retorting process. Quarterly report, January 1994--March 1994

This report summarizes the progress made on the development of an integrated multistage fluidized bed retorting process (KENTORT II) during the period of January 1, 1994 through March 31, 1994 under Cooperative Agreement No. DE-FC21-90MC27286 with the Morgantown Energy Technology Center, U.S. Department of Energy. The KENTORT II process includes integral fluidized bed zones for pyrolysis, gasification, and combustion of the oil shale. The purpose of this program is to design and test the KENTORT II process at the 50-lb/hr scale. Modifications to the system were completed that improved the start-up burner system and reduced thermal losses. Final shakedown tests were performed that demonstrated gasification zone and combustion zone temperatures of 800 and 900{degrees}C, respectively, at a raw shale feed rate of 50 lb/hr. Ash agglomeration and slagging was encountered during some of these tests, and these materials were analyzed by scanning electron microscopy and energy dispersive X-ray analysis. By limiting the combustion plenum chamber to 1100{degrees}C during heat up and by maintaining sufficient solid recycle to the combustor, it is believed that ash agglomeration difficulties will be eliminated.
Date: July 1, 1994
Creator: Carter, S.; Stehn, J.; Vego, A. & Graham, U.
Object Type: Report
System: The UNT Digital Library
Remedial technology and characterization development at the SRS F/H Retention Basins using the DOE SAFER methodology (open access)

Remedial technology and characterization development at the SRS F/H Retention Basins using the DOE SAFER methodology

The Streamlined Approach For Environmental Restoration (SAFER) is a strategy used to accelerate and improve the environmental assessment and remediation of the F/H Retention Basins at the Savannah River Site (SRS). TMs strategy combines the data quality objectives (DQO) process and the observational approach to focus on data collection and converge on a remedial action early. This approach emphasizes stakeholder involvement throughout the Remedial Investigation/Feasibility Study (RI/FS) process. The SAFER methodology is being applied to the characterization, technology development, and remediation tasks for the F/H Retention Basins. This ``approach was initiated in the scoping phase of these projects through the involvment of major stakeholders; Department of Energy (DOE)-Savannah River Field Office, DOE-Headquarters, Westinghouse Savannah River Company, United States Environmental Protection Agency (EPA) Region IV, and the state of South Carolina Department of Health and Environmental Control (SCDHEC), in the development of the Remedial Investigation (RI) workplans. A major activity that has been initiated is the development and implementation of a phase I workplan to identify preliminary contaminants of concern (pCOCs). A sampling plan was developed and approved by the major stakeholders for preliminary characterization of wastes remaining in the F/H Retention Basins. The involvement of stakeholders, development of a site …
Date: July 1, 1994
Creator: Miles, W. C. Jr. & Kuelske, K. J.
Object Type: Article
System: The UNT Digital Library
Energy Division annual progress report for period ending September 30, 1993 (open access)

Energy Division annual progress report for period ending September 30, 1993

One of 17 research divisions at Oak Ridge National Laboratory, Energy Division`s mission is to provide innovative solutions to energy and related issues of national and global importance through interdisciplinary research and development. Its goals and accomplishments are described in this annual progress report for FY1993. Energy Division is committed to (1) understanding the mechanisms by which societies make choices in energy use; (2) improving society`s understanding of the environmental, social, and economic implications of technological change; (3) developing and transferring energy-efficient technologies; (4) improving transportation policy and planning; (5) enhancing basic knowledge in the social sciences as related to energy and associated issues. Energy Division`s expenditures in FY1993 totaled $42 million. The work was supported by the US DOE, DOD, many other federal agencies, and some private organizations. Disciplines of the 126.5 technical staff members include engineering, social sciences, physical and life sciences, and computer sciences and data systems. The division`s programmatic activities cover three main areas: (1) analysis and assessment, (2) energy use and delivery technologies, and (3) transportation systems. Analysis and assessment activities involve energy and resource analysis, preparation of environmental assessments and impact statements, research on emergency preparedness, transportation analysis, and analysis of energy and environmental …
Date: July 1, 1994
Creator: Wolff, P. P.
Object Type: Report
System: The UNT Digital Library
Environmental assessment for the resiting, construction, and operation of the Environmental and Molecular Sciences Laboratory at the Hanford Site, Richland, Washington (open access)

Environmental assessment for the resiting, construction, and operation of the Environmental and Molecular Sciences Laboratory at the Hanford Site, Richland, Washington

This environmental assessment (EA) presents estimated environmental impacts from the resiting, construction, and operation of the US Department of Energy`s (DOE`s) Environmental and Molecular Sciences Laboratory (EMSL), which is proposed to be constructed and operated on land near the south boundary of the Hanford Site near Richland, Washington. The EMSL, if constructed, would be a modern research facility in which experimental, theoretical, and computational techniques can be focused on environmental restoration problems, such as the chemical and transport behavior of complex mixtures of contaminants in the environment. The EMSL design includes approximately 18,500 square meters (200,000 square feet) of floor space on a 12-hectare (30-acre) site. The proposed new site is located within the city limits of Richland in north Richland, at the south end of DOE`s 300 Area, on land to be deeded to the US by the Battelle Memorial Institute. Approximately 200 persons are expected to be employed in the EMSL and approximately 60 visiting scientists may be working in the EMSL at any given time. State-of-the-art equipment is expected to be installed and used in the EMSL. Small amounts of hazardous substances (chemicals and radionuclides) are expected to be used in experimental work in the EMSL.
Date: July 1, 1994
Creator: unknown
Object Type: Report
System: The UNT Digital Library
Hanford gas dispersion analysis (open access)

Hanford gas dispersion analysis

An analysis was performed to verify the design of a waste gas exhauster for use in support of rotary core sampling activities at the Westinghouse Hanford Waste Tank Farm. The exhauster was designed to remove waste gases from waste storage tanks during the rotary core drilling process of the solid materials in the tank. Some of the waste gases potentially are very hazardous and must be monitored during the exhauster`s operation. If the toxic gas concentrations in specific areas near the exhauster exceed minimum Threshold Limit Values (TLVs), personnel must be excluded from the area. The exhauster stack height is of interest because an increase in stack height will alter the gas concentrations at the critical locations. The exhaust stack is currently {approximately}4.6 m (15 ft) high. An equipment operator will be located within a 6.1 m (20 ft) radius of the exhaust stack, and his/her head will be at an elevation 3.7 m (12 ft) above ground level (AGL). Therefore, the maximum exhaust gas concentrations at this location must be below the TLV for the toxic gases. Also, the gas concentrations must be within the TLV at a 61 m (200 ft) radius from the stack. If the calculated …
Date: July 1, 1994
Creator: Fujita, R. K. & Travis, J. R.
Object Type: Article
System: The UNT Digital Library
Technology issues for decommissioning the Tokamak Fusion Test Reactor (open access)

Technology issues for decommissioning the Tokamak Fusion Test Reactor

The approach for decommissioning the Tokamak Fusion Test Reactor has evolved from a conservative plan based on cutting up and burying all of the systems, to one that considers the impact tritium contamination will have on waste disposal, how large size components may be used as their own shipping containers, and even the possibility of recycling the materials of components such as the toroidal field coils and the tokamak structure. In addition, the project is more carefully assessing the requirements for using remotely operated equipment. Finally, valuable cost database is being developed for future use by the fusion community.
Date: July 1, 1994
Creator: Spampinato, P. T.; Walton, G. R. & Commander, J. C.
Object Type: Article
System: The UNT Digital Library
Projection Gas Immersion Laser Doping (P-GILD): A resistless, nanosecond thermal doping/diffusion technology (open access)

Projection Gas Immersion Laser Doping (P-GILD): A resistless, nanosecond thermal doping/diffusion technology

Projection Gas Immersion Laser Doping (P-GILD) is an innovative doping process that utilizes finely patterned excimer laser light to thermally process discreet regions within an integrated circuit. By reducing the total temperature cycle to nanoseconds and localizing the thermal energy in depth and area, P-GILD fundamentally changes the junction formation process. This paper first reviews the general characteristics of the P-GILD process and equipment. Two variations of the technique, melt and non-melt, and their resulting junction characteristics are then described in detail. The combination of the two laser processes along with the simplification that a resistless technology brings to the process sequence, enables efficient fabrication of impurity profiles that are ideal for a wide array of transistor applications.
Date: July 27, 1994
Creator: Weiner, K. H.
Object Type: Article
System: The UNT Digital Library