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Untrimmed hybrid microcircuit networks require dimensional dontrol to maintain critical electrical parameters within the required tolert.- ances. Dimensional integrity can be maintained by parameter manipulation and control. Five processing parameters affect the dimensional stability of the pattern: the prebake time-temperature product, exposure energy, developing time and concentration, resist thickness uniformity, and etchant undercutting. By adjusting the relative dominance of those parameters and by. optimizing the value of each, the total dimensional deviation can be made relatively insensitive to normal process variations. Thus, process characterization and control methods which will maintain one-percent dimensional control on lines as narrow as 5.0 mils - (127 Km) can be established.