Determining the critical size of EUV mask substrate defects (open access)

Determining the critical size of EUV mask substrate defects

Determining the printability of substrate defects beneath the extreme ultraviolet (EUV) reflecting multilayer stack is an important issue in EUVL lithography. Several simulation studies have been performed in the past to determine the tolerable defect size on EUV mask blank substrates but the industry still has no exact specification based on real printability tests. Therefore, it is imperative to experimentally determine the printability of small defects on a mask blanks that are caused by substrate defects using direct printing of programmed substrate defect in an EUV exposure tools. SEMATECH fabricated bump type program defect masks using standard electron beam lithography and performed printing tests with the masks using an EUV exposure tool. Defect images were also captured using SEMATECH's Berkeley Actinic Imaging Tool in order to compare aerial defect images with secondary electron microscope images from exposed wafers. In this paper, a comprehensive understanding of substrate defect printability will be presented and printability specifications of EUV mask substrate defects will be discussed.
Date: May 26, 2008
Creator: Goldberg, Kenneth A.; Gullikson, Eric M.; Han, Hakseung; Cho, Wonil; Jeon, Chan-Uk & Wurm, Stefan
Object Type: Article
System: The UNT Digital Library
EUV mask reflectivity measurements with micron-scale spatial resolution (open access)

EUV mask reflectivity measurements with micron-scale spatial resolution

The effort to produce defect-free mask blanks for EUV lithography relies on increasing the detection sensitivity of advanced mask inspection tools, operating at several wavelengths. We describe the unique measurement capabilities of a prototype actinic (EUV wavelength) microscope that is capable of detecting small defects and reflectivity changes that occur on the scale of microns to nanometers. Types of defects: (a) Buried Substrate Defects: particles & pits (causes amplitude and/or phase variations); (b) Surface Contamination (reduces reflectivity and (possibly) contrast); (c) Damage from Inspection and Use (reduces the reflectivity of the multilayer coating). This paper presents an overview of several topics where scanning actinic inspection makes a unique contribution to EUVL research. We describe the role of actinic scanning inspection in four cases: defect repair studies; observations of laser damage; after scanning electron microscopy; and native and programmed defects.
Date: May 26, 2008
Creator: Goldberg, Kenneth A.; Rekawa, S. B.; Kemp, C. D.; Barty, A.; Anderson, E. H.; Kearney, Patrick et al.
Object Type: Article
System: The UNT Digital Library
Military Pay and Benefits: Key Questions and Answers (open access)

Military Pay and Benefits: Key Questions and Answers

None
Date: May 26, 2005
Creator: Goldich, Robert L.
Object Type: Report
System: The UNT Digital Library
Transgenic Mouse Model of Chronic Beryllium Disease (open access)

Transgenic Mouse Model of Chronic Beryllium Disease

Animal models provide powerful tools for dissecting dose-response relationships and pathogenic mechanisms and for testing new treatment paradigms. Mechanistic research on beryllium exposure-disease relationships is severely limited by a general inability to develop a sufficient chronic beryllium disease animal model. Discovery of the Human Leukocyte Antigen (HLA) - DPB1Glu69 genetic susceptibility component of chronic beryllium disease permitted the addition of this human beryllium antigen presentation molecule to an animal genome which may permit development of a better animal model for chronic beryllium disease. Using FVB/N inbred mice, Drs. Rubin and Zhu, successfully produced three strains of HLA-DPB1 Glu 69 transgenic mice. Each mouse strain contains a haplotype of the HLA-DPB1 Glu 69 gene that confers a different magnitude of odds ratio (OR) of risk for chronic beryllium disease: HLA-DPB1*0401 (OR = 0.2), HLA-DPB1*0201 (OR = 15), HLA-DPB1*1701 (OR = 240). In addition, Drs. Rubin and Zhu developed transgenic mice with the human CD4 gene to permit better transmission of signals between T cells and antigen presenting cells. This project has maintained the colonies of these transgenic mice and tested the functionality of the human transgenes.
Date: May 26, 2009
Creator: Gordon, Terry
Object Type: Report
System: The UNT Digital Library
Towards an Accurate Performance Modeling of Parallel SparseFactorization (open access)

Towards an Accurate Performance Modeling of Parallel SparseFactorization

We present a performance model to analyze a parallel sparseLU factorization algorithm on modern cached-based, high-end parallelarchitectures. Our model characterizes the algorithmic behavior bytakingaccount the underlying processor speed, memory system performance, aswell as the interconnect speed. The model is validated using theSuperLU_DIST linear system solver, the sparse matrices from realapplications, and an IBM POWER3 parallel machine. Our modelingmethodology can be easily adapted to study performance of other types ofsparse factorizations, such as Cholesky or QR.
Date: May 26, 2006
Creator: Grigori, Laura & Li, Xiaoye S.
Object Type: Article
System: The UNT Digital Library
NOVEL CONCEPTS RESEARCH IN GEOLOGIC STORAGE OF CO2 PHASE III THE OHIO RIVER VALLEY CO2 STORAGE PROJECT (open access)

NOVEL CONCEPTS RESEARCH IN GEOLOGIC STORAGE OF CO2 PHASE III THE OHIO RIVER VALLEY CO2 STORAGE PROJECT

As part of the Department of Energy's (DOE) initiation on developing new technologies for storage of carbon dioxide in geologic reservoir, Battelle has been awarded a project to investigate the feasibility of CO{sub 2} sequestration in the deep saline reservoirs in the Ohio River Valley region. This project is the Phase III of Battelle's work under the Novel Concepts in Greenhouse Gas Management grant. The main objective of the project is to demonstrate that CO{sub 2} sequestration in deep formations is feasible from engineering and economic perspectives, as well as being an inherently safe practice and one that will be acceptable to the public. In addition, the project is designed to evaluate the geology of deep formations in the Ohio River Valley region in general and in the vicinity of AEP's Mountaineer Power Plant in particular, in order to determine their potential use for conducting a long-term test of CO{sub 2} disposal in deep saline formations and potentially in nearby deep coal seams. The current technical progress report summarizes activities completed for the January through March 2005 period of the project. As discussed in the report, the technical activities focused on development of injection well design, preparing a Class V …
Date: May 26, 2005
Creator: Gupta, Neeraj
Object Type: Report
System: The UNT Digital Library
Secondary shock formation in xenon-nitrogen mixtures (open access)

Secondary shock formation in xenon-nitrogen mixtures

None
Date: May 26, 2006
Creator: Hansen, J. F.; Edwards, M. J.; Froula, D. H.; Edens, A. D.; Gregori, G. & Ditmire, T.
Object Type: Article
System: The UNT Digital Library
Association Health Plans: Legislation in the 109th Congress (open access)

Association Health Plans: Legislation in the 109th Congress

An estimated 41.2 million people were without health insurance in 2001. Legislation under consideration by the 108th and earlier Congresses is intended to assist small employers in offering health insurance as a benefit to their workers. A new bill, H.R. 4281, introduced on May 5, 2004, The Small Business Health Fairness Act of 2003 (H.R. 6601s. 545), and a number of bills from the earlier Congresses include provisions creating new groups for small firms to join or encouraging the growth of existing groups so that small employers can band together to offer coverage to their employees. Opponents of the AHP approach raise concerns that unintended negative consequences would arise, negating the benefits that the new groups would create. While the proposed AHPs are not likely to immediately undermine the small group market, they are likely to require additional features to significantly expand insurance coverage among the uninsured.
Date: May 26, 2005
Creator: Hearne, Jean P.
Object Type: Report
System: The UNT Digital Library
27Al and 1H Solid State NMR Studies Show Evidence of TiAl3 and TiH2 in Ti-doped NaAlH4 (open access)

27Al and 1H Solid State NMR Studies Show Evidence of TiAl3 and TiH2 in Ti-doped NaAlH4

Previous X-ray Diffraction (XRD) and Nuclear Magnetic Resonance (NMR) studies on Ti-doped NaAlH{sub 4} revealed the reaction products of two heavily doped (33.3 at.%) samples that were solvent-mixed and mechanically-milled. This investigation revealed that nano-crystalline or amorphous Al{sub 2}O{sub 3} forms from the possible coordination of aluminum with oxygen atom of the furan ring system from added tetrahydrofuran (THF) in the solvent-mixed sample, and that TiAl{sub 3} forms in mechanically-milled samples. The present paper provides a more sophisticated NMR investigation of the these materials. On heavily doped (33.3 at.%) solvent-mixed samples, {sup 27}Al Magic Angle Spinning (MAS) NMR {sup 27}Al multiple quantum MAS (MQMAS) indicates the presence of an oxide layer of Al{sub 2}O{sub 3} on the surfaces of potentially bulk nanocrystalline Ti, nanocrystalline TiAl{sub 3}, and/or metallic aluminum. The {sup 1}H MAS NMR data also indicate the possible coordination of aluminum with the oxygen atom in the THF. On heavily doped samples that were mechanically milled, {sup 27}Al MAS NMR and static NMR confirms the presence of TiAl{sub 3}. In addition, the {sup 1}H MAS NMR and {sup 1}H spin-lattice relaxation (T{sub 1}) measurements are consistent with the presence of TiH{sub 2}. These results are in agreement with recent …
Date: May 26, 2005
Creator: Herberg, J; Maxwell, R & Majzoub, E
Object Type: Article
System: The UNT Digital Library
[Letters from Linda J. Hoffman to the BRAC - May 26, 2005] (open access)

[Letters from Linda J. Hoffman to the BRAC - May 26, 2005]

Letters from Linda Hoffman to Defense Base Closure and Realignment Commission (BRAC) members in support of Cannon Air Force Base.
Date: May 26, 2005
Creator: Hoffman, Linda J.
Object Type: Letter
System: The UNT Digital Library
Abrupt onset of a second energy gap at the superconducting transition of underdoped Bi2212 (open access)

Abrupt onset of a second energy gap at the superconducting transition of underdoped Bi2212

he superconducting gap--an energy scale tied to the superconducting phenomena--opens on the Fermi surface at the superconducting transition temperature (Tc) in conventional BCS superconductors. In underdoped high-Tc superconducting copper oxides, a pseudogap (whose relation to the superconducting gap remains a mystery) develops well above Tc (refs 1, 2). Whether the pseudogap is a distinct phenomenon or the incoherent continuation of the superconducting gap above Tc is one of the central questions in high-Tc research3, 4, 5, 6, 7, 8. Although some experimental evidence suggests that the two gaps are distinct9, 10, 11, 12, 13, 14, 15, 16, 17, 18, this issue is still under intense debate. A crucial piece of evidence to firmly establish this two-gap picture is still missing: a direct and unambiguous observation of a single-particle gap tied to the superconducting transition as function of temperature. Here we report the discovery of such an energy gap in underdoped Bi2Sr2CaCu2O8+delta in the momentum space region overlooked in previous measurements. Near the diagonal of Cu?O bond direction (nodal direction), we found a gap that opens at Tc and has a canonical (BCS-like) temperature dependence accompanied by the appearance of the so-called Bogoliubov quasi-particles, a classical signature of superconductivity. This is …
Date: May 26, 2007
Creator: Hussain, Zahid; Lee, W. S.; Vishik, I. M.; Tanaka, K.; Lu, D. H.; Sasagawa, T. et al.
Object Type: Article
System: The UNT Digital Library
Proteomic Analysis of Calcium- and Phosphorylation-dependentCalmodulin Complexes in Mammalian Cells (open access)

Proteomic Analysis of Calcium- and Phosphorylation-dependentCalmodulin Complexes in Mammalian Cells

Protein conformational changes due to cofactor binding (e.g. metal ions, heme) and/or posttranslational modifications (e.g. phosphorylation) modulate dynamic protein complexes. Calmodulin (CaM) plays an essential role in regulating calcium (Ca{sup 2+}) signaling and homeostasis. No systematic approach on the identification of phosphorylation-dependent Ca{sup 2+}/CaM binding proteins has been published. Herein, we report a proteome-wide study of phosphorylation-dependent CaM binding proteins from mammalian cells. This method, termed 'Dynamic Phosphoprotein Complex Trapping', 'DPPC Trapping' for short, utilizes a combination of in vivo and in vitro assays. The basic strategy is to drastically shift the equilibrium towards endogenous phosphorylation of Ser, Thr, and Tyr at the global scale by inhibiting corresponding phosphatases in vivo. The phosphorylation-dependent calmodulin-binding proteins are then trapped in vitro in a Ca{sup 2+}-dependent manner by CaM-Sepharose chromatography. Finally, the isolated calmodulin-binding proteins are separated by SDS-PAGE and identified by LC/MS/MS. In parallel, the phosphorylation-dependent binding is visualized by silver staining and/or Western blotting. Using this method, we selectively identified over 120 CaM-associated proteins including many previously uncharacterized. We verified ubiquitin-protein ligase EDD1, inositol 1, 4, 5-triphosphate receptor type 1 (IP{sub 3}R1), and ATP-dependent RNA helicase DEAD box protein 3 (DDX3), as phosphorylation-dependent CaM binding proteins. To demonstrate the utilities …
Date: May 26, 2006
Creator: Jang, Deok-Jin & Wang, Daojing
Object Type: Article
System: The UNT Digital Library
Government-Sposored Enterprises (GSEs): Regulatory Reform Legislation (open access)

Government-Sposored Enterprises (GSEs): Regulatory Reform Legislation

This report summarizes legislative proposals in the 109th Congress that aim to strengthen the regulation of the government-sponsored enterprises (GSEs), and will be updated as warranted.
Date: May 26, 2005
Creator: Jickling, Mark
Object Type: Report
System: The UNT Digital Library
Middle to Late Holocene Fluctuations of C3 and C4 Vegetation in a Northern New England Salt Marsh, Sprague Marsh, Phippsburg Maine (open access)

Middle to Late Holocene Fluctuations of C3 and C4 Vegetation in a Northern New England Salt Marsh, Sprague Marsh, Phippsburg Maine

A 3.1 meter sediment core was analyzed for stable carbon isotope composition of organic matter and higher plant leaf wax (HPLW) lipid biomarkers to determine Holocene shifts in C{sub 3} (higher high marsh) and C{sub 4} (low and/or high marsh) plant deposition at the Sprague River Salt Marsh, Phippsburg, Maine. The carbon isotope composition of the bulk sediment and the HPLW parallel each other throughout most of the core, suggesting that terrestrial plants are an important source of organic matter to the sediments, and diagenetic alteration of the bulk sediments is minimal. The current salt marsh began to form 2500 cal yr BP. Low and/or high C{sub 4} marsh plants dominated deposition at 2000 cal yr BP, 700 cal yr BP, and for the last 200 cal yr BP. Expansion of higher high marsh C{sub 3} plants occurred at 1300 and 600 cal yr BP. These major vegetation shifts result from a combination of changes in relative sea-level rise and sediment accumulation rates. Average annual carbon sequestration rates for the last 2500 years approximate 40 g C yr{sup -1} m{sup -2}, and are in strong agreement with other values published for the Gulf of Maine. Given that Maine salt marshes …
Date: May 26, 2006
Creator: Johnson, B J; Moore, K A; Lehmann, C; Bohlen, C & Brown, T A
Object Type: Article
System: The UNT Digital Library
Reactive Transport Modeling of Cap Rock Integrity During Natural and Engineered CO2 Storage (open access)

Reactive Transport Modeling of Cap Rock Integrity During Natural and Engineered CO2 Storage

Long-term cap rock integrity represents the single most important constraint on the long-term isolation performance of natural and engineered CO{sub 2} storage sites. CO{sub 2} influx that forms natural accumulations and CO{sub 2} injection for EOR/sequestration or saline-aquifer disposal both lead to concomitant geochemical alteration and geomechanical deformation of the cap rock, enhancing or degrading its seal integrity depending on the relative effectiveness of these interdependent processes. Using our reactive transport simulator (NUFT), supporting geochemical databases and software (GEMBOCHS, SUPCRT92), and distinct-element geomechanical model (LDEC), we have shown that influx-triggered mineral dissolution/precipitation reactions within typical shale cap rocks continuously reduce microfracture apertures, while pressure and effective-stress evolution first rapidly increase then slowly constrict them. For a given shale composition, the extent of geochemical enhancement is nearly independent of key reservoir properties (permeability and lateral continuity) that distinguish EOR/sequestration and saline-aquifer settings and CO{sub 2} influx parameters (rate, focality, and duration) that distinguish engineered disposal sites and natural accumulations, because these characteristics and parameters have negligible (indirect) impact on mineral dissolution/precipitation rates. In contrast, the extent of geomechanical degradation is highly dependent on these reservoir properties and influx parameters because they effectively dictate magnitude of the pressure perturbation; specifically, initial geomechanical …
Date: May 26, 2004
Creator: Johnson, J. W.; Nitao, J. J. & Morris, J. P.
Object Type: Article
System: The UNT Digital Library
Low Cost Geothermal Separators BLISS Boundary Layer Inline Separator Scrubber (open access)

Low Cost Geothermal Separators BLISS Boundary Layer Inline Separator Scrubber

A new compact, low cost, and high performance separator is being developed to help reduce the installed and O and M cost of geothermal power generation. This device has been given the acronym ''BLISS'' that stands for ''Boundary Layer Inline Separator Scrubber''. The device is the first of a series of separators, and in the case of injectates, scrubbers to address the cost-reduction needs of the industry. The BLISS is a multi-positional centrifugal separator primarily designed to be simply installed between pipe supports, in a horizontal position. This lower profile reduces the height safety concern for workers, and significantly reduces the total installation cost. The vessel can demand as little as one-quarter (25%) the amount of steel traditionally required to fabricate many large vertical separators. The compact nature and high separating efficiency of this device are directly attributable to a high centrifugal force coupled with boundary layer control. The pseudo isokinetic flow design imparts a self-cleaning and scale resistant feature. This polishing separator is designed to remove moderate amounts of liquid and entrained solids.
Date: May 26, 2000
Creator: Jung, Douglas & Wai, King
Object Type: Report
System: The UNT Digital Library
China and Proliferation of Weapons of Mass Destruction and Missiles: Policy Issues (open access)

China and Proliferation of Weapons of Mass Destruction and Missiles: Policy Issues

Using a variety of unclassified consultations and sources, this report discusses the national security problem of the People's Republic of China's (PRC) role in weapons proliferation and issues related to the U.S. policy response, including legislation, since the mid-1990s.
Date: May 26, 2009
Creator: Kan, Shirley A.
Object Type: Report
System: The UNT Digital Library
Stabilization of Sawtooth Oscillations by the Circulating Energetic Ions (open access)

Stabilization of Sawtooth Oscillations by the Circulating Energetic Ions

The influence of the well-circulating energetic ions on the ideal kink instability and semi-collisional tearing mode are studied. It is found that the precession of these ions can be a key factor that affects the instability: it can lead to the stabilization of the mentioned instabilities, the effect being weakly dependent on the direction of the injection. The developed theory is consistent with the experimental observations of the stabilization of sawtooth oscillations during the negative-ion-based neutral beam injection in JT-60U.
Date: May 26, 2004
Creator: Kolesnichenko, Ya.I.; Marchenko, V.S. & R.B.White
Object Type: Report
System: The UNT Digital Library
India-U.S. Relations (open access)

India-U.S. Relations

The end of the Cold War freed India-U.S. relations from the constraints of global bipolarity, but interactions continued for a decade to be affected by the burden of history, most notably the longstanding India-Pakistan rivalry and nuclear weapons proliferation in the region. Recent years, however, have witnessed a sea change in bilateral relations, with more positive interactions becoming the norm. India's swift offer of full support for U.S.-led counterterrorism operations after September 2001 was widely viewed as reflective of such change. The United States seeks to curtail the proliferation of nuclear weapons and ballistic missiles in South Asia. Continuing U.S. interest in South Asia focuses on ongoing tensions between India and Pakistan. U.S. concerns about human rights issues related to regional dissidence and separatism in several Indian states continue. Many U.S. business interests view India as a lucrative market and candidate for foreign investment.
Date: May 26, 2006
Creator: Kronstadt, K. Alan
Object Type: Report
System: The UNT Digital Library
Pakistan-U.S. Relations (open access)

Pakistan-U.S. Relations

None
Date: May 26, 2005
Creator: Kronstadt, K. Alan
Object Type: Report
System: The UNT Digital Library
Simulation Results for the New NSTX HHFW Antenna Straps Design by Using Microwave Studio (open access)

Simulation Results for the New NSTX HHFW Antenna Straps Design by Using Microwave Studio

Experimental results have shown that the high harmonic fast wave (HHFW) at 30 MHz can provide substantial plasma heating and current drive for the NSTX spherical tokamak operation. However, the present antenna strap design rarely achieves the design goal of delivering the full transmitter capability of 6 MW to the plasma. In order to deliver more power to the plasma, a new antenna strap design and the associated coaxial line feeds are being constructed. This new antenna strap design features two feedthroughs to replace the old single feed-through design. In the design process, CST Microwave Studio has been used to simulate the entire new antenna strap structure including the enclosure and the Faraday shield. In this paper, the antenna strap model and the simulation results will be discussed in detail. The test results from the new antenna straps with their associated resonant loops will be presented as well.
Date: May 26, 2009
Creator: Kung, C. C.; Brunkhorst, C.; Greenough, N.; Fredd, E.; Castano, A.; Miller, D. et al.
Object Type: Article
System: The UNT Digital Library
Synopsis of Cathode #4 Activation (open access)

Synopsis of Cathode #4 Activation

The purpose of this report is to describe the activation of the fourth cathode installed in the DARHT-II Injector. Appendices have been used so that an extensive amount of data could be included without danger of obscuring important information contained in the body of the report. The cathode was a 612 M type cathode purchased from Spectra-Mat. Section II describes the handling and installation of the cathode. Section III is a narrative of the activation based on information located in the Control Room Log Book supplemented with time plots of pertinent operating parameters. Activation of the cathode was performed in accordance with the procedure listed in Appendix A. The following sections provide more details on the total pressure and constituent partial pressures in the vacuum vessel, cathode heater power/filament current, and cathode temperature.
Date: May 26, 2006
Creator: Kwan, Joe; Ekdahl, C.; Harrison, J.; Kwan, J.; Leitner, M.; McCruistian, T. et al.
Object Type: Report
System: The UNT Digital Library
A Currency Board as an Alternative to a Central Bank (open access)

A Currency Board as an Alternative to a Central Bank

None
Date: May 26, 2004
Creator: Labonte, Marc & Makinen, Gail
Object Type: Report
System: The UNT Digital Library
Tank 50H Flammability Calculations (open access)

Tank 50H Flammability Calculations

This report presents the results form the Phase 1 testing. Phase 1 was designed to determine the tetraphenylborate decomposition rate of the 4PB present in Tank 50H if Tank 23H or Inhibited Water is added to the tank.
Date: May 26, 2003
Creator: Lambert, D.P.
Object Type: Report
System: The UNT Digital Library