This paper discusses the techniques, developed over the past year, for high spatial resolution measurement and analysis of the transmitted and/or reflected wavefront of large aperture ICF optical components. Parts up to 400 mm {times} 750 mm have been measured and include: laser slabs, windows, KDP crystals and lenses. The measurements were performed using state-of-the-art commercial phase shifting interferometers at a wavelength of 633 {mu}m. Both 1 and 2-D Fourier analysis have been used to characterize the wavefront; specifically the Power Spectral Density, (PSD), function was calculated. The PSDs of several precision optical components will be shown. The PSD(V) is proportional to the (amplitude){sup 2} of components of the Fourier frequency spectrum. The PSD describes the scattered intensity and direction as a function of scattering angle in the wavefront. The capability of commercial software is limited to 1-D Fourier analysis only. We are developing our own 2-D analysis capability in support of work to revise specifications for NIF optics. 2-D analysis uses the entire wavefront phase map to construct 2D PSD functions. We have been able to increase the signal-to-noise relative to 1-D and can observe very subtle wavefront structure.

At the 1989 CIRP annual meeting, we reported on the design of a specialized, ultra-precision CNC measuring machine, and on the error budget that was developed to guide the design process. In our paper we proposed a combinatorial rule for merging estimated and/or calculated values for all known sources of error, to yield a single overall predicted accuracy for the machine. In this paper we compare our original predictions with measured performance of the completed instrument.