Silane pyrolysis in a continuous flow pyrolyzer is a simple process that is currently being developed for producing solar cell grade silicon. The process involves complex phenomena, however, including thermal decomposition of silane, nucleation and growth of silicon particles, and mass and heat transfer. Modeling the effects of transport phenomena on silane pyrolysis in a continuous flow pyrolyzer is discussed. One- and two-dimensional models are developed to predict velocity, temperature, and concentration profiles in the reactor. The one-dimensional model has been implemented as a computer code.