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Real space soft x-ray imaging at 10 nm spatial resolution
Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
Date:
April 24, 2011
Creator:
Chao, Weilun; Fischer, Peter; Tyliszczak, T.; Rekawa, Senajith; Anderson, Erik & Naulleau, Patrick
System:
The UNT Digital Library