Degree Department
2 Matching Results
Results open in a new window/tab.
Results:
1 - 2 of
2
Rapid isothermal annealing of As-, P-, and B-implanted silicon
This article discusses rapid idothermal annealing of As-, P-, and B-implanted silicon.
Date:
June 15, 1984
Creator:
Wilson, Scott R.; Paulson, W. M.; Gregory, R. B.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
System:
The UNT Digital Library
Fast diffusion of As in polycrystalline silicon during rapid thermal annealing
This article discusses fast diffusion of As in polycrystalline silicon during rapid thermal annealing.
Date:
May 30, 1984
Creator:
Wilson, Scott R.; Paulson, W. M.; Gregory, R. B.; Gressett, J. D.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
System:
The UNT Digital Library