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Thermal annealing behavior of an oxide layer under silicon
This article discusses the thermal annealing behavior of an oxide layer under silicon.
Date:
September 27, 1982
Creator:
Hamdi, A. H.; McDaniel, Floyd Del. (Floyd Delbert), 1942-; Pinizzotto, Russell F.; Matteson, Samuel E.; Lam, H. W. & Malhi, S. D. S.
System:
The UNT Digital Library
Rapid isothermal anneal of 75As implanted silicon
Article discussing a study of the rapid isothermal anneal of 75As implanted silicon.
Date:
September 1, 1982
Creator:
Wilson, Scott R.; Gregory, R. B.; Paulson, W. M.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
System:
The UNT Digital Library