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Wafer Fabrication Monitoring/Control System and Method
Patent relating to systems and methods for monitoring and testing patterning processes including etching, cleaning, and depositing of low k and ultra-low k dielectrics for semiconductor technologies.
Date:
March 15, 2012
Creator:
Chen, Jin-Jian & Chyan, Oliver M. R.
System:
The UNT Digital Library
Metal Ablation in Supersonic Expansion Gas Coupled to an Ion Mass Filter
Patent relating to metal ablation in supersonic expansion gas coupled to an ion mass filter.
Date:
December 1, 2011
Creator:
Verbeck, Guido F.
System:
The UNT Digital Library