Collisional and Radiative Effects in Transient sub-Doppler Hole Burning: Double Resonance Measurements in CN (open access)

Collisional and Radiative Effects in Transient sub-Doppler Hole Burning: Double Resonance Measurements in CN

We report transient hole-burning and saturation recovery measurements in the CN radical with MHz frequency resolution and 20 ns time resolution. Narrow velocity groups of individual hyperfine levels of selected rotational states in CN (X{sup 2} {Sigma}{sup +}) are depleted and excited (A{sup 2}{pi}{sub i}) with a saturation laser and probed by a counterpropagating, frequency modulated probe beam. Recent work in our lab has used this method to measure and characterize the hyperfine splittings for a set of rotational, fine structure, and parity components of CN (A{sup 2}{pi}{sub i}, v=1). Extending this work, we report time and frequency dependence of the saturation signals following abrupt switching of the CW saturation beam on and off with an electro-optic amplitude modulator. Recovery of the unsaturated absorption following the turnoff of the saturation beam follows pressure-dependent kinetics, driven by collisions with the undissociated NCCN precursor with a rate coefficient of 2 x 10{sup -9} cm{sup 3} s{sup -1} molec{sup -1}. Similar recovery kinetics are observed for two-level saturation resonances, where the signal observed is a combination of X- and A-state kinetics, as well as for three-level crossover resonances, which can be chosen to probe selectively the holefilling in the X state or the …
Date: July 5, 2009
Creator: Hause,M.L.; Hall,G. & Sears, T.J.
System: The UNT Digital Library
A DFT and TDDFT Study of Alkylated Trimethylene-Bridged Bis(p-Phenylenediamines) (open access)

A DFT and TDDFT Study of Alkylated Trimethylene-Bridged Bis(p-Phenylenediamines)

The conclusions are: (1) LDA predicts fairly well the structures of {pi}-dimers. This has been reported before. Here we show that even the small difference between conformers can be described by LDA. Electron densities suggest a stronger bond is formed in LDA than B3LYP. (2) Though its good performance is possibly due to error cancelations, LDA may be used as a practical tool for large {pi}-dimer systems. (3) TDDFT once again does a good job for the optical transitions. The near-IR band shows a weak dependence on the functional, but a stronger one on the interplanar distance.
Date: July 5, 2009
Creator: Wu, Q.; Jalilov, A. & Nelson, S.
System: The UNT Digital Library
Nonlinear motion of coupled magnetic vortices in ferromagnetic/non-magnetic/ferromagnetic trilayer (open access)

Nonlinear motion of coupled magnetic vortices in ferromagnetic/non-magnetic/ferromagnetic trilayer

We have investigated a coupled motion of two vortex cores in ferromagnetic/nonmagnetic/ferromagnetic trilayer cynliders by means of micromagnetic simulation. Dynamic motion of two vortex with parallel and antiparallel relative chiralities of curling spins around the vortex cores have been examined after excitation by 1-ns pulsed external field. With systematic variation in non-magnetic spacer layer thickness from 0 to 20 nm, the coupling between two cores becomes significant as the spacer becomes thinner. Significant coupling leads to a nonlinear chaotic coupled motion of two vortex cores for the parallel chiralities and a faster coupled gyrotropic oscillation for the antiparallel chiralities.
Date: July 5, 2009
Creator: Jun, Su-Hyeong; Shim, Je-Ho; Oh, Suhk-Kun; Yu, Seong-Cho; Kim, Dong-Hyun; Mesler, Brooke et al.
System: The UNT Digital Library
FUNCTIONALIZED LATERAL SURFACE COATED LASERS FOR CHEM-BIO DETECTION (open access)

FUNCTIONALIZED LATERAL SURFACE COATED LASERS FOR CHEM-BIO DETECTION

We present a class of compact, monolithic, photonic sensors consisting of multiple section edge emitting lasers with functionalized lateral surface coatings for low level detection of chemical or biological agents. Specifically, we discuss 8 {micro}m x 250 {micro}m Pd-coated H{sub 2} sensors and configurations to reduce the minimum detection limit from 138ppm for passive sensors to 1ppm for active sensors. Compared with conventional optical H{sub 2} sensors that use fiber gratings, surface plasmon resonances, or surface reflectance, our sensors offer the advantages of smaller size, wider dynamic range, monolithic integration of laser source and detector, and 2-D scalability to arrays of sensors that are functionalized to detect different agents.
Date: July 5, 2007
Creator: Goddard, L L; Bond, T C; Cole, G D & Behymer, E M
System: The UNT Digital Library
Measurements of b to s gamma Decays at BaBar (open access)

Measurements of b to s gamma Decays at BaBar

We present measurements of the Branching Fraction and photon energy spectrum in B {yields} X{sub S}{gamma} decays in a sample of 89 million B{bar B} pairs collected at the BABAR detector at Stanford Linear Accelerator Center's PEP-II asymmetric B-factory. Results from a fully-inclusive and a sum of 38 exclusive final states techniques are presented and found to be consistent with the Standard Model calculations, as well as experimental results obtained from semileptonic B {yields} X{sub c}lv decays.
Date: July 5, 2007
Creator: Piatenko, T. & /Caltech
System: The UNT Digital Library
A Proposal for High-resolution X-ray Imaging of Intermodal Cargo Containers for Fissionable Materials (open access)

A Proposal for High-resolution X-ray Imaging of Intermodal Cargo Containers for Fissionable Materials

The sensitivity for identification of high-Z objects in elemental form in the massive cargo of intermodal containers with continuous bremsstrahlung radiation depends critically on discriminating the weak signal from uncollided photons from the very intense flux of scattered radiations that penetrate the cargo. We propose that this might be accomplished by rejection of detected events with E {le} 2-3 MeV that contain the majority of multiply-scattered photons along with a correction for single-scattered photons at higher energies. Monte Carlo simulations of radiographs with a 9-MeV bremsstrahlung spectrum demonstrate that rejection of detected events with E {le} 3 MeV removes the majority of signals from scattered photons emerging through cargo with Z {le} 30 and areal densities of at least 145 g cm{sup -2}. With analytical estimates of the single-scattered intensity at higher energies, accurate estimates of linear attenuation coefficients for shielded and unshielded uranium spheres with masses as small as 0.08 kg are found. The estimated maximum dose is generally so low that reasonable order tomography of interesting portions of a container should be possible.
Date: July 5, 2007
Creator: Quiter, B J; Prussin, S G; Pohl, B; Hall, J; Trebes, J; Stone, G et al.
System: The UNT Digital Library
Single molecule study of a processivity clamp sliding on DNA (open access)

Single molecule study of a processivity clamp sliding on DNA

Using solution based single molecule spectroscopy, we study the motion of the polIII {beta}-subunit DNA sliding clamp ('{beta}-clamp') on DNA. Present in all cellular (and some viral) forms of life, DNA sliding clamps attach to polymerases and allow rapid, processive replication of DNA. In the absence of other proteins, the DNA sliding clamps are thought to 'freely slide' along the DNA; however, the abundance of positively charged residues along the inner surface may create favorable electrostatic contact with the highly negatively charged DNA. We have performed single-molecule measurements on a fluorescently labeled {beta}-clamp loaded onto freely diffusing plasmids annealed with fluorescently labeled primers of up to 90 bases. We find that the diffusion constant for 1D diffusion of the {beta}-clamp on DNA satisfies D {le} 10{sup -14} cm{sup 2}/s, much slower than the frictionless limit of D = 10{sup -10} cm{sup 2}/s. We find that the {beta} clamp remains at the 3-foot end in the presence of E. coli single-stranded binding protein (SSB), which would allow for a sliding clamp to wait for binding of the DNA polymerase. Replacement of SSB with Human RP-A eliminates this interaction; free movement of sliding clamp and poor binding of clamp loader to the …
Date: July 5, 2007
Creator: Laurence, T A; Kwon, Y; Johnson, A; Hollars, C; O?Donnell, M; Camarero, J A et al.
System: The UNT Digital Library
TOTAL MEASUREMENT UNCERTAINTY IN HOLDUP MEASUREMENTS AT THE PLUTONIUM FINISHING PLANT (PFP) (open access)

TOTAL MEASUREMENT UNCERTAINTY IN HOLDUP MEASUREMENTS AT THE PLUTONIUM FINISHING PLANT (PFP)

An approach to determine the total measurement uncertainty (TMU) associated with Generalized Geometry Holdup (GGH) [1,2,3] measurements was developed and implemented in 2004 and 2005 [4]. This paper describes a condensed version of the TMU calculational model, including recent developments. Recent modifications to the TMU calculation model include a change in the attenuation uncertainty, clarifying the definition of the forward background uncertainty, reducing conservatism in the random uncertainty by selecting either a propagation of counting statistics or the standard deviation of the mean, and considering uncertainty in the width and height as a part of the self attenuation uncertainty. In addition, a detection limit is calculated for point sources using equations derived from summary equations contained in Chapter 20 of MARLAP [5]. The Defense Nuclear Facilities Safety Board (DNFSB) Recommendation 2007-1 to the Secretary of Energy identified a lack of requirements and a lack of standardization for performing measurements across the U.S. Department of Energy (DOE) complex. The DNFSB also recommended that guidance be developed for a consistent application of uncertainty values. As such, the recent modifications to the TMU calculational model described in this paper have not yet been implemented. The Plutonium Finishing Plant (PFP) is continuing to perform …
Date: July 5, 2007
Creator: Keele, B. D.
System: The UNT Digital Library
A 30 ps Timing Resolution for Single Photons with Multi-pixel Burle MCP-PMT (open access)

A 30 ps Timing Resolution for Single Photons with Multi-pixel Burle MCP-PMT

We have achieved {approx}30 psec single-photoelectron and {approx}12ps for multi-photoelectron timing resolution with a new 64 pixel Burle MCP-PMT with 10 micron microchannel holes. We have also demonstrated that this detector works in a magnetic field of 15kG, and achieved a single-photoelectron timing resolution of better than 60 psec. The study is relevant for a new focusing DIRC RICH detector for particle identification at future Colliders such as the super B-factory or ILC, and for future TOF techniques. This study shows that a highly pixilated MCP-PMT can deliver excellent timing resolution.
Date: July 5, 2006
Creator: Va'vra, J.; Benitez, J.; Coleman, J.; Leith, D. W. G. S.; Mazaheri, G.; Ratcliff, B. et al.
System: The UNT Digital Library
Application of a New Method for Analyzing Images: Two-Dimensional Non-Linear Additive Decomposition (open access)

Application of a New Method for Analyzing Images: Two-Dimensional Non-Linear Additive Decomposition

This paper documents the application of a new image processing algorithm, two-dimensional non-linear additive decomposition (NLAD), which is used to identify regions in a digital image whose gray-scale (or color) intensity is different than the surrounding background. Standard image segmentation algorithms exist that allow users to segment images based on gray-scale intensity and/or shape. However, these processing techniques do not adequately account for the image noise and lighting variation that typically occurs across an image. NLAD is designed to separate image noise and background from artifacts thereby providing the ability to consistently evaluate images. The decomposition techniques used in this algorithm are based on the concepts of mathematical morphology. NLAD emulates the human capability of visually separating an image into different levels of resolution components, denoted as ''coarse'', ''fine'', and ''intermediate''. Very little resolution information overlaps any two of the component images. This method can easily determine and/or remove trends and noise from an image. NLAD has several additional advantages over conventional image processing algorithms, including no need for a transformation from one space to another, such as is done with Fourier transforms, and since only finite summations are required, the calculational effort is neither extensive nor complicated.
Date: July 5, 2006
Creator: Zaccaria, M. A.; Drudnoy, D. M. & Stasenko, J. E.
System: The UNT Digital Library
Biomolecular Origin of The Rate-Dependent Deformation of Prismatic Enamel (open access)

Biomolecular Origin of The Rate-Dependent Deformation of Prismatic Enamel

Penetration deformation of columnar prismatic enamel was investigated using instrumented nanoindentation testing, carried out at three constant strain rates (0.05 s{sup -1}, 0.005 s{sup -1}, and 0.0005 s{sup -1}). Enamel demonstrated better resistance to penetration deformation and greater elastic modulus values were measured at higher strain rates. The origin of the rate-dependent deformation was rationalized to be the shear deformation of nanoscale protein matrix surrounding each hydroxyapatite crystal rods. And the shear modulus of protein matrix was shown to depend on strain rate in a format: G{sub p} = 0.213 + 0.021 ln {dot {var_epsilon}}. Most biological composites compromise reinforcement mineral components and an organic matrix. They are generally partitioned into multi-level to form hierarchical structures that have supreme resistance to crack growth [1]. The molecular mechanistic origin of toughness is associated with the 'sacrificial chains' between the individual sub-domains in a protein molecule [2]. As the protein molecule is stretched, these 'sacrificial chains' break to protect its backbone and dissipate energy [3]. Such fresh insights are providing new momentum toward updating our understanding of biological materials [4]. Prismatic enamel in teeth is one such material. Prismatic microstructure is frequently observed in the surface layers of many biological materials, as …
Date: July 5, 2006
Creator: Zhou, J & Hsiung, L
System: The UNT Digital Library
Charm Mixing at BaBar (open access)

Charm Mixing at BaBar

We report on searches for D{sup 0}-{bar D}{sup 0} mixing using decay-time distributions of D{sup 0} {yields} K{pi} and D{sup 0} {yields} K{sup (*)}e{nu} decays and a lifetime ratio analysis of D{sup 0} {yields} K{sup +}K{sup -}, {pi}{sup +}{pi}{sup -} decays using 91 fb{sup -1} of e{sup +}e{sup -} data taken at the PEP-II asymmetric-energy storage ring at energies near 10.6 GeV. Searches for CP-violation in D{sup 0} mixing and decay are also reported, as well as a measurement of R{sub D}, the ratio of the doubly Cabibbo-suppressed decay rate to the Cabibbo-allowed decay rate.
Date: July 5, 2006
Creator: Cowan, Ray F.
System: The UNT Digital Library
Control of Surface Functional Groups on Pertechntate Sorption on Activated Carbon (open access)

Control of Surface Functional Groups on Pertechntate Sorption on Activated Carbon

{sup 99}Tc is highly soluble and poorly adsorbed by natural materials under oxidizing conditions, thus being of particular concern for radioactive waste disposal. Activated carbon can potentially be used as an adsorbent for removing Tc from aqueous solutions. We have tested six commercial activated carbon materials for their capabilities for sorption of pertechnetate (TcO{sub 4}{sup -}). The tested materials can be grouped into two distinct types: Type I materials have high sorption capabilities with the distribution coefficients (K{sub d}) varying from 9.5 x 10{sup 5} to 3.2 x 10{sup 3} mL/g as the pH changes from 4.5 to 9.5, whereas type II materials have relatively low sorption capabilities with K{sub d} remaining more or less constant (1.1 x 10{sup 3} - 1.8 x 10{sup 3} mL/g) over a similar pH range. The difference in sorption behavior between the two types of materials is attributed to the distribution of surface functional groups. The predominant surface groups are identified to be carboxylic and phenolic groups. The carboxylic group can be further divided into three subgroups A, B, and C in the order of increasing acidity. The high sorption capabilities of type I materials are found to be caused by the presence of …
Date: July 5, 2006
Creator: Wang, Y.; Gao, H.; Yeredla, R.; Xu, H.; Abrecht, M. & Stasio, G.D.
System: The UNT Digital Library
Gas Centrifuge Enrichment Plant Safeguards System Modeling (open access)

Gas Centrifuge Enrichment Plant Safeguards System Modeling

None
Date: July 5, 2006
Creator: Elayat, H A; O'Connell, W J & Boyer, B D
System: The UNT Digital Library
Higher Curvature Effects in the ADD and RS Models (open access)

Higher Curvature Effects in the ADD and RS Models

Over the last few years several extra-dimensional models have been introduced in attempt to deal with the hierarchy problem. These models can lead to rather unique and spectacular signatures at Terascale colliders such as the LHC and ILC. The ADD and RS models, though quite distinct, have many common feature including a constant curvature bulk, localized Standard Model(SM) fields and the assumption of the validity of the EH action as a description of gravitational interactions.
Date: July 5, 2006
Creator: Rizzo, Thomas G.
System: The UNT Digital Library
Large-eddy simulation of very large kinetic and magnetic Reynolds number isotropic magnetohydrodynamic turbulence using a spectral subgrid model (open access)

Large-eddy simulation of very large kinetic and magnetic Reynolds number isotropic magnetohydrodynamic turbulence using a spectral subgrid model

A spectral subggrid-scale eddy viscosity and magnetic resisitivity model based on the eddy-damped quasi-normal Markovian (EDQNM) spectral kinetic and magnetic energy transfer presented in [12] is used in large-eddy simulation (LES) of large kinetic and magnetic Reynold number magneto-hydrodynamic (MHD) turbulence. The proposed model is assessed via a posteri tests on three-dimensional, incompressible, isotropic, non-helical, freely-decaying MHD turbulence at asymptotically large Reynolds numbers. Using LES with an initial condition characterized by an Alfv{acute e}n ratio of kinetic to magnetic energy {tau}{sub A} equal to unity, it is shown that at the kinetic energy spectrum E{sub K}(k) and magnetic energy spectrum E{sub M}(k) exhibit Kolmogorov -5/3 inertial subrange scalings in the LES, consistent with the EDQNM model.
Date: July 5, 2006
Creator: Gomez, T; Sagaut, P; Schilling, O & Zhou, Y
System: The UNT Digital Library
Measurement of the Spin of the Omega- Hyperon at Babar (open access)

Measurement of the Spin of the Omega- Hyperon at Babar

A measurement of the spin of the {Omega}{sup -} hyperon produced through the exclusive process {Xi}{sub c}{sup 0} {yields} {Omega}{sup -}K{sup +} is presented using a total integrated luminosity of 116 fb{sup -1} recorded with the BABAR detector at the e{sup +}e{sup -} asymmetric-energy B-Factory at SLAC. Under the assumption that the {Xi}{sub c}{sup 0} has spin 1/2, the angular distribution of the {Lambda} from {Omega}{sup -} {yields} {Lambda}K{sup -} decay is inconsistent with all half-integer {Omega}{sup -} spin values other than 3/2. Lower statistics data for the process {Omega}{sub c}{sup 0} {yields} {Omega}{sup -}{pi}{sup +} from a 230 fb{sup -1} sample are also found to be consistent with {Omega}{sup -} spin 3/2. If the {Xi}{sub c}{sup 0} spin were 3/2, an {Omega}{sup -} spin of 5/2 cannot be excluded.
Date: July 5, 2006
Creator: Aubert, B.
System: The UNT Digital Library
Mechanical defradation of Emplacement Drifts at Yucca Mountain- A Modeling Case Study. Part I: Nonlithophysal Rock (open access)

Mechanical defradation of Emplacement Drifts at Yucca Mountain- A Modeling Case Study. Part I: Nonlithophysal Rock

This paper outlines rock mechanics investigations associated with mechanical degradation of planned emplacement drifts at Yucca Mountain, which is the designated site for the proposed U.S. high-level nuclear waste repository. The factors leading to drift degradation include stresses from the overburden, stresses induced by the heat released from the emplaced waste, stresses due to seismically related ground motions, and time-dependent strength degradation. The welded tuff emplacement horizon consists of two groups of rock with distinct engineering properties: nonlithophysal units and lithophysal units, based on the relative proportion of lithophysal cavities. The term 'lithophysal' refers to hollow, bubble like cavities in volcanic rock that are surrounded by a porous rim formed by fine-grained alkali feldspar, quartz, and other minerals. Lithophysae are typically a few centimeters to a few decimeters in diameter. Part I of the paper concentrates on the generally hard, strong, and fractured nonlithophysal rock. The degradation behavior of the tunnels in the nonlithophysal rock is controlled by the occurrence of keyblocks. A statistically equivalent fracture model was generated based on extensive underground fracture mapping data from the Exploratory Studies Facility at Yucca Mountain. Three-dimensional distinct block analyses, generated with the fracture patterns randomly selected from the fracture model, were …
Date: July 5, 2006
Creator: Lin, M.; Kicker, D.; Damjanac, B.; Board, M. & Karakouzian, M.
System: The UNT Digital Library
Recent U.S. advances in ion-beam-driven high energy densityphysics and heavy ion fusion (open access)

Recent U.S. advances in ion-beam-driven high energy densityphysics and heavy ion fusion

During the past two years, significant experimental and theoretical progress has been made in the US heavy ion fusion science program in longitudinal beam compression, ion-beam-driven warm dense matter, beam acceleration, high brightness beam transport; and advanced theory and numerical simulations. Innovations in longitudinal compression of intense ion beams by > 50 X propagating through background plasma enable initial beam target experiments in warm dense matter to begin within the next two years. They are assessing how these new techniques might apply to heavy ion fusion drivers for inertial fusion energy.
Date: July 5, 2006
Creator: Logan, B. G.; Bieniosek, F. M.; Celata, C. M.; Coleman, J.; Greenway, W.; Henestroza, E. et al.
System: The UNT Digital Library
Resistive-Wall Instability in the Damping Rings of the ILC (open access)

Resistive-Wall Instability in the Damping Rings of the ILC

In the damping rings of the International Linear Collider (ILC), the resistive-wall instability is one of the dominant transverse instabilities. This instability directly influences the choice of material and aperture of the vacuum pipe, and the parameters of the transverse feedback system. This paper investigates the resistive-wall instabilities in an ILC damping ring under various conditions of beam pipe material, aperture, and fill pattern.
Date: July 5, 2006
Creator: Wang, L.; Bane, K .L. F.; Raubenheimer, T. & Ross, M.
System: The UNT Digital Library
Atomistic Modeling of Wave Propagation in Nanocrystals (open access)

Atomistic Modeling of Wave Propagation in Nanocrystals

We present non-equilibrium molecular dynamics (MD) simulations of wave propagation in nanocrystals. We find that the width of the traveling wave front increases with grain size, d, as d{sup 1/2}. This width also decreases with the pressure behind the front. We extrapolate our results to micro-crystals and obtain reasonable agreement with experimental data. In addition, our extrapolation agrees with models that only take into account the various velocities of propagation along different crystalline orientations, without including grain boundary effects. Our results indicate that, even at the nanoscale, the role of grain boundaries as scattering centers or as sources of plasticity does not increase significantly the width of the traveling wave.
Date: July 5, 2005
Creator: Bringa, E; Caro, A; Victoria, M & Park, N
System: The UNT Digital Library
A Compact High Gradient Pulsed Magnetic Quadpole (open access)

A Compact High Gradient Pulsed Magnetic Quadpole

A design for a high gradient, low inductance pulsed quadrupole magnet is presented. The magnet is a circular current dominated design with a circular iron return yoke. Conductor angles are determined by a method of direct multipole elimination which theoretically eliminates the first four higher order multipole field components. Coils are fabricated from solid round film-insulated conductor, wound as a single layer ''non-spiral bedstead'' coil having a diagonal leadout entirely within one upturned end. The coils are wound and stretched straight in a special winder, then bent in simple fixtures to form the upturned ends.
Date: July 5, 2005
Creator: Shuman, D.; Faltens, A.; Kajiyama, Y.; Kireeff-Covo, M. & Seidl, P.
System: The UNT Digital Library
Downgrade of the Savannah River Sites FB-Line (open access)

Downgrade of the Savannah River Sites FB-Line

This paper will discuss the Safeguards & Security (S&S) activities that resulted in the downgrade of the Savannah River Site's FB-Line (FBL) from a Category I Material Balance Area (MBA) in a Material Access Area (MAA) to a Category IV MBA in a Property Protection Area (PPA). The Safeguards activities included measurement of final product items, transferal of nuclear material to other Savannah River Site (SRS) facilities, discard of excess nuclear material items, and final measurements of holdup material. The Security activities included relocation and destruction of classified documents and repositories, decertification of a classified computer, access control changes, updates to planning documents, deactivation and removal of security systems, Human Reliability Program (HRP) removals, and information security training for personnel that will remain in the FBL PPA.
Date: July 5, 2005
Creator: SADOWSKI, ED; YOURCHAK, RANDY; MARJI, PRETZELLO; MIXON, BONNIE & LYNN, ROBBIE
System: The UNT Digital Library
A Silicon-Based, Sequential Coat-and-Etch Process to Fabricate Nearly Perfect Substrate Surfaces (open access)

A Silicon-Based, Sequential Coat-and-Etch Process to Fabricate Nearly Perfect Substrate Surfaces

For many thin-film applications substrate imperfections such as particles, pits, scratches, and general roughness, can nucleate film defects which can severely detract from the coating's performance. Previously we developed a coat-and-etch process, termed the ion beam thin film planarization process, to planarize substrate particles up to {approx} 70 nm in diameter. The process relied on normal incidence etching; however, such a process induces defects nucleated by substrate pits to grow much larger. We have since developed a coat-and-etch process to planarize {approx}70 nm deep by 70 nm wide substrate pits; it relies on etching at an off-normal incidence angle, i.e., an angle of {approx} 70{sup o} from the substrate normal. However, a disadvantage of this pit smoothing process is that it induces defects nucleated by substrate particles to grow larger. Combining elements from both processes we have been able to develop a silicon-based, coat-and-etch process to successfully planarize {approx}70 nm substrate particles and pits simultaneously to at or below 1 nm in height; this value is important for applications such as extreme ultraviolet lithography (EUVL) masks. The coat-and-etch process has an added ability to significantly reduce high-spatial frequency roughness, rendering a nearly perfect substrate surface.
Date: July 5, 2005
Creator: Mirkarimi, P. B.; Spiller, E.; Baker, S. L.; Stearns, D. G.; Robinson, J. C.; Olynick, D. L. et al.
System: The UNT Digital Library