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Copper Electrodeposition on Iridium, Ruthenium and Its Conductive Oxide Substrate (open access)

Copper Electrodeposition on Iridium, Ruthenium and Its Conductive Oxide Substrate

The aim of this thesis was to investigate the physical and electrochemical properties of sub monolayer and monolayer of copper deposition on the polycrystalline iridium, ruthenium and its conductive oxide. The electrochemical methods cyclic voltammetry (CV) and chronocoulometry were used to study the under potential deposition. The electrochemical methods to oxidize the ruthenium metal are presented, and the electrochemical properties of the oxide ruthenium are studied. The full range of CV is presented in this thesis, and the distances between the stripping bulk peak and stripping UPD peak in various concentration of CuSO4 on iridium, ruthenium and its conductive oxide are shown, which yields thermodynamic data on relative difference of bonding strength between Cu-Ru/Ir atoms and Cu-Cu atoms. The monolayer of UPD on ruthenium is about 0.5mL, and on oxidized ruthenium is around 0.9mL to 1.0mL. The conductive oxide ruthenium presents the similar properties of ruthenium metal. The pH effect of stripping bulk peak and stripping UPD peak of copper deposition on ruthenium and oxide ruthenium was investigated. The stripping UPD peak and stripping bulk peak disappeared after the pH ≥ 3 on oxidized ruthenium electrode, and a new peak appeared, which means the condition of pH is very important. …
Date: December 2003
Creator: Huang, Long
System: The UNT Digital Library
Synthesis and characterization of 2-chloro-3-benzylthiopyrrolo[1,2-a]- benzimidazol-1-one and 2,3-di(benzylthio)pyrrolo[1,2-a]benzimidazol-1-one. (open access)

Synthesis and characterization of 2-chloro-3-benzylthiopyrrolo[1,2-a]- benzimidazol-1-one and 2,3-di(benzylthio)pyrrolo[1,2-a]benzimidazol-1-one.

The reaction between o-phenylenediamine and 2,3-dichloromaleic anhydride has been probed and found to give 2,3-dichloropyrrolo[1,2-a]- benzimidazol-1-one as the major product. Chlorine substitution in 2,3-dichloropyrrolo[1,2-a]benzimidazol-1-one by added benzylthiol occurs in the presence of pyridine to provide the corresponding monosulfide and disulfide derivatives. The first benzylthiol ligand undergoes reaction at the C-3 position of the five-membered pyrrolo-1-one ring, with the addition of the second benzylthiol ligand occurring at the remaining chlorine-substituted carbon. The mono- and disulfide derivatives have been isolated and characterized in solution by NMR, IR, and UV-vis spectroscopies, and the solid-state structure of 2,3-di(benzylthio)pyrrolo[1,2-a]benzimidazol-1-one has been established by X-ray crystallography.
Date: December 2003
Creator: Huang, Shih-Huang
System: The UNT Digital Library

Synthesis and X-ray Diffraction Structure of 8,9-Dichloropyrrolo[1,2-a]perimidin-10-one

Access: Use of this item is restricted to the UNT Community
Treatment of dichloromaleic anhydride and 1,8-diaminonaphthalene in either benzene or toluene under refluxing conditions gives low yields of the new heterocyclic compound 8,9-dichloropyrrolo[1,2-a]perimidin-10-one. This product has been isolated and characterized in solution by NMR, IR, and UV/vis spectroscopies, and the solid-state structure of 8,9-dichloropyrrolo[1,2-a]perimidin-10-one has been established by X-ray crystallography. The nature of the HOMO and LUMO levels of 8,9-dichloropyrrolo[1,2-a]perimidin-10-one has been studied by extended Hückel molecular orbital calculations.
Date: August 2003
Creator: Chen, Tao
System: The UNT Digital Library
Interfacial Electrochemistry and Surface Characterization: Hydrogen Terminated Silicon, Electrolessly Deposited Palladium & Platinum on Pyrolyzed Photoresist Films and Electrodeposited Copper on Iridium (open access)

Interfacial Electrochemistry and Surface Characterization: Hydrogen Terminated Silicon, Electrolessly Deposited Palladium & Platinum on Pyrolyzed Photoresist Films and Electrodeposited Copper on Iridium

Hydrogen terminated silicon surfaces play an important role in the integrated circuit (IC) industry. Ultra-pure water is extensively used for the cleaning and surface preparation of silicon surfaces. This work studies the effects of ultra-pure water on hydrogen passivated silicon surfaces in a short time frame of 120 minutes using fourier transform infrared spectroscopy – attenuated total reflection techniques. Varying conditions of ultra-pure water are used. This includes dissolved oxygen poor media after nitrogen bubbling and equilibration under nitrogen atmosphere, as well as metal contaminated solutions. Both microscopically rough and ideal monohydride terminated surfaces are examined. Hydrogen terminated silicon is also used as the sensing electrode for a potentiometric sensor for ultra-trace amounts of metal contaminants. Previous studies show the use of this potentiometric electrode sensor in hydrofluoric acid solution. This work is able to shows sensor function in ultra-pure water media without the need for further addition of hydrofluoric acid. This is considered a boon for the sensor due to the hazardous nature of hydrofluoric acid. Thin carbon films can be formed by spin coating photoresist onto silicon substrates and pyrolyzing at 1000 degrees C under reducing conditions. This work also shows that the electroless deposition of palladium and …
Date: December 2003
Creator: Chan, Raymond
System: The UNT Digital Library
Fabrication and light scattering study of multi-responsive nanostructured hydrogels and water-soluble polymers. (open access)

Fabrication and light scattering study of multi-responsive nanostructured hydrogels and water-soluble polymers.

Monodispersed microgels composed of poly-acrylic acid (PAAc) and poly(N-isopropylacrylamide) (PNIPAM) interpenetrating networks were synthesized by 2-step method with first preparing PNIPAM microgel and then polymerizing acrylic acid that interpenetrates into the PNIPAM network. The semi-dilute aqueous solutions of the PNIPAM-PAAc IPN microgels exhibit an inverse thermo-reversible gelation. Furthermore, IPN microgels undergo the reversible volume phase transitions in response to both pH and temperature changes associated to PAAc and PNIPAM, respectively. Three applications based on this novel hydrogel system are presented: a rich phase diagram that opens a door for fundamental study of phase behavior of colloidal systems, a thermally induced viscosity change, and in situ hydrogel formation for controlled drug release. Clay-polymer hydrogel composites have been synthesized based on PNIPAM gels containing 0.25 to 4 wt% of the expandable smectic clay Na-montmorillonite layered silicates (Na-MLS). For Na-MLS concentrations ranging from 2.0 to 3.2 wt%, the composite gels have larger swelling ratio and stronger mechanical strength than those for a pure PNIPAM. The presence of Na-MLS does not affect the value of the lower critical solution temperature (LCST) of the PNIPAM. Surfactant-free hydroxypropyl cellulose (HPC) microgels have been synthesized in salt solution. In a narrow sodium chloride concentration range from 1.3 …
Date: December 2003
Creator: Xia, Xiaohu
System: The UNT Digital Library
Process Evaluation and Characterization of Tungsten Nitride as a Diffusion Barrier for Copper Interconnect Technology (open access)

Process Evaluation and Characterization of Tungsten Nitride as a Diffusion Barrier for Copper Interconnect Technology

The integration of copper (Cu) and dielectric materials has been outlined in the International Technology Roadmap for Semiconductors (ITRS) as a critical goal for future microelectronic devices. A necessity toward achieving this goal is the development of diffusion barriers that resolve the Cu and dielectric incompatibility. The focus of this research examines the potential use of tungsten nitride as a diffusion barrier by characterizing the interfacial properties with Cu and evaluating its process capability for industrial use. Tungsten nitride (β-W2N) development has been carried out using a plasma enhanced chemical vapor deposition (PECVD) technique that utilizes tungsten hexafluoride (WF6), nitrogen (N2), hydrogen (H2), and argon (Ar). Two design of experiments (DOE) were performed to optimize the process with respect to film stoichiometry, resistivity and uniformity across a 200 mm diameter Si wafer. Auger depth profiling showed a 2:1 W:N ratio. X-ray diffraction (XRD) showed a broad peak centered on the β-W2N phase. Film resistivity was 270 mohm-cm and film uniformity < 3 %. The step coverage (film thickness variance) across a structured etched dielectric (SiO2, 0.35 mm, 3:1 aspect ratio) was > 44 %. Secondary ion mass spectroscopy (SIMS) measurements showed good barrier performance for W2N between Cu and SiO2 …
Date: August 2005
Creator: Ekstrom, Bradley Mitsuharu
System: The UNT Digital Library
The performance of density functional theory with the correlation consistent basis sets. (open access)

The performance of density functional theory with the correlation consistent basis sets.

Density functional theory has been used in combination with the correlation consistent and polarization consistent basis sets to investigate the structures and energetics for a series of first-row closed shell and several second-row molecules of potential importance in atmospheric chemistry. The impact of basis set choice upon molecular description has been examined, and irregular convergence of molecular properties with respect to increasing basis set size for several functionals and molecules has been observed. The possible reasons and solutions for this unexpected behavior including the effect of contraction and uncontraction, of the basis set diffuse sp basis functions, basis set superposition error (BSSE) and core-valence sets also have been examined.
Date: August 2005
Creator: Wang, Xuelin
System: The UNT Digital Library
Synthesis and X-ray Diffraction Structures of 2-(2-thienylidene)-4,5-bis-(diphenylphosphino)-4-cyclopenten-1,3-dione and fac-BrRe(CO)3[2-(2-thienylidene)-4,5-bis(diphenylphosphino)-4-cyclopenten-1,3-dione] (open access)

Synthesis and X-ray Diffraction Structures of 2-(2-thienylidene)-4,5-bis-(diphenylphosphino)-4-cyclopenten-1,3-dione and fac-BrRe(CO)3[2-(2-thienylidene)-4,5-bis(diphenylphosphino)-4-cyclopenten-1,3-dione]

Treatment of 4,5 bis-(diphenylphosphino)-cyclopenten-1,3 dione with thiophene carboxyaldehyde in dichloromethane, in the presence of molecular sieves results in a new heterocyclic compound, 2-(2-thienylidene)-4,5-bis(diphenylphosphino)-4-cyclopenten-1,3-dione (ligand), with a high yield. This product was characterized by using both IR and NMR spectroscopic techniques and the solid-state structure of the ligand was determined using X-ray crystallography. When the ligand was treated with the solvent stabilized intermediate of ReBr(CO)5 with THF, a monomeric metal complex, fac-BrRe(CO)3[2-(2-thienylidene)-4,5-bis(diphenylphosphino)-4-cyclopenten-1,3-dione] was the result. The solid-state structure of the monomeric metal complex was determined using X-ray crystallography. Photolysis and thermolysis studies of the complex will be further explored.
Date: December 2005
Creator: Pingali, Aparna
System: The UNT Digital Library
N-Heterocyclic Carbenes of the Late Transition Metals: A Computational and Structural Database Study (open access)

N-Heterocyclic Carbenes of the Late Transition Metals: A Computational and Structural Database Study

A computational chemistry analysis combined with a crystallographic database study of the bonding in late transition metal N-heterocyclic carbene (NHC) complexes is reported. The results illustrate a metal-carbon bond for these complexes, approximately 4% shorter than that of a M-C single bond found in metal alkyl complexes. As a consequence of this result, two hypotheses are investigated. The first hypothesis explores the possibility of multiple-bond character in the metal-carbon linkage of the NHC complex, and the second, considers the change in the hybridization of the carbenoid carbon to incorporate more p character. The latter hypothesis is supported by the results. Analysis of these complexes using the natural bond orbital method evinces NHC ligands possessing trans influence.
Date: May 2005
Creator: Baba, Eduard
System: The UNT Digital Library
Metal Oxide Reactions in Complex Environments: High Electric Fields and Pressures above Ultrahigh Vacuum (open access)

Metal Oxide Reactions in Complex Environments: High Electric Fields and Pressures above Ultrahigh Vacuum

Metal oxide reactions at metal oxide surfaces or at metal-metal oxide interfaces are of exceptional significance in areas such as catalysis, micro- and nanoelectronics, chemical sensors, and catalysis. Such reactions are frequently complicated by the presence of high electric fields and/or H2O-containing environments. The focus of this research was to understand (1) the iron oxide growth mechanism on Fe(111) at 300 K and 500 K together with the effect of high electric fields on these iron oxide films, and (2) the growth of alumina films on two faces of Ni3Al single crystal and the interaction of the resulting films with water vapor under non-UHV conditions. These studies were conducted with AES, LEED, and STM. XPS was also employed in the second study. Oxidation of Fe(111) at 300 K resulted in the formation of Fe2O3 and Fe3O4. The substrate is uniformly covered with an oxide film with relatively small oxide islands, i.e. 5-15 nm in width. At 500 K, Fe3O4 is the predominant oxide phase formed, and the growth of oxide is not uniform, but occurs as large islands (100 - 300 nm in width) interspersed with patches of uncovered substrate. Under the stress of STM induced high electric fields, dielectric …
Date: August 2005
Creator: Qin, Feili
System: The UNT Digital Library
Study of Ruthenium and Ruthenium Oxide's Electrochemical Properties and Application as a Copper Diffusion Barrier (open access)

Study of Ruthenium and Ruthenium Oxide's Electrochemical Properties and Application as a Copper Diffusion Barrier

As a very promising material of copper diffusion barrier for next generation microelectronics, Ru has already obtained a considerable attention recently. In this dissertation, we investigated ruthenium and ruthenium oxide electrochemical properties and the application as a copper diffusion barrier. Cu under potential deposition (UPD) on the RuOx formed electrochemically was first observed. Strong binding interaction, manifesting by the observed Cu UPD process, exists between Cu and Ru as well as its conductive ruthenium oxide. Since UPD can be conformally formed on the electrode surface, which enable Ru and RuOx has a potential application in the next generation anode. The [Cl-] and pH dependent experiment were conducted, both of them will affect UPD Cu on Ru oxide. We also found the Cu deposition is thermodynamically favored on RuOx formed electrochemically. We have studied the Ru thin film (5nm) as a copper diffusion barrier. It can successfully block Cu diffusion annealed at 300 oC for 10min under vacuum, and fail at 450 oC. We think the silicidation process at the interface between Ru and Si. PVD Cu/Ru/Si and ECP Cu/Ru/Si were compared each other during copper diffusion study. It was observed that ECP Cu is easy to diffuse through Ru barrier. …
Date: August 2005
Creator: Zhang, Yibin
System: The UNT Digital Library

An NMR Study of 2-Ethylbutyllithium/Lithium 2-Ethyl-1-butoxide Mixed Aggregates, Lithium Hydride/Lithium 2-Ethyl-1-butoxide Mixed Aggregates, n-Pentyllithium Aggregates, and n-Pentyllithium/Lithium n-Pentoxide Mixed Aggregates

Access: Use of this item is restricted to the UNT Community
A 13C and 6Li variable temperature NMR study of 2-ethylbutyllithium/lithium 2-ethyl-1-butoxide mixed aggregates formed from reacting 2-ethyl-1-butanol with 2-ethylbutyllithium in two O/Li ratios of 0.2/1 and 0.8/1. The 0.2/1 sample resulted in two 2-ethylbutyllithium/lithium 2-ethyl-1-butoxide mixed aggregates and seven lithium hydride/lithium 2-ethyl-1-butoxide mixed aggregates. The lithium hydride mixed aggregates were also studied using selective 1H decoupling experiments. The 0.8/1 sample resulted in six 2-ethylbutyllithium/lithium 2-ethyl-1-butoxide mixed aggregates and five lithium hydride/lithium 2-ethyl-1-butoxide mixed aggregates. A low temperature 13C NMR spectroscopy study of n-pentyllithium indicated three aggregates, most likely a hexamer, an octamer, and a nonamer. A low temperature 13C NMR study of an 0.2/1 O/Li ratio sample of n-pentyllithium mixed with 1-pentanol resulted in three n-pentyllithium/lithium n-pentoxide aggregates mixed aggregates along with the three n-pentyllithium aggregates. 13C NMR data for this mixture gave inconclusive results whether or not lithium hydride/lithium alkoxide mixed aggregates were present in the sample.
Date: December 2005
Creator: Sellers, Nicole
System: The UNT Digital Library
An Analysis of the Effectiveness of Computer Assisted Instruction in General Chemistry at an Urban University. (open access)

An Analysis of the Effectiveness of Computer Assisted Instruction in General Chemistry at an Urban University.

The science-major General Chemistry sequence offered at the University of Houston has been investigated with respect to the effectiveness of recent incorporation of various levels of computer technology. As part of this investigation, questionnaire responses, student evaluations and grade averages and distributions from up to the last ten years have been analyzed and compared. Increased use of web-based material is both popular and effective, particularly with respect to providing extra information and supplemental questions. Instructor contact via e-mail is also well-received. Both uses of technology should be encouraged. In contrast, electronic classroom presentation is less popular. While initial use may lead to improved grades and retention, these levels decrease quickly, possibly due to a reduction in instructor spontaneity.
Date: May 2002
Creator: McGuffey, Angela
System: The UNT Digital Library
Thermochemical Study of Crystalline Solutes Dissolved in Ternary Hydrogen-Bonding Solvent Mixtures (open access)

Thermochemical Study of Crystalline Solutes Dissolved in Ternary Hydrogen-Bonding Solvent Mixtures

The purpose of this dissertation is to investigate the thermochemical properties of nonelectrolyte solutes dissolved in ternary solvent mixtures, and to develop mathematical expressions for predicting and describing behavior in the solvent mixtures. Forty-five ternary solvent systems were studied containing an ether (Methyl tert-butyl ether, Dibutyl ether, or 1,4-Dioxane), an alcohol (1-Propanol, 2-Propanol, 1-Butanol, 2-Butanol, or 2-Methyl-1-propanol), and an alkane (Cyclohexane, Heptane, or 2,2,4-Trimethylpentane) cosolvents. The Combined NIBS (Nearly Ideal Binary Solvent)/Redlich-Kister equation was used to assess the experimental data. The average percent deviation between predicted and observed values was less than ± 2 per cent error, documenting that this model provides a fairly accurate description of the observed solubility behavior. In addition, Mobile Order theory, the Kretschmer-Wiebe model, and the Mecke-Kempter model were extended to ternary solvent mixtures containing an alcohol (or an alkoxyalcohol) and alkane cosolvents. Expressions derived from Mobile Order theory predicted the experimental mole fraction solubility of anthracene in ternary alcohol + alkane + alkane mixtures to within ± 5.8%, in ternary alcohol + alcohol + alkane mixtures to within ± 4.0%, and in ternary alcohol + alcohol + alcohol mixtures to within ± 3.6%. In comparison, expressions derived from the Kretschmer-Wiebe model and the Mecke-Kempter …
Date: May 2001
Creator: Pribyla, Karen J.
System: The UNT Digital Library