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Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities. (open access)

Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to provide quality assurance for manufactured devices. To ensure device performance, measurements on these devices must be traceable to NIST standards. In addition, accurate metrology of MEMS components is needed to validate mechanical models that are used to design devices to accelerate development and meet emerging needs. Progress towards a NIST-traceable calibration method is described for a next-generation, 2D Interfacial Force Microscope (IFM) for applications in MEMS metrology and qualification. Discussed are the results of screening several suitable calibration methods and the known sources of uncertainty in each method.
Date: October 1, 2009
Creator: Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W.
Object Type: Report
System: The UNT Digital Library
NREL's FY09 CSP Resource Assessment Plans: Solar Resource Assessment Workshop (open access)

NREL's FY09 CSP Resource Assessment Plans: Solar Resource Assessment Workshop

Solar Resource Assessment Workshop, Denver CO, Oct 29, 2008 presentation: NREL's FY09 CSP Resource Assessment Plans
Date: October 29, 2008
Creator: Renne, D.
Object Type: Article
System: The UNT Digital Library
FY09 PROGRESS: MULTI-ISOTOPE PROCESS (MIP) MONITOR (open access)

FY09 PROGRESS: MULTI-ISOTOPE PROCESS (MIP) MONITOR

Model and experimental estimates of the Multi-Isotope Process Monitor performance for determining burnup after dissolution and acid concentration during solvent extraction steps during reprocessing of spent nuclear fuel are presented.
Date: October 18, 2009
Creator: Schwantes, Jon M.; Orton, Christopher R.; Fraga, Carlos G.; Christensen, Richard; Laspe, Amy R. & Ward, Rebecca M.
Object Type: Report
System: The UNT Digital Library