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Selectivity Failure in the Chemical Vapor Deposition of Tungsten (open access)

Selectivity Failure in the Chemical Vapor Deposition of Tungsten

Tungsten metal is used as an electrical conductor in many modern microelectronic devices. One of the primary motivations for its use is that it can be deposited in thin films by chemical vapor deposition (CVD). CVD is a process whereby a thin film is deposited on a solid substrate by the reaction of a gas-phase molecular precursor. In the case of tungsten chemical vapor deposition (W-CVD) this precursor is commonly tungsten hexafluoride (WF6) which reacts with an appropriate reductant to yield metallic tungsten. A useful characteristic of the W-CVD chemical reactions is that while they proceed rapidly on silicon or metal substrates, they are inhibited on insulating substrates, such as silicon dioxide (Si02). This selectivity may be exploited in the manufacture of microelectronic devices, resulting in the formation of horizontal contacts and vertical vias by a self-aligning process. However, reaction parameters must be rigorously controlled, and even then tungsten nuclei may form on neighboring oxide surfaces after a short incubation time. Such nuclei can easily cause a short circuit or other defect and thereby render the device inoperable. If this loss of selectivity could be controlled in the practical applications of W-CVD, thereby allowing the incorporation of this technique into …
Date: August 1994
Creator: Cheek, Roger W. (Roger Warren)
System: The UNT Digital Library
Spectrofluorometric Probe Methods for Examining Preferential Solvation in Binary Mixtures (open access)

Spectrofluorometric Probe Methods for Examining Preferential Solvation in Binary Mixtures

Spectrofluorometric probe methods are developed and examined regarding their ability to model preferential solvation around probe molecules in binary solvents. The first method assumes that each fluorophore is solvated by only one type of solvent molecule and that each fluorophore contributes to the emission intensity. Expressions for this model are illustrated using fluorescence behavior of pyrene, benzo[e]pyrene, benzo[ghi]perylene, and coronene dissolved in binary n-heptane + 1,4-dioxane and n-heptane + tetrahydrofuran mixtures. The second method treats the solvational sphere as a binary solvent microsphere, with the fluorophore's energy in both the ground and the excited states mathematically expressed using the "nearly ideal binary solvent" (NIBS) model. Expressions derived from this model are illustrated using fluorescence behavior of 9,9'-bianthracene and 9,9*-bianthracene-10-carboxaldehyde in binary toluene + acetonitrile and dibutyl ether + acetonitrile.
Date: August 1994
Creator: Wilkins, Denise C.
System: The UNT Digital Library
Spectroscopic Properties of Polycyclic Aromatic Compounds (open access)

Spectroscopic Properties of Polycyclic Aromatic Compounds

The fluorescence spectrum of many polycyclic aromatic compounds (PACs) depends upon solvent polarity. The emission spectrum of PAC monomers consists of several major vibronic bands labeled I, II, etc., in progressive order. Emission intensity enhancement of select bands is observed in polar solvents.
Date: May 1994
Creator: Tucker, Sheryl A. (Sheryl Ann)
System: The UNT Digital Library
The Study of Hydration of Fly Ash in the Presence of Calcium Nitrate and Calcium Formate (open access)

The Study of Hydration of Fly Ash in the Presence of Calcium Nitrate and Calcium Formate

This research was designed to investigate the hydration reaction of fly ash when exposed to water. The effects that calcium nitrate and calcium formate have on the hydration reactions were also examined.
Date: May 1994
Creator: Hill, Russell L. (Russell Lee)
System: The UNT Digital Library
A Study of the Processing Properties of Hard-Particle Reinforced Composite Solders (open access)

A Study of the Processing Properties of Hard-Particle Reinforced Composite Solders

The microstructural, mechanical and thermal properties of various composite solder formulations were investigated. Special interest was given in observing the processing properties, microstructural characteristics, fatigue behavior, tensile strength, and the effect of environmental ageing on the composite solder formulations. The solderability parameters wetting and speed of soldering, reflow temperature, and the thermal stability of the resulting composite solder were also examined.
Date: May 1994
Creator: Calderon, Jose Guadalupe
System: The UNT Digital Library
Synthesis, structure and redox reactivity of Co₃(CO)₆(μ₂-η²,η¹-C(Ph)C=C(PPH₂)C(O)SC(O)) (μ₂-PPh₂) (open access)

Synthesis, structure and redox reactivity of Co₃(CO)₆(μ₂-η²,η¹-C(Ph)C=C(PPH₂)C(O)SC(O)) (μ₂-PPh₂)

The tricobalt cluster PhCCo₃(CO)₉ (1) reacts with the bidentate phosphine ligand 2,3-bis(diphenylphosphino)maleic thioanhydride (bta) with added Me₃NO to yield PhCCo₃(CO)₇(bta) (2), which upon heating overnight yields Co₃(CO)₆(μ₂-η²,η¹-C(Ph)C=C(PPH₂)C(O)SC(O)) (μ₂-PPh₂) (3). Cluster (3) has been isolated and characterized by FT-IR and ³¹P NMR spectroscopy. Structural determination of the cluster has been demonstrated by X-ray diffraction analysis. Cluster (3) is analogous to the cluster synthesized by Richmond and coworkers. The redox properties of (3) have been examined by cyclic voltammetry and the data are reported within.
Date: May 1994
Creator: Muñoz, Trinidad
System: The UNT Digital Library
Thermophysical and Mechanical Properties of Polymer Liquid Crystals and Their Blends (open access)

Thermophysical and Mechanical Properties of Polymer Liquid Crystals and Their Blends

Tensile properties, namely the elastic modulus, tensile strength, percent of elongation at yield and at the break were determined for the pure components and blends. The results are connected to the respective phase diagrams and demonstrate that blending makes property manipulation possible. Blends for which the mechanical properties are better than those of pure EPs can be obtained.
Date: May 1994
Creator: López, Betty Lucy
System: The UNT Digital Library
FT-NMR and Raman Spectroscopic Studies of Molecular Dynamics in Liquids (open access)

FT-NMR and Raman Spectroscopic Studies of Molecular Dynamics in Liquids

NMR relaxation and Raman lineshape analysis are well known methods for the study of molecular reorientational dynamics in liquids. The combination of these two methods provides another approach to tackle the characterization of molecular dynamics in liquids. Investigations presented here include (1) NMR relaxation study of polycyclic compounds in solution, (2) the study of nitromethane reorientational dynamics using the NMR and Raman methods, and (3) Raman lineshape analysis of reorientation hexafluorobenzene/benzene mixtures.
Date: December 1993
Creator: Wang, Kuen-Shian
System: The UNT Digital Library
Stabilization of Different Lead Compounds in Portland Cement (open access)

Stabilization of Different Lead Compounds in Portland Cement

This research investigated the chemistries and mechanisms involved in lead-cement systems through the study of a larger number of lead compounds.
Date: August 1993
Creator: Zhao, Baoshu (Baoshu Eric)
System: The UNT Digital Library
Synthesis and Characterization of Methylated PCU Dimers (open access)

Synthesis and Characterization of Methylated PCU Dimers

Conversion of 1-Methylpentacyclo[5.4.0.0²⋅⁶.0³⋅¹⁰.0⁵⋅⁹]undecane- 8,11-dione into the corresponding mono(ethylene ketal) followed by Wolff-Kishner reduction resulted in a mixture of two isomers (i.e., 1- and 7-methyl-8-[2',-(1',3',dioxolano)]pentacyclo[5.4.0.0²⋅⁶.0³⋅¹⁰.0⁵⋅⁹] undecane. Hydrolysis of each isomer in turn resulted in 1- and 7- methyl pentacyclo[5.4.0.0²⋅⁶.0³⋅¹⁰.0⁵⋅⁹ ]undecan-8-ones (i.e.,"methylated PCU-8-ones"), respectively. "Titanium-promoted reductive dimerization of each of the methylated pentacycloundecane (PCU)-8-ones afforded mixtures of "methylated PCU alkene dimers". Individual isomers have been isolated from these mixtures via column chromatography by using silver nitrate impregnated silica gel as adsorbent followed by fractional recrystallizations of individual chromatography fractions. Structures of three isomerically pure methylated PCU alkene dimers (C₂₄H₂₈) have been established unequivocally by application of single crystal X-ray crystallographic methods.
Date: August 1993
Creator: Zope, Anjali U. (Anjali Umesh)
System: The UNT Digital Library
The Analysis of Volatile Impurities in Air by Gas Chromatography/Mass Spectrometry (open access)

The Analysis of Volatile Impurities in Air by Gas Chromatography/Mass Spectrometry

The determination of carbon monoxide is also possible by trapping CO on preconditioned molecular sieve and thermal desorption. Analysis in this case is performed by gas chromatography/mass spectroscopy, although the trapping technique is applicable to other suitable GC techniques.
Date: May 1993
Creator: Talasek, Robert Thomas
System: The UNT Digital Library
The Development of Predictive Models for the Acid Degradation of Chrysotile Asbestos (open access)

The Development of Predictive Models for the Acid Degradation of Chrysotile Asbestos

The purpose of this study was to determine the factors affecting the acid degradation of chrysotile asbestos (Mg_3Si_2O_5(OH_4)) . Millions of tons of asbestos have found use in this country as insulative or ablative material. More than 95 percent of the asbestos in use is of the chrysotile variety. The remaining 5 percent is composed of various types of fibrous amphiboles. The inhalation of asbestos can lead to several diseases in humans. Asbestosis, lung cancer and mesothelioma are the most common afflictions associated with asbestos inhalation, and they may occur up to 40 years after the initial exposure. It has previously been reported that if more than 50 percent of the magnesium is removed from a chrysotile sample its carcinogenicity is reduced to nil. Several inorganic acids were studied to determine their ability to leach magnesium from chrysotile. It was found that the ability to leach magnesium was dependent upon the acidic anion in addition to the concentration of the acid. The ordering of the efficiency of the acids in their ability to remove magnesium from chrysotile was found to be HCl > H_2SO_4 > H_3PO_4 > HNO_3. Predictive equations were developed to allow the calculation of the amount of …
Date: May 1993
Creator: Ingram, Kevin D. (Kevin Dean)
System: The UNT Digital Library
Solderability Study of Tin/Lead Alloy Under Steam-Aging Treatment by Electrochemical Reduction Analysis and Wetting Balance Tests (open access)

Solderability Study of Tin/Lead Alloy Under Steam-Aging Treatment by Electrochemical Reduction Analysis and Wetting Balance Tests

Two types of solder samples, pins and through-holes were tested by SERA™ (Sequential Electrochemical Reduction Analysis) and Wetting Balance after various length of steamaging treatment. It was shown that after steam-aging, both types of specimen gave a similar electrochemical reduction curve, and solderabilty predictions made from SERA™ test agree with results obtained from Wetting Balance test on a qualitative base. Wetting balance test of pin samples after SERA™ test confirmed that SERA™ is a non-destructive testing method -- it even restored solderability. Comparison of electrochemical reduction behavior of samples under different treatment indicates that steam-aging can not reproduce exactly the effect of naturally atmospheric aging, and may not be the best artificial accelerating environment adopted.
Date: May 1993
Creator: Gao, Yang, 1966-
System: The UNT Digital Library
Solid State Diffusion Kinetics of Intermetallic Compound Formation in Composite Solder (open access)

Solid State Diffusion Kinetics of Intermetallic Compound Formation in Composite Solder

The Sn/Pb eutectic alloy system is the most widely used joining material in the electronics industry. In this application, the solder acts as both an electrical and mechanical connection within and among the different packaging levels in an electronic device. Recent advances in packaging technologies, however, driven by the desire for miniaturization and increased circuit speed, result in severe operating conditions for the solder connection. In an effort to improve its mechanical integrity, metallic or intermetallic particles have been added to eutectic Sn/Pb solder, and termed composite solders. It was the goal of this study to investigate the growth and morphology of the two intermetallic phases (Cu6Sn5 and Cu3Sn) that form between a Cu substrate and Sn/Pb solder under different aging and annealing conditions.
Date: May 1993
Creator: Sees, Jennifer A. (Jennifer Anne)
System: The UNT Digital Library
Solution Studies of the Structures and Stability of Mixed Lithium Alkoxide/Alkvllithium Aggregates (open access)

Solution Studies of the Structures and Stability of Mixed Lithium Alkoxide/Alkvllithium Aggregates

New one- and two-dimensional NMR techniques were used to elucidate the solution structures of these complex mixtures. The system, lithium tert-butoxide/tert-butyllithium, was studied as a model system with O/Li ratios varying from 0/1 to 1/1. It was found that at low O/Li ratios, a single mixed tetrameric aggregate was formed. At higher O/Li ratios, mixed hexameric species were formed. Two other systems, lithium isopropoxide/iso-propyllithium and lithium n-propoxide/n-propyllithium were also studied at low O/Li ratios.
Date: December 1992
Creator: DeLong, George T. (George Thomas)
System: The UNT Digital Library
Thermochemical Investigation of Ternary Nonelectrolyte Mixtures (open access)

Thermochemical Investigation of Ternary Nonelectrolyte Mixtures

Excess molar volumes have been determined for four ternary chlorobenzene + dibutyl ether + alkane mixtures at 25°C. Results of these measurements are used to test the applications and limitations of BAB, Redlich-Kister, Kohler and Hwang et al. cubic models. For the systems studied, Redlich- Kister, Kohler and Cubic models were found to provide reasonable predictions. Differences between experimental and predicted ΔV^ex_123 values were about ±0.020 cm^3mol^-1 or less at most ternary compositions. Solubilities are reported for anthracene in binary mixtures containing propanol and butanol with alkanes at 25°C. Results of these measurements are used to test the NIBS/Redlich-Kister expression. The three-parameter form of this expression is found to provide reasonable mathematical representation with deviations between experimental and back-calculated values being less than ±1%.
Date: December 1992
Creator: Teng, I-Lih
System: The UNT Digital Library
Kinetic Study of the Reactions of Oxygen Atoms with Nitric Oxide and Silane (open access)

Kinetic Study of the Reactions of Oxygen Atoms with Nitric Oxide and Silane

The rate constant for the reactions of oxygen atoms with nitric oxide and silane were determined using a discharge flow apparatus. A microwave discharge through O2N2 and Ar was used to produce oxygen atoms. The rate constant for the reaction O + NO + Ar was determined to be (7.0+0.4) x 10^32 cm^6 s^-1 and is in good agreement with previous measurements. Modeling of the O +SiH₄ reaction was performed to determine the correction to the rate constant due to secondary reactions. The rate constant for the reaction O + SiH₄ was determined to be (3.3 +/- 0.3) x 10⁻¹³ cm³ s⁻¹ and is in good agreement with previous measurements. Previous literature, thermochemistry, and spin conservation were used to determine a probable mechanism for the O + SiH₄ reaction.
Date: August 1992
Creator: Taylor, Craig A. (Craig Allan)
System: The UNT Digital Library
Kinetic Studies of the Reactions of Cl and Br with Silane and Trimethylsilane (open access)

Kinetic Studies of the Reactions of Cl and Br with Silane and Trimethylsilane

The temperature dependence of the reactions of halogen atoms Cl and Br with SiH4 and (CH3)3SiH have been investigated with the flash photolysis-resonance fluorescence technique. CCI4 and CH2Br2 were used as precursors to produce Cl and Br atoms, respectively. Experiments gave {k(Cl + SiH4) (295 - 472 K)} = (1.56 +0.11) x 10-1 exp[(2.0 + 0.2) kJ mol'/RT] cm3 s4, {k(Br + SiH4)(295 - 575 K)} = (9.0 + 1.5) x 10-" exp[-(17.0 + 0.6) Id mol'/RT] cm3 s', {k(Cl + (CH3)3SiH)(295 - 468 K)} = (1.24 0.35) x 104 exp[(1.3 + 0.8) Id mol4/RT] cm3 s', and {k(Br + (CH3)3SiH)(295 - 456 K)} = (7.6 + 3.3) x 1010 exp[-(28.4 + 1.3) Id mol'/RT] cm3 s'. The results were compared with values from earlier work.
Date: May 1992
Creator: Ding, Luying
System: The UNT Digital Library
The Metal-Organic Chemical Vapor Deposition of Cu(II)-bishexafluoroacetylacetonate on a Tungsten Substrate (open access)

The Metal-Organic Chemical Vapor Deposition of Cu(II)-bishexafluoroacetylacetonate on a Tungsten Substrate

Evidence is reported for the formation of carbon-containing contamination products at the copper-tungsten (Cu-W) interface during the metal organic chemical vapor deposition (MOCVD) of copper on tungsten. Cu(II)bishexafluoroacetylacetonate [Cu(hfac)_2] was physisorbed onto lightly oxidized tungsten (WO_x) at 115K, under ultra-high vacuum conditions, and then annealed sequentially to higher temperatures. Copper reduction was observed by 320K. Carbonaceous and carbidic contamination of the WO_x surface was observed, even after sample warming to 625K in UHV. The results indicate that low temperature MOCVD of Cu may be possible, but interfacial contamination from the organic ligand fragmentation is a major concern.
Date: May 1992
Creator: Welton, Theresa E. (Theresa Eilene)
System: The UNT Digital Library
A Study of Intra- and Interaggregate Exchange Processes of Alkyllithium Compounds Using One- and Two- Dimensional NMR Spectroscopy (open access)

A Study of Intra- and Interaggregate Exchange Processes of Alkyllithium Compounds Using One- and Two- Dimensional NMR Spectroscopy

One- and two-dimensional NMR spectroscopy, including 13C{6Li}{1H} triple resonance techniques, were used to characterize a series of mixed alkyllithium aggregates and to study their exchange processes.
Date: May 1992
Creator: Pannell, Daniel K. (Daniel Kirk)
System: The UNT Digital Library
The Precipitation of Strontium Sulfate in Gels (open access)

The Precipitation of Strontium Sulfate in Gels

The growth of strontium sulfate precipitate by diffusion in various gels was studied by using optical transmission and confocal microscopies, scanning and transmission electron microscopies, and energy dispersive X ray fluorescence. Pure silica gel, pure agarose gel and the silica/agarose mixed gel at pH 7 - 10 were used throughout the present study. Precipitate morphology is sensitive to pH and to the nature of the growth medium. The morphology was observed as a function of time. The lack of change is presumably because of rapid depletion of the limiting reagent after the very beginning of precipitation. The problem of separating strontium sulfate precipitate from the gel medium is discussed.
Date: December 1991
Creator: Lee, Ya
System: The UNT Digital Library
Preparation and Stereochemistry of Reactive Intermediates Containing a Silicon-Carbon Double Bond (open access)

Preparation and Stereochemistry of Reactive Intermediates Containing a Silicon-Carbon Double Bond

1,1-Dimethyl-2-neopentylsilene reacted with the N-methylimine of benzophenone to give 1,2,2-trimethyl-3- neopentyl-4,4-diphenyl-l-aza-2-silacyclobutane, I, and 2,3,4,4a-tetrahydro-2,3,3-trimethyl-1-phenyl-4-neopentyl-2- aza-3-silanephthalene, II, in 35% and 20% yields, respectively. Compounds I and II did not serve as thermal silene precursors. Heating I and II to over 280°C did not yield 1,3-disilacyclobutanes. In the presence of 2,3- dimethyl-1,3-butadiene typical silene products were not obtained. However, I and II reacted rapidly with methanol at room temperature to give the ring-opened products (E)-2- methoxy-2,5,5-trimethyl-2-silahex-3-ene, III, 1,1- diphenyldimethylamine, IV, and 2-methoxy-2,5,5-trimethyl-3- (N-methylaminodiphenyl) methyl-2-silahexane, V.
Date: December 1991
Creator: Uang, Shinian
System: The UNT Digital Library
Raman and NMR Investigation of Molecular Reorientation and Internal Rotation in Liquids (open access)

Raman and NMR Investigation of Molecular Reorientation and Internal Rotation in Liquids

Molecular rotational motions are known to influence both Raman scattering of light and nuclear spin relaxation. Therefore, the application of Raman bandshape analysis and NMR relaxation time measurements to probe molecular dynamics in liquids will provide us with a deeper understanding of the dynamical behavior and structure of molecules in the liquid phase. Presented here are (i) studies of molecular reorientation of acetonitrile in the neat liquid phase and in solution by Raman bandshape analysis and NMR relaxation; (ii) studies of reorientational dynamics and internal rotation in transition metal clusters by NMR relaxation.
Date: December 1991
Creator: Yuan, Peng
System: The UNT Digital Library
Comparison of 43Sn/43Pb/14Bi Solder and Standard 60Sn/40Pb Solder by Thermocyclic Fatigue Analysis (open access)

Comparison of 43Sn/43Pb/14Bi Solder and Standard 60Sn/40Pb Solder by Thermocyclic Fatigue Analysis

The thermocyclic fatigue behavior of the low-melting solder 43Sn/43Pb/14Bi has been investigated and compared to that of standard 60Sn/4OPb solder via metallographic analysis (using scanning electron microscopy) and evaluation of the degree of fatigue development (using a fatigue scale as a function of thermocycles). Specimens were subjected to shearing strains imposed by several hundred fatigue thermocycles. Both solder types fatigue by the same microstructural failure mechanism as described by other workers. The mechanism is characterized by a preferential coarsening of the solder joint microstructure at the region of maximum stress concentration where cracks originate.
Date: August 1991
Creator: Calderon, Jose Guadalupe
System: The UNT Digital Library