Explorations with Polycarbocyclic Cage Compounds (open access)

Explorations with Polycarbocyclic Cage Compounds

A variety of novel cage-functionalized pyridyl containing crown ethers have been prepared for use in selective alkali metal complexation studies. A highly preorganized, cage-functionalized cryptand also has been designed and has been synthesized for use as a selective Li+ complexant. The alkali metal picrate extraction profiles of these cage-functionalized crown ethers also have been studied. Novel cage-functionalized diazacrown ethers have been prepared for selective alkali metal complexation studies. Alkali metal picrate extraction experiments have been performed by using this new class of synthetic ionophores to investigate the effects of cage-annulation and the influence of N-pivot lariat sidearms upon their resulting complexation properties. Novel pyridyl containing calix[4]arene receptors were prepared. Analysis of their respective 1H NMR and 13C NMR spectra suggests that calix[4]arene moieties in the ligand occupy the cone conformation. The complexation properties of these host molecules were estimated by performing a series of alkali metal picrate extraction experiments. An optically active cage-functionalized crown ether which contains a binaphthyl moiety as the chiral unit was prepared. The ability of the resulting optically active crown ether to distinguish between enantiomers of guest ammonium ions (i.e., phenylethylamonium and phenylglycinate salts) in transport experiments was investigated. Hexacyclo[11.2.1.02,12.05,10.05,15.010,14]hexadeca-6,8-diene-4,11-dione was prepared from hexacyclo[7.4.2.01,9.03,7.04,14.06,15] pentadeca-10,12-diene-2,8-dione. Unanticipated …
Date: August 1999
Creator: Chong, Hyun-Soon
System: The UNT Digital Library
Adhesion/Diffusion Barrier Layers for Copper Integration: Carbon-Silicon Polymer Films and Tantalum Substrates (open access)

Adhesion/Diffusion Barrier Layers for Copper Integration: Carbon-Silicon Polymer Films and Tantalum Substrates

The Semiconductor Industry Association (SIA) has identified the integration of copper (Cu) with low-dielectric-constant (low-k) materials as a critical goal for future interconnect architectures. A fundamental understanding of the chemical interaction of Cu with various substrates, including diffusion barriers and adhesion promoters, is essential to achieve this goal. The objective of this research is to develop novel organic polymers as Cu/low-k interfacial layers and to investigate popular barrier candidates, such as clean and modified tantalum (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that polymerization is via the vinyl groups, while Auger electron spectroscopy (AES) results show that the polymerized films have compositions similar to the precursors. Films derived from vinyltrimethyl silane (VTMS) are adherent and stable on Ta substrates until 1100 K. Diffusion of deposited Cu overlayers is not observed below 800 K, with dewetting occurred only above 400 K. Hexafluorobenzene moieties can also be incorporated into the growing film with good thermal stability. Studies on the Ta substrates demonstrate that even sub-monolayer coverages of oxygen or carbide on polycrystalline …
Date: December 1999
Creator: Chen, Li
System: The UNT Digital Library
Synthesis and Alkali Metal Extraction Properties of Novel Cage-Functionalized Crown Coronands and Cryptands (open access)

Synthesis and Alkali Metal Extraction Properties of Novel Cage-Functionalized Crown Coronands and Cryptands

A novel crown ether precursor was developed in which a rigid 4-oxahexacyclo (5.4.1.26.3,10.05,9.08,11) dodecyl cage moiety ("cage functionality") was incorporated.
Date: August 1999
Creator: McKim, Artie S.
System: The UNT Digital Library
Sulfur-induced Corrosion at Metal and Oxide Surfaces and Interfaces (open access)

Sulfur-induced Corrosion at Metal and Oxide Surfaces and Interfaces

Sulfur adsorbed on metallic and oxide surfaces, whether originating from gaseous environments or segregating as an impurity to metallic interfaces, is linked to the deterioration of alloy performance. This research dealt with investigations on the interactions between sulfur and iron or iron alloy metallic and oxide surfaces under ultrahigh vacuum conditions. Sulfur was either intentionally dosed from a H2S source on an atomically clean metal surface, or segregated out as an impurity from the bulk to the metal surface by annealing at elevated temperatures.
Date: August 1997
Creator: Cabibil, Hyacinth (Hyacinth Liesl)
System: The UNT Digital Library
A Quenchofluorometric Study of Polycyclic Aromatic Hydrocarbons in Molecularly Organized Media (open access)

A Quenchofluorometric Study of Polycyclic Aromatic Hydrocarbons in Molecularly Organized Media

Detection, identification and separation of polycyclic aromatic compounds in environmental samples are of extreme importance since many of these compounds are well known for their potential carcinogenic and/or mutagenic activities. Selective quenching of molecular fluorescence can be utilized effectively to analyze mixtures containing different polycyclic aromatic hydrocarbons. Molecularly organized assemblies are used widely in detection and separation of these compounds mainly because of less toxicity and enhanced solubilization capabilities associated with these media. Feasibility of using nitromethane and the alkylpyridinium cation as selective fluorescence quenching agents for discriminating between alternant versus nonalternant polycyclic aromatic hydrocarbons (PAHs) is critically examined in several molecularly organized micellar solvent media. Fluorescence quenching is used to probe the structural features in mixed micelles containing the various combinations of anionic, cationic, nonionic and zwitterionic surfactants. Experimental results provide valuable information regarding molecular interactions between the dissimilar surfactants.
Date: May 1998
Creator: Pandey, Siddharth
System: The UNT Digital Library
Kinetics and Thermochemistry of Halogenated Species (open access)

Kinetics and Thermochemistry of Halogenated Species

Gas phase kinetics and thermochemistry of several halogenated species relevant to atmospheric, combustion and plasma chemistry were studied using experimental and ab initio theoretical techniques.
Date: May 1997
Creator: Misra, Ashutosh
System: The UNT Digital Library
Thermodynamic and Structural Studies of Layered Double Hydroxides (open access)

Thermodynamic and Structural Studies of Layered Double Hydroxides

The preparation of layered double hydroxides via titration with sodium hydroxide was thoroughly investigated for a number of M(II)/M(III) combinations. These titration curves were examined and used to calculate nominal solubility product constants and other thermodynamic quantities for the various LDH chloride systems.
Date: May 1998
Creator: Boclair, Joseph W. (Joseph Walter)
System: The UNT Digital Library
Computer Simulations of Dilute Polymer Solutions: Chain Overlaps and Entanglements (open access)

Computer Simulations of Dilute Polymer Solutions: Chain Overlaps and Entanglements

Chain conformations and the presence of chain overlaps and entanglements in dilute polymer solutions have been analyzed. The fundamental problem of existence of chain overlaps in dilute solutions is related to the drag reduction phenomenon (DR). Even though DR occurs in solutions with the concentration of only few parts per million (ppm), some theories suggest that entanglements may play an important role in DR mechanism. Brownian dynamics technique have been used to perform simulations of dilute polymer solutions at rest and under shear flow. A measure of interchain contacts and two different measures of entanglements have been devised to evaluate the structure of polymer chains in solution. Simulation results have shown that overlaps and entanglements do exist in static dilute solutions as well as in solutions under shear flow. The effect of solution concentration, shear rate and molecular mass have been examined. In agreement with the solvation theory of DR mechanism, simulation results have demonstrated the importance of polymer + polymer interactions in dilute solutions.
Date: August 1996
Creator: Drewniak, Marta
System: The UNT Digital Library
Raman and NMR Investigation of Molecular Reorientation and Internal Rotation in Liquids (open access)

Raman and NMR Investigation of Molecular Reorientation and Internal Rotation in Liquids

Molecular rotational motions are known to influence both Raman scattering of light and nuclear spin relaxation. Therefore, the application of Raman bandshape analysis and NMR relaxation time measurements to probe molecular dynamics in liquids will provide us with a deeper understanding of the dynamical behavior and structure of molecules in the liquid phase. Presented here are (i) studies of molecular reorientation of acetonitrile in the neat liquid phase and in solution by Raman bandshape analysis and NMR relaxation; (ii) studies of reorientational dynamics and internal rotation in transition metal clusters by NMR relaxation.
Date: December 1991
Creator: Yuan, Peng
System: The UNT Digital Library
Precipitation and Pattern Formation under Far-From-Equilibrium Conditions (open access)

Precipitation and Pattern Formation under Far-From-Equilibrium Conditions

Precipitates of a series of alkaline earth metal (barium and strontium) carbonates, chromates, phosphates, and sulfates were formed at high supersaturation by diffusion through silica hydrogel, agarose hydrogel, and the freshly developed agarosesilica mixed gels. The reaction vessels could be a small test tube, a recently designed standard micro slide cassette and a enlarged supercassette. Homogeneous nucleation is thought to have taken place, and particle development led to the formation of an unusual category of materials, known as Induced Morphology Crystal Aggregates [IMCA], at high pH under far-from-equilibrium conditions. Standard procedures were developed in order to produce homogeneous gels. Particle development led to characteristic style of pattern formation, which I have called monster, spiral, and flake. Among these IMCA, barium carbonate, chromate, and sulfate were moderately easy to grow. Barium phosphate was very difficult to grow as IMCA due to formation of poorly crystalline spherulites. IMCA of strontium carbonate, chromate and sulfate could be developed at high basic pH in the presence of silicate. Strontium carbonate sheet morphology displays a unique property, double internal layer structure, which was identified by backscattering electron imaging (BEI). Selected electron diffraction (SAD) revealed a new crystal phase which was called "Dentonite". Precipitate particles were …
Date: August 1995
Creator: Chen, Peng, 1960-
System: The UNT Digital Library
Characterization of Low Barrier Hydrogen Bonds in Enzyme Catalysis: an Ab Initio and DFT Investigation (open access)

Characterization of Low Barrier Hydrogen Bonds in Enzyme Catalysis: an Ab Initio and DFT Investigation

Hartree-Fock, Moller-Plesset, and density functional theory calculations have been carried out using 6-31+G(d), 6-31+G(d,p) and 6-31++G(d,p) basis sets to study the properties of low-barrier or short-strong hydrogen bonds (SSHB) and their potential role in enzyme-catalyzed reactions that involve proton abstraction from a weak carbon-acid by a weak base. Formic acid/formate anion, enol/enolate and other complexes have been chosen to simulate a SSHB system. These complexes have been calculated to form very short, very short hydrogen bonds with a very low barrier for proton transfer from the donor to the acceptor. Two important environmental factors including small amount of solvent molecules that could possibly exist at the active site of an enzyme and the polarity around the active site were simulated to study their energetic and geometrical influences to a SSHB. It was found that microsolvation that improves the matching of pK as of the hydrogen bond donor and acceptor involved in the SSHB will always increase the interaction of the hydrogen bond; microsolvation that disrupts the matching of pKas, on the other hand, will lead to a weaker SSHB. Polarity surrounding the SSHB, simulated by SCRF-SCIPCM model, can significantly reduce the strength and stability of a SSHB. The residual strength …
Date: August 1999
Creator: Pan, Yongping
System: The UNT Digital Library
The Synthesis and Chemistry of Polyciclic Cage Compounds (open access)

The Synthesis and Chemistry of Polyciclic Cage Compounds

Chapter I describes the synthesis of a trishomocubyl helical tubuland diol and some aspects of its inclusion chemistry. Thus, all three isomers of 4,7-dimethylpentacyclo[6.3.0.0^2,6.0^3,10.0^5,9]undecane-4,7-diol have been prepared and their X-ray structures have been determined. The syn,syn-isomer crystallizes in a double-stranded hydrogen-bonded lattice, while anti,syn-isomer forms a hydrogen-bonded layer lattice. In contrast, the anti,anti-isomer is a new member of the helical tubuland diol host family; its crystal lattice consists of parallel canals with a trefoil-shaped cross-section of area 25.4 Å^2. Chapter II describes the synthesis of new molecular clefts. These molecular clefts have been synthesized via base-promoted reactions of 3,6-diaryl-l,2,4,5-tetrazines with tetracyclo[6.3.0.0^4,11.0^5,9]undecane-3,6-dione and with tricyclo[6.3.0.0^2,6]undecane-3,11-dione, respectively. Compounds of this type are of interest as a potential new class of host molecules for use in host-guest complexation studies. Chapter III reports the synthesis of stereospecifically deuterated spiro(oxetane-3,8'-pentacyclo[5.4.0.0^2,6.0^3,10.0^5,9]undecanes) and their acid-promoted ring opening and concomitant rearrangements. The deuterium-containing reaction products have been characterized via analysis of their NMR and mass spectra. The results strongly suggest that intramolecular 1,5-hydride shifts provide an important pathway through which the acid promoted rearrangements occur. Chapter IV reports the oxidation of heptacyclo-[6.6.0.0^2,6.0^3,13.0^4,11.0^5,9.0^10,14] tetradecane (HCTD) via application of Barton's "GoAgg" systems. The products have been characterized by NMR and …
Date: December 1994
Creator: Wang, Yanjun
System: The UNT Digital Library
Thermophysical and Mechanical Properties of Polymer Liquid Crystals and Their Blends (open access)

Thermophysical and Mechanical Properties of Polymer Liquid Crystals and Their Blends

Tensile properties, namely the elastic modulus, tensile strength, percent of elongation at yield and at the break were determined for the pure components and blends. The results are connected to the respective phase diagrams and demonstrate that blending makes property manipulation possible. Blends for which the mechanical properties are better than those of pure EPs can be obtained.
Date: May 1994
Creator: López, Betty Lucy
System: The UNT Digital Library
Molecular Modeling Study of Oxidative Degradation of Polyperfluoroethers Catalyzed by Iron Fluoride Surfaces : An Extended Hückel Theory Approach (open access)

Molecular Modeling Study of Oxidative Degradation of Polyperfluoroethers Catalyzed by Iron Fluoride Surfaces : An Extended Hückel Theory Approach

Extended Hückel methods are known to be a useful tool in understanding surface phenomena. Important quantities about atoms and chemical bonds can be obtained from this computationally simple method, although caution must be exercised in interpreting the results. Application of Extended Hückel calculations to large metal clusters reveals the role of d orbitals in solids. Basic ideas of constructing model compounds have been developed. Several model systems for surface chemisorption processes are constructed in order to understand the surface catalyzed oxidative degradation of polyperfluoroethers. The activation of oxygen molecules can be explained. The Lewis acid character of the iron fluoride surface can be predicted. Based on these results, mechanisms of the degradation processes are discussed.
Date: May 1995
Creator: Wang, Yanbin
System: The UNT Digital Library
A Study of Intra- and Interaggregate Exchange Processes of Alkyllithium Compounds Using One- and Two- Dimensional NMR Spectroscopy (open access)

A Study of Intra- and Interaggregate Exchange Processes of Alkyllithium Compounds Using One- and Two- Dimensional NMR Spectroscopy

One- and two-dimensional NMR spectroscopy, including 13C{6Li}{1H} triple resonance techniques, were used to characterize a series of mixed alkyllithium aggregates and to study their exchange processes.
Date: May 1992
Creator: Pannell, Daniel K. (Daniel Kirk)
System: The UNT Digital Library
Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface (open access)

Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface

As the miniaturization keeps decreasing in semiconductor device fabrication, metal contamination on silicon surfaces becomes critical. An investigation of the fundamental mechanism of metal contamination process on silicon surface is therefore important. Kinetics and thermodynamics of the copper out-plating process on silicon surfaces in diluted HF solutions are both evaluated by several analytical methods.
Date: August 1995
Creator: Chien, Hsu-Yueh
System: The UNT Digital Library
Stereoselective Solid-State NaBH₄ Reduction of 1-Methylpentacyclo[5.4.0.0²,⁶.0³,¹⁰,0⁵,⁹]undecane-8, 11-Dione, Synthesis and Chemistry of Strained Alkenes, and Chemical and Microbial Synthesis of Racemic and Optically Active (S)-4-Hydroxy-2-Cyclohexenone (open access)

Stereoselective Solid-State NaBH₄ Reduction of 1-Methylpentacyclo[5.4.0.0²,⁶.0³,¹⁰,0⁵,⁹]undecane-8, 11-Dione, Synthesis and Chemistry of Strained Alkenes, and Chemical and Microbial Synthesis of Racemic and Optically Active (S)-4-Hydroxy-2-Cyclohexenone

Part I. Reduction of the 1-methylpentacyclo [5.4.0.0²,⁶.0³,¹⁰,0⁵,⁹]undecane-8, 11-dione (9) with solid NaBH₄ resulted in highly stereoselective reduction of both C=O groups in the substrate, thereby affording the corresponding endo-8, endo-11-diol (11a). The configuration of 11a was established unequivocally by converting 11a into the corresponding cyclic thiocarbonate ester, 12. Part II. Z-1,2-Di(1'-adamantyl)ethene (14) was synthesized with a high degree of stereoselectively in four steps (Scheme 9 in Chapter 2). E-1,2-di(1'-adamantyl)ethene (15) was synthesized by iodine promoted isomerization of 14. Both structures were established unequivocally via single-crystal X-ray structural analysis. E-1-(exo-8'-Pentacyclo[5.4.0.0²,⁶.0³,¹⁰,0⁵,⁹]undecyl)-2-phenylethylene (16a) was synthesized, and its structure was established via analysis of its 1H, 13C, and 2D COSY NMR spectra. Part III. Reactions of electrophiles, i.e.,:CCl_2, PhSCl, and Br_2, to Z- and E-1,2-di(1'-adamantyl)ethenes (14 and 15, respectively) are described (Scheme 5, 8, 10, and 13 in Chapter 3). Structures of the corresponding products were established unequivocally via analysis of their respective one- and two-dimensional NMR spectra and/or single-crystal X-ray structural analysis. Part IV. An improved asymmetric synthesis of optically active (S)-4-hydroxy-2-cyclohexenone 1 (64%ee, determined via Mosher's method) has been developed (Scheme 5 in Chapter 4). The key step in this synthesis involves the baker's yeast reduction of 13. The absolute configuration of …
Date: August 1995
Creator: Xing, Dongxia
System: The UNT Digital Library
Structural Elucidation of tert-Butyllithium/Lithium Alkoxide and Lithium Hydride/Lithium Alkoxide Mixed Aggregates (open access)

Structural Elucidation of tert-Butyllithium/Lithium Alkoxide and Lithium Hydride/Lithium Alkoxide Mixed Aggregates

The effects of lithium alkoxides on the rates of reactions and on the structures of a series of tert-butyllithium/lithium alkoxide mixed aggregates were studied, where the alkoxides were iso-butoxide, tert-butoxide and menthoxide. It was found that their effects depend not only on their amount present, but also on their steric bulk. The tert-butyllithium/lithium alkoxide mixed aggregates were exposed to UV light or heat to form lithium hydride/lithium alkoxide mixed aggregates. The aggregation states were assigned from either 13C-6Li coupling or a new technique based on the relative intensity of NMR peaks using different nuclei. The compounds formed depend upon the method of formation and the alkoxide. The unique properties of the lithium hydride/lithium alkoxide mixed aggregates are their high solubility in hydrocarbon solutions, very reactive bases, showing 6Li-1H couplings, and having only one hydride ion per aggregate. Their formation, reactivity, solubility, and aggregation states were found to depend on the size of lithium alkoxides. X-ray crystal structures of lithium tert-butoxide and lithium menthoxide were also studied and found to be hexameric.
Date: December 1997
Creator: Nguyen, Hanh D.
System: The UNT Digital Library
I. On the Mechanism of Acid Promoted Rearrangement of PCU-Derived Pinacols II. Synthesis of a Trimethyltrishomocubyl Helical Tubuland Diol (open access)

I. On the Mechanism of Acid Promoted Rearrangement of PCU-Derived Pinacols II. Synthesis of a Trimethyltrishomocubyl Helical Tubuland Diol

I. Reductive dimerization of pentacyclo[5.4.0.0.^2,6.0^3,10.0^5'9]undecane-8-one-(PCU-8-one, 53) affords a mixture of meso and d,l pinacols (55a and 55b respectively). Acid promoted rearrangement of 55a and 55b conceivably can proceed with migration of C(7)-C(8) and/or C(8)-C(9) to form the corresponding pinacolone(s). In our hands, acid promoted rearrangement of 55a and 55b each proceeds with exclusive migration of C(7)- C(8) bond, thereby affording 58a and 59a respectively. Mechanistic features of this rearrangement are discussed. II. 4,7,1 l-trimethylpentacyclo[6.3.0.0.^2,6.0^3,l0.0^5,9]undecane-exo-4,exo-7-diol (23a) was successfully synthesized. This diol crystallizes in a helical tubuland lattice although its molecular structure does not possess C2 rotational symmetry.
Date: May 1995
Creator: Liu, Zenghui
System: The UNT Digital Library
Spectrofluorometric Probe Methods for Examining Preferential Solvation in Binary Mixtures (open access)

Spectrofluorometric Probe Methods for Examining Preferential Solvation in Binary Mixtures

Spectrofluorometric probe methods are developed and examined regarding their ability to model preferential solvation around probe molecules in binary solvents. The first method assumes that each fluorophore is solvated by only one type of solvent molecule and that each fluorophore contributes to the emission intensity. Expressions for this model are illustrated using fluorescence behavior of pyrene, benzo[e]pyrene, benzo[ghi]perylene, and coronene dissolved in binary n-heptane + 1,4-dioxane and n-heptane + tetrahydrofuran mixtures. The second method treats the solvational sphere as a binary solvent microsphere, with the fluorophore's energy in both the ground and the excited states mathematically expressed using the "nearly ideal binary solvent" (NIBS) model. Expressions derived from this model are illustrated using fluorescence behavior of 9,9'-bianthracene and 9,9*-bianthracene-10-carboxaldehyde in binary toluene + acetonitrile and dibutyl ether + acetonitrile.
Date: August 1994
Creator: Wilkins, Denise C.
System: The UNT Digital Library
Surface and Interfacial Studies of Metal-Organic Chemical Vapor Deposition of Copper (open access)

Surface and Interfacial Studies of Metal-Organic Chemical Vapor Deposition of Copper

The nucleation and successful growth of copper (Cu) thin films on diffusion barrier/adhesion promoter substrates during metal-organic chemical vapor deposition (MOCVD) are strongly dependent on the initial Cu precursor-substrate chemistry and surface conditions such as organic contamination and oxidation. This research focuses on the interactions of bis(1,1,1,5,5,5-hexafluoroacetylacetonato)copper(II), [Cu(hfac)2], with polycrystalline tantalum (Ta) and polycrystalline as well as epitaxial titanium nitride (TiN) substrates during Cu MOCVD, under ultra-high vacuum (UHV) conditions and low substrate temperatures (T < 500 K). The results obtained from X-ray photoelectron spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Temperature Programmed Desorption (TPD) measurements indicate substantial differences in the chemical reaction pathways of metallic Cu formation from Cu(hfac)2 on TiN versus Ta surfaces.
Date: December 1997
Creator: Nuesca, Guillermo M.
System: The UNT Digital Library
FT-NMR and Raman Spectroscopic Studies of Molecular Dynamics in Liquids (open access)

FT-NMR and Raman Spectroscopic Studies of Molecular Dynamics in Liquids

NMR relaxation and Raman lineshape analysis are well known methods for the study of molecular reorientational dynamics in liquids. The combination of these two methods provides another approach to tackle the characterization of molecular dynamics in liquids. Investigations presented here include (1) NMR relaxation study of polycyclic compounds in solution, (2) the study of nitromethane reorientational dynamics using the NMR and Raman methods, and (3) Raman lineshape analysis of reorientation hexafluorobenzene/benzene mixtures.
Date: December 1993
Creator: Wang, Kuen-Shian
System: The UNT Digital Library
Kinetic Studies of the Reactions of Alkyl and Silyl Hydrides (open access)

Kinetic Studies of the Reactions of Alkyl and Silyl Hydrides

The Kinetics of the reactions involving alkyl and silyl hydrides were studied by the flash photolysis / resonance fluorescence technique. The reactions of alkyl radicals (R = C₂H₅, i-C₃H₇, t-C₄H₉) with HBr have been studied at room temperature and the rate constants obtained (units are in cm³ s^-1 ) are: k₃.₃ = (7.01 ± 0.15) x 10^-12, k₃.₂ = (1.25 ± 0.06) x 10^-11, k₃.₁ = (2.67 ± 0.13) x 10^-11 These results, combined with previously determined reverse rate constants and other kinetic information, yield bond dissociation enthalpies (units in kJ mol^-1) at 298 K : primary C-H in C₂H₅-H (423.6 ± 2), secondary C-H in i-C₃H₇-H (409.9 ± 2), tertiary C-H in t-C₄H₉-H (405.1 ± 2). These rate constants and bond energies are in good agreement with previous results.
Date: August 1996
Creator: Yuan, Jessie (Jessie Win-Jae)
System: The UNT Digital Library
Selectivity Failure in the Chemical Vapor Deposition of Tungsten (open access)

Selectivity Failure in the Chemical Vapor Deposition of Tungsten

Tungsten metal is used as an electrical conductor in many modern microelectronic devices. One of the primary motivations for its use is that it can be deposited in thin films by chemical vapor deposition (CVD). CVD is a process whereby a thin film is deposited on a solid substrate by the reaction of a gas-phase molecular precursor. In the case of tungsten chemical vapor deposition (W-CVD) this precursor is commonly tungsten hexafluoride (WF6) which reacts with an appropriate reductant to yield metallic tungsten. A useful characteristic of the W-CVD chemical reactions is that while they proceed rapidly on silicon or metal substrates, they are inhibited on insulating substrates, such as silicon dioxide (Si02). This selectivity may be exploited in the manufacture of microelectronic devices, resulting in the formation of horizontal contacts and vertical vias by a self-aligning process. However, reaction parameters must be rigorously controlled, and even then tungsten nuclei may form on neighboring oxide surfaces after a short incubation time. Such nuclei can easily cause a short circuit or other defect and thereby render the device inoperable. If this loss of selectivity could be controlled in the practical applications of W-CVD, thereby allowing the incorporation of this technique into …
Date: August 1994
Creator: Cheek, Roger W. (Roger Warren)
System: The UNT Digital Library