Processes to fabricate dense, dry released microstructures with electrical connections on the opposite side of the wafer are described. A 10 x 10 array of silicon and polysilicon cantilevers with high packing density (5 tips/mm²) and high uniformity (<10 µm length variation across the wafer) are demonstrated. The cantilever release process uses a deep SF₆/C₄F₈, plasma etch followed by a HBr plasma etch to accurately release cantilevers. A process for fabricating electrical contacts through the backside of the wafer is also described. Electrodeposited resist, conformal CVD metal deposition and deep SF₆/C₄F₈ plasma etching are used to make 30 µm/side square vias each of which has a resistance of 50 m(omega).

This paper presents an overview of the hardware and software proposed for the ATLAS level 2 Trigger ROI Builder/Supervisor. The essential requirements of this system are that it operate at the design Level 1 Trigger rate of 100kHz and that it support the technical requirements of the architectures suggested for the ATLAS Level 2 Trigger. Commercial equipment and software support are used to the maximum extent possible, with support from dedicated hardware. Timing requirements and latencies are discussed and simulation results are presented.

High-purity tantalum single crystal cylinders oriented with [011] parallel to the cylinder axis were deformed 10, 20, and 30 percent in compression. The engineering stress-strain curve exhibited an up-turn at strains greater than {approximately}20% while the samples took on an ellipsoidal shape during testing, elongated along the [100] direction with almost no dimensional change along [0{bar 1}1]. Two orthogonal planes were selected for characterization using Orientation Imaging Microscopy (OIM): one plane containing [100] and [011] (longitudinal) and the other in the plane containing [0{bar 1}1] and [011] (transverse). OIM revealed patterns of alternating crystal rotations that develop as a function of strain and exhibit evolving length scales. The spacing and magnitude of these alternating misorientations increases in number density and decreases in spacing with increasing strain. Classical crystal plasticity calculations were performed to simulate the effects of compression deformation with and without the presence of friction. The calculated stress-strain response, local lattice reorientations, and specimen shape are compared with experiment.

Abstract. This talk examines two distinct cases in strong opbical fields where electron correlation plays an important role in the dynamic.s. In the first. example, strong coupling in a two-electron-like system is manifested as an intensity-dependent splitting in the ionized electron energy distribution. This two-electron phenomenon (dubbed continuum-continuum Autler-Townes effect) is analogous to a strongly coupled two- level, one-electron atom but raises some intriguing questions regarding the exact nature of electron-electron correlation. The second case examines the evidence for two-electron ionization in the strong-field tunneling limit. Although our ability to describe the one- electron dynamics has obtained a quantitative level of understanding, a description of the two (multiple) electron ionization remains unc

This paper presents scaling results based on simulations with the CALE hydrodynamics code of aluminum projectile impacts on typical aluminum Whipple shields at speeds of 6 to 14 km/s. The objective was to determine the extent of projectile and target material melting. The approach was to perform a matrix of computer simulations varying the impact speed from 6 to 14 km/s and varying the areal density of the shield from 5 percent to 80 percent of the centerline areal density of the projectile. The projectile radius was fixed at 9.5 mm (mass = 1.27 grams). The melt state of the projectile material and the shield material was assessed after release of the initial shock. The post-release specific energy in the projectile and in the shield was compared with the enthalpy of incipient melt and the enthalpy of complete melt provided in the Hultgren Tables. Material with specific energy greater than the enthalpy of complete melt was assumed to be fully melted; material with specific energy greater than the enthalpy of incipient melt but less than that of complete melt was assumed to be partially solid and partially melted mixed phase material with no strength; and material with specific energy less …

The inelastic scattering of x-rays, one of the first applications of x-rays to the field of condensed matter physics, has been rejuvenated in the last decade. The availability of synchrotrons radiation from wiggler and undulator sources combined with advances in monochromatization of the incident beam and analysis of the scattered beam with meV resolution led to the measurement of phonon dispersion relations. In addition, the use of Moessbauer nuclei as scatterer and analyzers has led to the discovery of the inelastic nuclear resonant scattering technique. This new method allows extraction of partial phonon density of states from amorphous materials, thin films, multilayers and interfaces, and liquids.

Although a variety of types of pre-solar SiC grains have been classified by their C, N, and Si isotopic composition, the majority of such grains are so-called mainstream grains and are believed to have come from asymptotic giant branch stars [1]. We have previously reported the Mo isotopic compositions of presolar SiC grains whose C, N, and Si isotopic compositions were not known [2]. Since most presolar SiC grains fall in the mainstream group, we assumed that these grains were mainstream. The excellent match of the Mo isotopic data with expectations for nucleosynthesis in AGB stars was consistent with this identification. In order to better understand the distribution of isotopic compositions in presolar grains, we have begun to measure heavy element isotopic compositions of presolar SiC grains of known C, N and Si isotopic composition.

Presolar silicon carbide grains form in a variety of types of stars, including asymptotic giant branch red giant stars and supernovae. The dominant mechanisms of heavy element nucleosynthesis, the s-process and r-process, are thought to occur in AGB stars and supernovae, respectively. We have previously reported that mainstream SiC grains have strong enrichments in the s-process isotopes of Sr, Zr and Mo. We report here the first measurements of Mo isotopes in X-type SiC grains, which have previously been identified as having formed from supernova ejecta.

The Electrostatic Analyzer (ESA) measured the intensity of charged particles returning to the BEAR payload during flight on 13 July 1989. These particles form part or all of the current that returns to the payload to neutralize the charge ejected with the beam. By measuring the return flux with high time resolution, we can study the physics of charging processes. When the neutralizer was off, the payload emitted 10 mA negative and charged to several hundred volts with a maximum of{approximately}800V. With the neutralizer on (normal configuration) the payload emitted {approximately} 1mA negative and received electrons with energies up to a few hundred volts in some attitudes. This suggests charging to a few hundred volts. The charging rate of the payload is consistent with the rocket body capacitance with respect to a vacuum. 1 ref., 14 figs.

Hydrolytic degradation has been shown to be a significant problem for poly(ester urethane) elastomers exposed to high humidity environments. The ester group in the soft segment is particularly susceptible to hydrolysis. One of the products of this reaction is a carboxylic acid group that catalyses further hydrolysis. The resulting reduction in molecular weight leads to deterioration of the elastomer's mechanical properties. In this paper we have measured the extent of the hydrolysis reaction by {sup 13}C NMR spectroscopy. In addition we have measured the spin-spin relaxation time of the soft phase and followed the increase in mobility of these segments. Both measurements were performed on the solid polymer. These measurements provide an excellent monitoring tool of the chemical and physical state of polymer during the aging process.

An a posteriori error analysis of the spatial approximation is developed for the one-dimensional Arbitrarily High Order Transport-Nodal method. The error estimator preserves the order of convergence of the method when the mesh size tends to zero with respect to the L{sup 2} norm. It is based on the difference between two discrete solutions that are available from the analysis. The proposed estimator is decomposed into error indicators to allow the quantification of local errors. Some test problems with isotropic scattering are solved to compare the behavior of the true error to that of the estimated error.

The presence of damage in the form of microcracks can increase the permeability of salt. In this paper, an analytical formulation of the permeability of damaged rock salt is presented for both initially intact and porous conditions. The analysis shows that permeability is related to the connected (i.e., gas accessible) volumetric strain and porosity according to two different power-laws, which may be summed to give the overall behavior of a porous salt with damage. This relationship was incorporated into a constitutive model, known as the Multimechanism Deformation Coupled Fracture (MDCF) model, which has been formulated to describe the inelastic flow behavior of rock salt due to coupled creep, damage, and healing. The extended model was used to calculate the permeability of rock salt from the Waste Isolation Pilot Plant (WIPP) site under conditions where damage evolved with stress over a time period. Permeability changes resulting from both damage development under deviatoric stresses and damage healing under hydrostatic pressures were considered. The calculated results were compared against experimental data from the literature, which indicated that permeability in damaged intact WIPP salt depends on the magnitude of the gas accessible volumetric strain and not on the total volumetric strain. Consequently, the permeability …

The authors have demonstrated a functional Pnp heterojunction bipolar transistor (HBT) using InGaAsN. The metalorganic vapor phase epitaxy (MOCVD) grown Al{sub 0.3}Ga{sub 0.7}As/In{sub 0.03}Ga{sub 0.97}As{sub 0.99}N{sub 0.01} HBT takes advantage of the narrower bandgap energy (E{sub g} = 1.25eV) of In{sub 0.03}Ga{sub 0.97}As{sub 0.99}N{sub 0.01}, which is lattice matched to GaAs. Compared with the Al{sub 0.3}Ga{sub 0.7}As/GaAs material system, the Al{sub 0.3}Ga{sub 0.7}As/In{sub 0.03}Ga{sub 0.97}As{sub 0.99}N{sub 0.01} material system has a larger conduction band offset, while the valence band offset remains comparable. This characteristic band alignment is very suitable for Pnp HBT applications. The device's peak current gain is 23 and it has a turn on voltage of 0.77V, which is 0.25V lower than in a comparable Pnp Al{sub 0.3}Ga{sub 0.7}As/GaAs HBT.

Heating of nuclear matter with 8 GeV/c {bar p} and {pi}{sup {minus}} beams has been investigated in an experiment conducted at BNL AGS accelerator. All charged particles from protons to Z {approx_equal} 16 were detected using the Indiana Silicon Sphere 4{pi} array. Significant enhancement of energy deposition in high multiplicity events is observed for antiprotons compared to other hadron beams. The experimental trends are qualitatively consistent with predictions from an intranuclear cascade code.

This contribution stresses results recently obtained from experiment E900 performed at the Brookhaven AGS accelerator with 8 GeV/c antiproton and negative pion beams using the Indiana Silicon Sphere detector array. An investigation of the reaction mechanism is presented, along with source characteristics deduced from a two-component fit to the spectra. An enhancement of deposition energy with the antiproton beam with respect to the pion beam is observed. The results are qualitatively consistent with predictions of an intranuclear cascade code.

Multifragmentation studies induced by GeV light-ion beams permit investigation of the influence of intrinsic thermal properties of hot nuclear matter, with minimal interference from the compression/decompression cycle and rotational instabilities. We summarize recent results obtained with {sup 3}He, proton and pion beams up to 15 GeV/c and present the initial results from a recent experiment with 8 GeV/c antiproton and pion beams. The results are compared with INC simulations coupled to EES and SMM models and the caloric curve for the {sup 3}He data will also be discussed.

We consider logic device concepts based on our previously proposed spintronics device element whose magnetization orientation is controlled by application of a bias voltage instead of a magnetic field. The basic building block is the voltage-controlled rotation (VCR) element that consists of a four-layer structure--two ferromagnetic layers separated by both nanometer-thick insulator and metallic spacer layers. The interlayer exchange coupling between the two ferromagnetic layers oscillates as a function of applied voltage. We illustrate transistor-like concepts and re-programmable logic gates based on VCR elements.

Exponential-13,6 (EXP-13,6) potential pammeters for 750 gases composed of 48 elements were determined and assembled in a database, referred to as the JCZS database, for use with the Jacobs Cowperthwaite Zwisler equation of state (JCZ3-EOS)~l) The EXP- 13,6 force constants were obtained by using literature values of Lennard-Jones (LJ) potential functions, by using corresponding states (CS) theory, by matching pure liquid shock Hugoniot data, and by using molecular volume to determine the approach radii with the well depth estimated from high-pressure isen- tropes. The JCZS database was used to accurately predict detonation velocity, pressure, and temperature for 50 dif- 3 Accurate predictions were also ferent explosives with initial densities ranging from 0.25 glcm3 to 1.97 g/cm . obtained for pure liquid shock Hugoniots, static properties of nitrogen, and gas detonations at high initial pressures.

ULSI technology requires low resistance, stable silicides formed on small geometry lines. Titanium disilicide (TiSiz), which is the most widely used silicide for ULSI applications, exists in two crystallographic phases: the high resistance, metastable C49 phase and the low resistance, stable C54 phase. The major issue with TiSiz is the increasing thermal budget required to transform the C49 phase into the low resistance C54 phase as linewiths decrease below 0.25 pm. Annealing above 900"C to obtain this transformation often results in thermal degradation, so it is desirable to reduce the transformation temperature. The transformation temperature has been shown to be a fi.mction of many factors including microstructure, grain size, and impurities. In this paper we report an investig+ion of rapid thermal silicidation of titanium films (250, 400, and 600 A) on single crystalline silicon at temperatures from 300 to 1000"C. The ramp rates for these experiments are 5, 30, 70, and 200oC/s. The transformation temperature decreases as the ramp rate increases and as the initial film thickness increases. Scanning electron microscopy (SEM) is used to analyze the resultant film microstructure. The ramp rate influence on Ti silicidation is also investigated on polycrystalline Si lines with widths ranging from 0.27 to …

In this paper the author first sketches the calculation of the pressure of a neutral, ion-electron gas as an expansion in powers of the electron charge, e, by means of the Matsubara, finite-temperature, many-body, perturbation theory. He then goes on to derive the Debye-H{umlt u} term and other equations to support his contentions. His results support but do not prove the existence of a phase transition.

Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement. Keywords: Smoothing films, multilayer coatings, finish of mirror substrates

There are approximately 100 metric tons of residues at the Rocky Flats Environmental Technology Site containing approximately 3 metric tons of plutonium. The residues are byproducts of past plutonium operations incinerator ash; pyrochemical salts; graphite; sand, slag, and crucible; and miscellaneous forms of combustibles, glass, metal, and sludges. In September 1993, a report was released (Reference 1) which identified concerns with the chemical stability of the residues and with the integrity of packaging. In May 1997, the Defense Nuclear Facility Safety Board published recommendation 94-1 citing a concern for the residue stability and requiring that the possibly unstable residues be processed within 3 years and all others within 5 years. A risk categorization scheme was developed which assigned a numerical risk to each residue type based on the probability and consequence of occurrence of failures associated with the hazards identified. The residues were ranked for priority of stabilization actions. Urgent concerns were resolved. All residue drums were vented to eliminate the potential for hydrogen and other explosive gas accumulation. Leaded rubber gloves and ion exchange resins were washed to eliminate the explosion potential. An aggressive characterization program was implemented to search for any additional safety or environmental concerns and to …

The radioisotope {sup 252}Cf is routinely encapsulated into compact, portable, intense neutron sources with a 2.6-year half-life. A source the size of a person's little finger can emit up to 10{sup 11} neutrons/s. Californium-252 is used commercially as a reliable, cost-effective neutron source for prompt gamma neutron activation analysis (PGNAA) of coal, cement, and minerals, as well as for detection and identification of explosives, laud mines, and unexploded military ordnance. Other uses are neutron radiography, nuclear waste assays, reactor start-up sources, calibration standards, and cancer therapy. The inherent safety of source encapsulations is demonstrated by 30 years of experience and by U.S. Bureau of Mines tests of source survivability during explosions. The production and distribution center for the U. S Department of Energy (DOE) Californium Program is the Radiochemical Engineering Development Center (REDC) at Oak Ridge National Laboratory (ORNL). DOE sells The radioisotope {sup 252}Cf is routinely encapsulated into compact, portable, intense neutron sources with a 2.6- year half-life. A source the size of a person's little finger can emit up to 10 neutrons/s. Californium-252 is used commercially as a reliable, cost-effective neutron source for prompt gamma neutron activation analysis (PGNAA) of coal, cement, and minerals, as well as for …

We review the derivation of moment equations which include the effects of space charge and dispersion in bends first presented in ref [1]. These equations generalize the familiar envelope equations to include the dispersive effects of bends. We review the application of these equations to the calculation of the change in emittance resulting from a sharp transition from a straight section to a bend section, using an energy conservation constraint. Comparisons of detailed 2D and 3D simulations of intense beams in rings using the WARP code (refs [2,3]) are made with results obtained from the moment equations. We also compare the analysis carried out in ref [1], to more recent analyses, refs [4,5]. We further examine self-consistent distributions of beams in bends and discuss the relevance of these distributions to the moment equation formulation.