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Low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry
This article discusses low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry.
Date:
June 8, 1998
Creator:
McDaniel, Floyd Del. (Floyd Delbert), 1942-; Datar, Sameer A.; Guo, Baonian N.; Renfrow, Steve N.; Anthony, J. M. & Zhao, Z. Y.
System:
The UNT Digital Library