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Fabrication of wide-IF 200–300GHz superconductor–insulator–superconductor mixers with suspended metal beam leads formed on silicon-on-insulator
This article reports on a fabrication process that uses silicon-oninsulator (SOI) substrates and micromachining techniques to form wide-IF superconductor–insulator–superconductor (SIS) mixer devices that have suspended metal beam leads for rf grounding. Aside from a description of the fabrication process, electrical measurements of these Nb/Al–AlNₓ /Nb trilayer devices will also be presented.
Date:
October 7, 2004
Creator:
Kaul, Anupama; Bumble, Bruce; Lee, Karen A.; LeDuc, Henry G.; Rice, Frank & Zmuidzinas, Jonas
Object Type:
Article
System:
The UNT Digital Library
Method for Generating Numerical Values Indicative of Frequencies of Selected Features in Objects, and a Computer System Implementing the Method
Patent relating to methods for generating numerical values indicative of frequencies of selected features in objects, and a computer system implementing the method.
Date:
November 21, 2001
Creator:
Rorvig, Mark E. & Jeong, Kitai
Object Type:
Patent
System:
The UNT Digital Library