Rapid isothermal anneal of 75As implanted silicon (open access)

Rapid isothermal anneal of 75As implanted silicon

Article discussing a study of the rapid isothermal anneal of 75As implanted silicon.
Date: September 1, 1982
Creator: Wilson, Scott R.; Gregory, R. B.; Paulson, W. M.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
System: The UNT Digital Library