Degree Department

States

Apparatus and Method for Implementation of Elements, Species and Compositions in Nanostructured Materials (open access)

Apparatus and Method for Implementation of Elements, Species and Compositions in Nanostructured Materials

Patent relating to an apparatus and method for implantation of elements, species and compositions in nanostructured materials.
Date: December 16, 2004
Creator: Imholt, Timothy
Object Type: Patent
System: The UNT Digital Library
Rapid isothermal anneal of 75As implanted silicon (open access)

Rapid isothermal anneal of 75As implanted silicon

Article discussing a study of the rapid isothermal anneal of 75As implanted silicon.
Date: September 1, 1982
Creator: Wilson, Scott R.; Gregory, R. B.; Paulson, W. M.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
Object Type: Article
System: The UNT Digital Library