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Quantitative evaluation of mask phase defects from through-focus EUV aerial images
Mask defects inspection and imaging is one of the most important issues for any pattern transfer lithography technology. This is especially true for EUV lithography where the wavelength-specific properties of masks and defects necessitate actinic inspection for a faithful prediction of defect printability and repair performance. In this paper we will present a technique to obtain a quantitative characterization of mask phase defects from EUV aerial images. We apply this technique to measure the aerial image phase of native defects on a blank mask, measured with the SEMATECH Berkeley Actinic Inspection Tool (AIT) an EUV zoneplate microscope that operates at Lawrence Berkeley National Laboratory. The measured phase is compared with predictions made from AFM top-surface measurements of those defects. While amplitude defects are usually easy to recognize and quantify with standard inspection techniques like scanning electron microscopy (SEM), defects or structures that have a phase component can be much more challenging to inspect. A phase defect can originate from the substrate or from any level of the multilayer. In both cases its effect on the reflected field is not directly related to the local topography of the mask surface, but depends on the deformation of the multilayer structure. Using the …
Date:
February 21, 2011
Creator:
Mochi, Iacopo; Yamazoe, Kenji; Neureuther, Andrew & Goldberg, Kenneth A.
Object Type:
Article
System:
The UNT Digital Library
The Ranger (San Antonio, Tex.), Vol. 85, No. 14, Ed. 1 Monday, February 21, 2011
Weekly student newspaper from San Antonio College in San Antonio, Texas that includes campus news along with advertising.
Date:
February 21, 2011
Creator:
San Antonio College
Object Type:
Newspaper
System:
The Portal to Texas History
Selection of Ionic Liquid Solvents for Chemical Separations Based on the Abraham Model
Book chapter on the selection of ionic liquid solvents for chemical separations based on the Abraham model.
Date:
February 21, 2011
Creator:
Acree, William E. (William Eugene); Grubbs, Laura M. & Abraham, M. H. (Michael H.)
Object Type:
Book Chapter
System:
The UNT Digital Library
Senior Recital: 2011-02-21 - Austin Byrd, piano and Ian Tucker, bass
Access:
Use of this item is restricted to the UNT Community
Recital presented at the UNT College of Music Kenton Hall in partial fulfillment of the Bachelor of Music (BM) degree.
Date:
February 21, 2011
Creator:
Byrd, Austin & Tucker, Ian
Object Type:
Sound
System:
The UNT Digital Library
Simplified models for mask roughness induced LER
The ITRS requires < 1.2nm line-edge roughness (LER) for the 22nm half-pitch node. Currently, we can consistently achieve only about 3nm LER. Further progress requires understanding the principle causes of LER. Much work has already been done on how both the resist and LER on the mask effect the final printed LER. What is poorly understood, however, is the extent to which system-level effects such as mask surface roughness, illumination conditions, and defocus couple to speckle at the image plane, and factor into LER limits. Presently, mask-roughness induced LER is studied via full 2D aerial image modeling and subsequent analysis of the resulting image. This method is time consuming and cumbersome. It is, therefore, the goal of this research to develop a useful 'rule-of-thumb' analytic model for mask roughness induced LER to expedite learning and understanding.
Date:
February 21, 2011
Creator:
McClinton, Brittany & Naulleau, Patrick
Object Type:
Article
System:
The UNT Digital Library
Single actomyosin motor interactions in skeletal muscle
This article presents a study of intramuscular motion during contraction of skeletal muscle myofibrils.
Date:
February 21, 2011
Creator:
Földes-Papp, Zeno; Liao, Jeff Shih-Chu; Barbieri, Ben; Grycznski, Karol G.; Luchowski, Rafal; Gryczynski, Ignacy et al.
Object Type:
Article
System:
The UNT Digital Library
Sweetwater Reporter (Sweetwater, Tex.), Vol. 113, No. 085, Ed. 1 Monday, February 21, 2011
Daily newspaper from Sweetwater, Texas that includes local, state, and national news along with advertising.
Date:
February 21, 2011
Creator:
unknown
Object Type:
Newspaper
System:
The Portal to Texas History
Tests of Radiation-Hard Silicon Microstrip Sensors for CMS in S-LHC
The tests are to study the performance of various silicon microstrip sensors that are sufficiently radiation-hard to be considered as candidates for the CMS outer (R > 25cm) tracker in the second phase of the currently envisioned S-LHC upgrade. The main goal of the beam test is to test Float Zone (FZ) and Magnetic Czochralski (MCz) silicon sensors that have been procured from Hamamatsu by the CMS collaboration as possible replacements for the CMS outer tracker for phase 2 operations. The detectors under test (DUT) will be isntalled in a cold box that contains 10 slots for modules based on CMS Tracker hybrids. Slots 1-4 and 7-10 are occupied by reference planes and slots 5 and 6 are reserved for DUTs. The box is cooled by Peltier elements in thermal contact with the top and bottom aluminum baseplates and is typically operated at around -25 C. A PCI based version of the CMS DAQ is used to read out the 10 slots based on triggers provided by beam scintillation counters. Given the low rate of beam particles the hybrid APVs will be operated in Peak mode, which maximizes the signal-to-noise performance of the readout chips. The internal clock operates at …
Date:
February 21, 2011
Creator:
Luukka, Panja; Maenpaa, Teppo; Tuovinen, Esa; Spiegel, Lenny & Flight, Robert
Object Type:
Report
System:
The UNT Digital Library
Analysis and Mitigation of X-Ray Hazard Generated From High Intensity Laser-Target Interactions
Interaction of a high intensity laser with matter may generate an ionizing radiation hazard. Very limited studies have been made, however, on the laser-induced radiation protection issue. This work reviews available literature on the physics and characteristics of laser-induced X-ray hazards. Important aspects include the laser-to-electron energy conversion efficiency, electron angular distribution, electron energy spectrum and effective temperature, and bremsstrahlung production of X-rays in the target. The possible X-ray dose rates for several femtosecond Ti:sapphire laser systems used at SLAC, including the short pulse laser system for the Matter in Extreme Conditions Instrument (peak power 4 TW and peak intensity 2.4 x 10{sup 18} W/cm{sup 2}) were analysed. A graded approach to mitigate the laser-induced X-ray hazard with a combination of engineered and administrative controls is also proposed.
Date:
March 21, 2011
Creator:
Qiu, R.; Liu, J. C.; Prinz, A. A.; Rokni, S. H.; Woods, M. & Xia, Z.
Object Type:
Article
System:
The UNT Digital Library
Ancient nature of alternative splicing and functions of introns
Using four genomes: Chamydomonas reinhardtii, Agaricus bisporus, Aspergillus carbonarius, and Sporotricum thermophile with EST coverage of 2.9x, 8.9x, 29.5x, and 46.3x respectively, we identified 11 alternative splicing (AS) types that were dominated by intron retention (RI; biased toward short introns) and found 15, 35, 52, and 63percent AS of multiexon genes respectively. Genes with AS were more ancient, and number of AS correlated with number of exons, expression level, and maximum intron length of the gene. Introns with tendency to be retained had either stop codons or length of 3n+1 or 3n+2 presumably triggering nonsense-mediated mRNA decay (NMD), but introns retained in major isoforms (0.2-6percent of all introns) were biased toward 3n length and stop codon free. Stopless introns were biased toward phase 0, but 3n introns favored phase 1 that introduced more flexible and hydrophilic amino acids on both ends of introns which would be less disruptive to protein structure. We proposed a model in which minor RI intron could evolve into major RI that could facilitate intron loss through exonization.
Date:
March 21, 2011
Creator:
Zhou, Kemin; Salamov, Asaf; Kuo, Alan; Aerts, Andrea & Grigoriev, Igor
Object Type:
Article
System:
The UNT Digital Library
Annual Report of Groundwater Monitoring at Everest, Kansas, in 2010.
The Commodity Credit Corporation of the U.S. Department of Agriculture (CCC/USDA) began its environmental investigations at Everest, Kansas, in 2000. The work at Everest is implemented on behalf of the CCC/USDA by Argonne National Laboratory, under the oversight of the Kansas Department of Health and Environment (KDHE). The results of the environmental investigations have been reported in detail (Argonne 2001, 2003, 2006a,b). The lateral extent of the carbon tetrachloride in groundwater over the years of investigation has been interpreted as shown in Figure 1.1 (2001-2002 data), Figure 1.2 (2006 data), Figure 1.3 (2008 data), and Figure 1.4 (2009 data). The pattern of groundwater flow and inferred contaminant migration has consistently been to the north-northwest from the former CCC/USDA facility toward the Nigh property, and then west-southwest from the Nigh property (e.g., Figure 1.5 [2008 data] and Figure 1.6 [2009 data]). Both the monitoring data for carbon tetrachloride and the low groundwater flow rates estimated for the Everest aquifer unit (Argonne 2003, 2006a,b, 2008) indicate slow contaminant migration. On the basis of the accumulated findings, in March 2009 the CCC/USDA developed a plan for annual monitoring of the groundwater and surface water. This current monitoring plan (Appendix A in the report …
Date:
March 21, 2011
Creator:
Lafreniere, L. M.
Object Type:
Report
System:
The UNT Digital Library
Bahrain: Reform, Security, and U.S. Policy
This report discusses the current state of Bahrain, which has undergone substantial political reforms since the late 1990s, but which still suffers from tension between the Shiite majority and the Sunni-led government. This report focuses particularly on Bahrain's relationship with the United States and with regional issues.
Date:
March 21, 2011
Creator:
Katzman, Kenneth
Object Type:
Report
System:
The UNT Digital Library
Clouds and Chemistry in the Atmosphere of Extrasolar Planet HR8799b
Using the integral field spectrograph OSIRIS, on the Keck II telescope, broad near-infrared H and K-band spectra of the young exoplanet HR8799b have been obtained. In addition, six new narrow-band photometric measurements have been taken across the H and K bands. These data are combined with previously published photometry for an analysis of the planet's atmospheric properties. Thick photospheric dust cloud opacity is invoked to explain the planet's red near-IR colors and relatively smooth near-IR spectrum. Strong water absorption is detected, indicating a Hydrogen-rich atmosphere. Only weak CH{sub 4} absorption is detected at K band, indicating efficient vertical mixing and a disequilibrium CO/CH{sub 4} ratio at photospheric depths. The H-band spectrum has a distinct triangular shape consistent with low surface gravity. New giant planet atmosphere models are compared to these data with best fitting bulk parameters, T{sub eff} = 1100K {+-} 100 and log(g) = 3.5 {+-} 0.5 (for solar composition). Given the observed luminosity (log L{sub obs}/L{sub {circle_dot}} {approx} -5.1), these values correspond to a radius of 0.75 R{sub Jup{sub 0.12}{sup +0.17}} and mass {approx} 0.72 M{sub Jup{sub -0.6}{sup +2.6}} - strikingly inconsistent with interior/evolution models. Enhanced metallicity (up to {approx} 10 x that of the Sun) along with …
Date:
March 21, 2011
Creator:
Barman, T. S.; Macintosh, B. A.; Konopacky, Q. M. & Marois, C.
Object Type:
Article
System:
The UNT Digital Library
Commerce, Justice, Science, and Related Agencies: FY2011 Appropriations
This report provides an overview of actions taken by Congress to provide FY2011 appropriations for Commerce, Justice, Science, and Related Agencies (CJS). It also provides an overview of FY2010 appropriations for agencies and bureaus funded under the CJS bill.
Date:
March 21, 2011
Creator:
James, Nathan; Gonzales, Oscar R. & Williams, Jennifer D.
Object Type:
Report
System:
The UNT Digital Library
DART brings new life to historic maintenance building
News release about the conversion of the Monroe Shops building into the new headquarters for the DART Police department.
Date:
March 21, 2011
Creator:
Lyons, Morgan & Ball, Mark
Object Type:
Text
System:
The Portal to Texas History
Density Gradient Stabilization of Electron Temperature Gradient Driven Turbulence in a Spherical Tokamak
In this letter we report the first clear experimental observation of density gradient stabilization of electron temperature gradient driven turbulence in a fusion plasma. It is observed that longer wavelength modes, k⊥ρs ≤10, are most stabilized by density gradient, and the stabilization is accompanied by about a factor of two decrease in the plasma effective thermal diffusivity.
Date:
March 21, 2011
Creator:
Ren, Y.; Mazzucato, E.; Guttenfelder, W.; Bell, R. E.; Domier, C. W.; LeBlanc, B. P. et al.
Object Type:
Report
System:
The UNT Digital Library
Doctoral Recital: 2011-03-21 - Mike Morey, classical guitar
Recital presented at the UNT College of Music Recital Hall in partial fulfillment of the Doctor of Musical Arts (DMA) degree.
Date:
March 21, 2011
Creator:
Morey, Michael J.
Object Type:
Sound
System:
The UNT Digital Library
DUK - A Fast and Efficient Kmer Based Sequence Matching Tool
A new tool, DUK, is developed to perform matching task. Matching is to find whether a query sequence partially or totally matches given reference sequences or not. Matching is similar to alignment. Indeed many traditional analysis tasks like contaminant removal use alignment tools. But for matching, there is no need to know which bases of a query sequence matches which position of a reference sequence, it only need know whether there exists a match or not. This subtle difference can make matching task much faster than alignment. DUK is accurate, versatile, fast, and has efficient memory usage. It uses Kmer hashing method to index reference sequences and Poisson model to calculate p-value. DUK is carefully implemented in C++ in object oriented design. The resulted classes can also be used to develop other tools quickly. DUK have been widely used in JGI for a wide range of applications such as contaminant removal, organelle genome separation, and assembly refinement. Many real applications and simulated dataset demonstrate its power.
Date:
March 21, 2011
Creator:
Li, Mingkun; Copeland, Alex & Han, James
Object Type:
Article
System:
The UNT Digital Library
The Endangered Species Act (ESA) in the 112th Congress: Conflicting Values and Difficult Choices
None
Date:
March 21, 2011
Creator:
Buck, Eugene H.; Corn, M. Lynne; Alexander, Kristina; Sheikh, Pervaze A. & Meltz, Robert
Object Type:
Report
System:
The UNT Digital Library
Energy and Water Development: FY2011 Appropriations
This report covers key budgetary issues involving the Energy and Water Development appropriations bill, which provides funding for civil works projects of the Army Corps of Engineers (Corps), the Department of the Interior’s Bureau of Reclamation, the Department of Energy (DOE), and a number of independent agencies.
Date:
March 21, 2011
Creator:
Behrens, Carl E.
Object Type:
Report
System:
The UNT Digital Library
EPA Regulations: Too Much, Too Little, or On Track?
This report provides background information on recent Environmental Protection Agency (EPA) rulemaking to help address dissenting concerns from critics and the EPA. It examines 43 major or controversial regulatory actions taken by or under development at EPA since January 2009. The report also discusses factors that affect the timeframe in which regulations take effect.
Date:
March 21, 2011
Creator:
McCarthy, James E. & Copeland, Claudia
Object Type:
Report
System:
The UNT Digital Library
The Express-Star (Chickasha, Okla.), Ed. 1 Monday, March 21, 2011
Daily newspaper from Chickasha, Oklahoma that includes local, state, and national news along with advertising.
Date:
March 21, 2011
Creator:
DeSilver, Debi
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
Federal Register, Volume 76, Number 54, March 21, 2011, Pages 15209-15790
Daily publication of the U.S. Office of the Federal Register contains rules and regulations, proposed legislation and rule changes, and other notices, including "Presidential proclamations and Executive Orders, Federal agency documents having general applicability and legal effect, documents required to be published by act of Congress, and other Federal agency documents of public interest" (p. ii). Table of Contents starts on page iii.
Date:
March 21, 2011
Creator:
United States. Office of the Federal Register.
Object Type:
Journal/Magazine/Newsletter
System:
The UNT Digital Library
Federal Rulemaking: The Role of the Office of Information and Regulatory Affairs
This report discusses the the Paperwork Reduction Act of 1980. It also discusses possible legislative issues involving OIRA.
Date:
March 21, 2011
Creator:
Copeland, Curtis W.
Object Type:
Report
System:
The UNT Digital Library