We describe the imaging and characterization of native defects on a full field extreme ultraviolet (EUV) mask, using several reticle and wafer inspection modes. Mask defect images recorded with the SEMA TECH Berkeley Actinic Inspection Tool (AIT), an EUV-wavelength (13.4 nm) actinic microscope, are compared with mask and printed-wafer images collected with scanning electron microscopy (SEM) and deep ultraviolet (DUV) inspection tools. We observed that defects that appear to be opaque in the SEM can be highly transparent to EUV light, and inversely, defects that are mostly transparent to the SEM can be highly opaque to EUV. The nature and composition of these defects, whether they appear on the top surface, within the multilayer coating, or on the substrate as buried bumps or pits, influences both their significance when printed, and their detectability with the available techniques. Actinic inspection quantitatively predicts the characteristics of printed defect images in ways that may not be possible with non-EUV techniques. As a quantitative example, we investigate the main structural characteristics of a buried pit defect based on EUV through-focus imaging.

Aerosol indirect effects continue to constitute one of the most important uncertainties for anthropogenic climate perturbations. Within the international AEROCOM initiative, the representation of aerosol-cloud-radiation interactions in ten different general circulation models (GCMs) is evaluated using three satellite datasets. The focus is on stratiform liquid water clouds since most GCMs do not include ice nucleation effects, and none of the model explicitly parameterises aerosol effects on convective clouds. We compute statistical relationships between aerosol optical depth ({tau}{sub a}) and various cloud and radiation quantities in a manner that is consistent between the models and the satellite data. It is found that the model-simulated influence of aerosols on cloud droplet number concentration (N{sub d}) compares relatively well to the satellite data at least over the ocean. The relationship between {tau}{sub a} and liquid water path is simulated much too strongly by the models. This suggests that the implementation of the second aerosol indirect effect mainly in terms of an autoconversion parameterisation has to be revisited in the GCMs. A positive relationship between total cloud fraction (f{sub cld}) and {tau}{sub a} as found in the satellite data is simulated by the majority of the models, albeit less strongly than that in the …

This report discusses issues for Congress in FY2011, which are whether to approve, reject, or modify DOD's new KC-X competition strategy, and whether to approve, reject, or modify the Air Force's request for FY2011 research and development funding for the new KC-X program.

This report is about Calculation of lifecycle greenhouse gas emissions for the renewable Fuel Standards

The impact of carbon contamination on extreme ultraviolet (EUV) masks is significant due to throughput loss and potential effects on imaging performance. Current carbon contamination research primarily focuses on the lifetime of the multilayer surfaces, determined by reflectivity loss and reduced throughput in EUV exposure tools. However, contamination on patterned EUV masks can cause additional effects on absorbing features and the printed images, as well as impacting the efficiency of cleaning process. In this work, several different techniques were used to determine possible contamination topography. Lithographic simulations were also performed and the results compared with the experimental data.

This report examines earthquake catastrophe risk and insurance in the United States in light of recent developments, particularly the devastating earthquakes in Haiti and Chile. It examines both traditional and non-traditional approaches for financing recovery from earthquake losses as well as challenges in financing catastrophe losses with insurance.

This report evaluates questions regarding whether the current deficit is manageable and what effects it will have on the economy.

A letter report issued by the Government Accountability Office with an abstract that begins "The Federal Funding Accountability and Transparency Act of 2006 (FFATA) is intended to increase the transparency of and accountability for the over $1 trillion that federal agencies award each year in contracts, loans, grants, and other awards. Among other things, the act required the Office of Management and Budget (OMB) to establish, no later than January 1, 2008, a publicly accessible Web site containing data on federal awards. The act also authorized OMB to issue guidance to federal agencies on reporting award data and instructs agencies to comply with that guidance. OMB launched the site (www.USAspending.gov) in December 2007. GAO's objectives were to determine the extent to which (1) OMB is complying with FFATA requirements to make federal award data available, (2) federal agencies are reporting required award data, and (3) inconsistencies exist between data on the Web site and records at federal agencies. To do this, GAO reviewed FFATA requirements and OMB guidance, interviewed OMB and agency officials, and examined a sample of awards reported to OMB."

In this study, multilayer morphology near the key anomalies in grating-like structures, namely sharp step-edges and steep walls, are examined. Different deposition schemes are employed. Based on cross section TEM analysis an explanatory model describing the morphology of the successive layers is developed. A further insight into the periodicity and the general performance of the multilayer is obtained by EUV microscopy. The main distortions in multilayer structure and hence EUV performance are found to be restricted to a region within a few hundred nanometers from the anomalies, which is very small compared to the proposed grating period (50-100 {micro}m). These multilayer coated blazed gratings can thus be considered a viable option for spectral purity enhancement of EUV light sources.

Daily publication of the U.S. Office of the Federal Register contains rules and regulations, proposed legislation and rule changes, and other notices, including "Presidential proclamations and Executive Orders, Federal agency documents having general applicability and legal effect, documents required to be published by act of Congress, and other Federal agency documents of public interest" (p. ii). Table of Contents starts on page iii.

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This report summarizes U.S. assistance to the Democratic People's Republic of North Korea (DPRK, also known as North Korea). It will be updated periodically to track changes in U.S. provision of aid to North Korea.

This report summarizes U.S. energy, food and medical assistance to the Democratic People's Republic of North Korea (DPRK, also known as North Korea).

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A letter report issued by the Government Accountability Office with an abstract that begins "The increase in security incidents and continuing weakness in security controls on information technology systems at federal agencies highlight the continuing need for improved information security. To standardize and strengthen agencies' security, the Office of Management and Budget (OMB), in collaboration with the National Institute of Standards and Technology (NIST), launched the Federal Desktop Core Configuration (FDCC) initiative in 2007. GAO was asked to (1) identify the goals, objectives, and requirements of the initiative; (2) determine the status of actions federal agencies have taken, or plan to take, to implement the initiative; and (3) identify the benefits, challenges, and lessons learned in implementing this initiative. To accomplish this, GAO reviewed policies, plans, and other documents at the 24 major executive branch agencies; reviewed OMB and NIST guidance and documentation; and interviewed officials."

A letter report issued by the Government Accountability Office with an abstract that begins "To reduce the threat to federal systems and operations posed by cyber attacks on the United States, the Office of Management and Budget (OMB) launched, in November 2007, the Trusted Internet Connections (TIC) initiative, and later, in 2008, the Department of Homeland Security's (DHS) National Cybersecurity Protection System (NCPS), operationally known as Einstein, became mandatory for federal agencies as part of TIC. For each of these initiatives, GAO was asked to (1) identify their goals, objectives, and requirements; (2) determine the status of actions federal agencies have taken, or plan to take, to implement the initiatives; and (3) identify any benefits, challenges, and lessons learned. To do this, GAO reviewed plans, reports, and other documents at 23 major executive branch agencies, interviewed officials, and reviewed OMB and DHS guidance."

This report focuses on the United States' relationship with Iran and how the Obama Administration is handling prior administration's economic sanctions against Iran. The Obama Administration's policy approach toward Iran has contrasted with the Bush Administration's by attempting to couple the imposition of sanctions to an active and direct U.S. effort to negotiate with Iran on the nuclear issue.

This issue has the following articles: (1) Optimizing Electron-Positron Pair Production on kJ-Class High-Intensity Lasers for the Purpose of Pair-Plasma Creation; (2) Neutron Yield Study of Direct-Drive, Low-Adiabat Cryogenic D2 Implosions on OMEGA; (3) Al 1s-2p Absorption Spectroscopy of Shock-Wave Heating and Compression in Laser-Driven Planar Foil; (4) A Measurable Lawson Criterion and Hydro-Equivalent Curves for Inertial Confinement Fusion; (5) Pulsed-THz Characterization of Hg-Based, High-Temperature Superconductors; (6) LLE's Summer High School Research Program; (7) FY08 Laser Facility Report; and (8) National Laser Users Facility and External Users Programs.

This report lays out generic scenarios for balancing the budget in the next fiscal year. Although these are not policy options that are likely to be enacted, they are meant to offer simple examples to gauge the scope of tradeoffs that would be required if policymakers eventually decide to bring the budget back to balance. If changes are postponed or stretched over a longer time period, they would need to be larger because of higher debt service.

Much work has already been done on how both the resist and line-edge roughness (LER) on the mask affect the final printed LER. What is poorly understood, however, is the extent to which system-level effects such as mask surface roughness, illumination conditions, and defocus couple to speckle at the image plane, and currently factor into LER limits. Here, we propose a 'rule-of-thumb' simplified solution that provides a fast and powerful method to obtain mask roughness induced LER. We present modeling data on an older generation mask with a roughness of 230 pm as well as the ultimate target roughness of 50 pm. Moreover, we consider feature sizes of 50 nm and 22 nm, and show that as a function of correlation length, the LER peaks at the condition that the correlation length is approximately equal to the resolution of the imaging optic.

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This report provides an overview of the nanotechnology that is believed by many to offer extraordinary economic and societal benefits and two others: nanomanufacturing and public understanding of and attitudes toward nanotechnology.

This report discusses various views on the issue of who bears the burden of the national debt, future generations or the generation that incurred it.

The particle removal efficiency (PRE) of cleaning processes diminishes whenever the minimum defect size for a specific technology node becomes smaller. For the sub-22 nm half-pitch (HP) node, it was demonstrated that exposure to high power megasonic up to 200 W/cm{sup 2} did not damage 60 nm wide TaBN absorber lines corresponding to the 16 nm HP node on wafer. An ammonium hydroxide mixture and megasonics removes {ge}50 nm SiO{sub 2} particles with a very high PRE, A sulfuric acid hydrogen peroxide mixture (SPM) in addition to ammonium hydroxide mixture (APM) and megasonic is required to remove {ge}28 nm SiO{sub 2} particles with a high PRE. Time-of-flight secondary ion mass spectroscopy (TOFSIMS) studies show that the presence of O{sub 2} during a vacuum ultraviolet (VUV) ({lambda} = 172 nm) surface conditioning step will result in both surface oxidation and Ru removal, which drastically reduce extreme ultraviolet (EUV) mask life time under multiple cleanings. New EUV mask cleaning processes show negligible or no EUV reflectivity loss and no increase in surface roughness after up to 15 cleaning cycles. Reviewing of defect with a high current density scanning electron microscope (SEM) drastically reduces PRE and deforms SiO{sub 2} particles. 28 nm SiO{sub …