Development of a Whole-Wafer, Macroscale Inspection Software Method for Semiconductor Wafer Analysis (open access)

Development of a Whole-Wafer, Macroscale Inspection Software Method for Semiconductor Wafer Analysis

This report describes the non CRADA-protected results of the project performed between Nova Measuring Systems, Ltd., and the Oak Ridge National Laboratory to test and prototype defect signature analysis method for potential incorporation into an in-situ wafer inspection microscope. ORNL's role in this activity was to collaborate with Nova on the analysis and software side of the effort, wile Nova's role was to build the physical microscope and provide data to ORNL for test and evaluation. The objective of this project was to adapt and integrate ORNL's SSA and ADC methods and technologies in the Nova imaging environment. ORNL accomplished this objective by modifying the existing SSA technology for use as a wide-area signature analyzer/classifier on the Nova macro inspection tool (whole-wafer analysis). During this effort ORNL also developed a strategy and methodology for integrating and presenting the results of SSA/ADC analysis to the tool operator and/or data management system (DMS) used by the semiconductor manufacturer (i.e., the end-user).
Date: May 22, 2003
Creator: Tobin, K.W.
Object Type: Report
System: The UNT Digital Library
Buildup of electron cloud with different bunch pattern in thepresence of solenoid field (open access)

Buildup of electron cloud with different bunch pattern in thepresence of solenoid field

We have augmented the code POSINST to include solenoidfields, and used it to simulate the build up of electron cloud due toelectron multipacting in the PEP-II positron ring. We find that thedistribution of electrons is strongly affected by the resonancesassociated with the cyclotron period and bunch spacing. In addition, wediscover a threshold beyond which the electron density growsexponentially until it reaches the space charge limit. The threshold doesnot depend on the bunch spacing but does depend on the positron bunchpopulation.
Date: May 1, 2003
Creator: Cai, Yunhai; Pivi, Mauro & Furman, Miguel
Object Type: Article
System: The UNT Digital Library
Microwave Treatment as a Pesticide Alternative for Stored-Products (open access)

Microwave Treatment as a Pesticide Alternative for Stored-Products

None
Date: May 21, 2003
Creator: Bigelow, T.; Forrester, S.; Halverson, S.; Halverson, B. & Phillips, T.
Object Type: Report
System: The UNT Digital Library
Real-Time Risk and Fault Management in the Mission Evaluation Room of the International Space Station (open access)

Real-Time Risk and Fault Management in the Mission Evaluation Room of the International Space Station

Effective anomaly resolution in the Mission Evaluation Room (MER) of the International Space Station (ISS) requires consideration of risk in the process of identifying faults and developing corrective actions. Risk models such as fault trees from the ISS Probablistic Risk Assessment (PRA) can be used to support anomaly resolution, but the functionality required goes significantly beyond what the PRA could provide. Methods and tools are needed that can systematically guide the identification of root causes for on-orbit anomalies, and to develop effective corrective actions that address the event and its consequences without undue risk to the crew or the mission. In addition, an overall information management framework is needed so that risk can be systematically incorporated in the process, and effectively communicated across all the disciplines and levels of management within the space station program. The commercial nuclear power industry developed such a decision making framework, known as the critical safety function approach, to guide emergency response following the accident at Three Mile Island in 1979. This report identifies new methods, tools, and decision processes that can be used to enhance anomaly resolution in the ISS Mission Evaluation Room. Current anomaly resolution processes were reviewed to identify requirements for effective …
Date: May 1, 2003
Creator: Nelson, William R. & Novack, Steven D.
Object Type: Report
System: The UNT Digital Library
New neutron cross section and fission yield data for SNManalysis (open access)

New neutron cross section and fission yield data for SNManalysis

Neutron cross-section data are fundamental for the design ofnuclear interrogation systems, the maintenance of nuclear materials andwaste, and the understanding the consequences of nuclear catastrophe.Although a large body of nuclear data exists, it is often old,unreliable, or poorly determined. For several years we have collaborated,as part of an IAEA Coordinated Research Project, to precisely measure thepartial thermal neutron gamma ray cross sections for all elements fromhydrogen to uranium at the Budapest Reactor. These data will replace theunreliable tables of Lone et al [1], still widely in use, and will bepublished as an IAEA TECDOC.
Date: May 28, 2003
Creator: Firestone, R. B.; Molnar, G. L.; Revay, Zs. & Belgya, T.
Object Type: Report
System: The UNT Digital Library
Semileptonic Decays and Sides of the Unitarity Triangle (open access)

Semileptonic Decays and Sides of the Unitarity Triangle

The elements of the CKM matrix enter the expressions for the decay rates and mixing amplitudes of hadrons. In some cases, the theoretical expressions are free of strong interaction effects, for example the CP asymmetry in B {yields} J/{psi} K{sub S}{sup 0}, so that measuring the CP asymmetry directly gives the value of sin 2{beta}, with the error in the result given by the experimental error in the measurement. In most cases, however, the experimentally measured quantities depend on strong interactions physics, and it is absolutely essential to have accurate model-free theoretical calculations to compare with experiment. A number of theoretical tools have been developed over the years which now allow us to compute B decays with great accuracy, sometimes at the level of a few percent or better. These calculations are done using effective theory methods applied to QCD, and do not rely on model assumptions. Inclusive decays can be treated using the operator product expansion (OPE). The total decay rate is given by twice the imaginary part of the forward scattering amplitude, using the optical theorem. In heavy hadron decays, the intermediate states in the forward scattering amplitude can be integrated out, so that the decay rate can …
Date: May 1, 2003
Creator: Ligeti, Zoltan; Bauer, C.; Bernard, C.; Bigi, I.; Datta, M.; del Re, D. et al.
Object Type: Article
System: The UNT Digital Library
Habitat Evaluation Procedures (HEP) Report, Pend Oreille Wetlands Wildlife I Project, Technical Report 2002. (open access)

Habitat Evaluation Procedures (HEP) Report, Pend Oreille Wetlands Wildlife I Project, Technical Report 2002.

In 2002, the Habitat Evaluation Procedure (HEP) was used to determine baseline habitat suitability on the Pend Oreille Wetlands Wildlife Project, an acquisition completed by the Kalispel Tribe of Indians in 1992. Evaluation species and appropriate models include bald eagle, black-capped chickadee, Canada goose, mallard, muskrat, and yellow warbler. Habitat Suitability Index (HSI) values were visually estimated and agreed upon by all HEP team members. The Pend Oreille Wetlands Wildlife Project provides a total of 936.76 Habitat Units (HUs) for the species evaluated. Open water habitat provides 71.92 HUs for Canada goose, mallard, and muskrat. Shoreline and island habitat provide 12.77 HUs fore Canada goose and mallard. Cattail hemi-marsh provides 308.42 HUs for Canada goose, mallard, and muskrat. Wet meadow provides 208.95 HUs for Canada goose and mallard. Scrub-shrub wetlands provide 14.43 HUs for yellow warbler, mallard, and white-tailed deer. Deciduous forested wetlands provide 148.62 HUs for bald eagle, black-capped chickadee, mallard, and white-tailed deer. Grassland meadow provides 3.38 HUs for Canada goose. Conifer forest provides 160.44 HUs for bald eagle, black-capped chickadee, and white-tailed deer. The objective of using HEP at the Pend Oreille Wetlands Wildlife Project and other protected properties is to document the quality and quantity of …
Date: May 1, 2003
Creator: Holmes, Darren
Object Type: Report
System: The UNT Digital Library
A second beam-diagnostic beamline for the advanced lightsource (open access)

A second beam-diagnostic beamline for the advanced lightsource

A second beamline, BL 7.2, completely dedicated to beam diagnostics is being installed at the Advanced Light Source (ALS). The design has been optimized for the measurement of the momentum spread and emittance of the stored beam in combination with the existing diagnostic beamline, BL 3.1. A detailed analysis of the experimental error has allowed the definition of the system parameters. The obtained requirements found a good matching with a simple and reliable system based on the detection of X-ray synchrotron radiation (SR) through a pinhole system. The actual beamline, which also includes a port for visible and infrared SR as well as an X-ray beam position monitor (BPM), is mainly based on the design of two similar diagnostic beamlines at BESSY II. This approach allowed a significant saving in time, cost and engineering effort. The design criteria, including a summary of the experimental error analysis, as well as a brief description of the beamline are presented.
Date: May 1, 2003
Creator: Sannibale, Fernando; Baum, Dennis; Kelez, Nicholas; Scarvie, Tom & Holldack, Karsten
Object Type: Article
System: The UNT Digital Library
Linking reaction, transport, and hydrological parameters inunsaturated fractured rock: toughreact implementation andapplication (open access)

Linking reaction, transport, and hydrological parameters inunsaturated fractured rock: toughreact implementation andapplication

Modeling coupled water-gas-rock interactions in unsaturated fractured rock requires conceptual and numerical model considerations beyond those developed for saturated porous media. This paper focuses on the integration of the geological and hydrological parameters into the calculation of reactive-transport parameters and the feedback of mineral precipitation/dissolution to flow and transport. These basic relations have been implemented in the reactive transport code TOUGHREACT (Xu et al., 2003) that couples equilibrium and kinetic water-gas-rock inter-actions with multiphase flow and aqueous and gaseous species transport. Simulation results are presented illustrating the effects of water-rock interaction accompanying the heating of unsaturated heterogeneous fractured tuff. Unknowns associated with modeling water-rock interaction in fractured unsaturated systems are the area of the fracture surface that is wetted and which fractures are active components of the overall flow system. The wetted fracture area is important not only to water-rock interaction but to flow and transport between fluids flowing in fractures and the adjacent matrix. The other unknown relations are those describing permeability and capillary pressure modification during mineral precipitation and dissolution. Here we discuss solely the relations developed for fractures and the fracture-matrix interface.
Date: May 15, 2003
Creator: Sonnenthal, Eric; Spycher, Nicolas & Xu, Tianfu
Object Type: Article
System: The UNT Digital Library
Microwave Treatment as a Pesticide Alternative for Stored-Products (open access)

Microwave Treatment as a Pesticide Alternative for Stored-Products

This CRADA was a continuation of earlier work with Micro-Grain, Inc. to develop power, high frequency microwave treatment process to treat insect infested grain. ORNLs role was as a subcontractor to Micro-Grain's Phase II SBIR project funded by the US Department of Agriculture. The primary objective was to develop a commercial scale prototype unit capable of treating infested grain at flow rates approaching 1 kg/sec, which is required to be viable in the grain handling industry. A flow rate of {approx} 0.12 Kg/second was demonstrated at 20 kW microwave power level with 100% kill rate. The system is capable of 200 kW however waveguide arcing due to grain dust in the waveguide limited the power to 20 kW during the tests. Development tasks performed during the project included modification of an existing high-power microwave exposure facility to uniformly process large grain samples at high flow rates and improved instrumentation to detect grain flow and uniformity. Microwave processing tasks include a series of controlled exposure tests using infested grain samples provided and analyzed by the University of Oklahoma. Grain samples were infested with red flour beetles which proved the most difficult to kill in earlier tests. Most of the samples processed …
Date: May 21, 2003
Creator: Bigelow, T.S.; Forrester, S.C.; Halverson, S.; Halverson, B. & Phillips, T.
Object Type: Report
System: The UNT Digital Library
On-Line Measurement of Beryllium, Chromium, and Mercury by Using Aerosol Beam Focused Laser-Induced Plasma Spectrometer and TIme-Integrated Filter Sampling and Reference Method (open access)

On-Line Measurement of Beryllium, Chromium, and Mercury by Using Aerosol Beam Focused Laser-Induced Plasma Spectrometer and TIme-Integrated Filter Sampling and Reference Method

A novel real-time monitor for aerosol particles has been developed by the Oak Ridge National Laboratory (ORNL). The instrument is designed to perform in-situ measurement for the elemental composition of aerosol particles in flue gas. They had tested this monitor at the Eastman Chemical Company in July 2001 taking advantage of the emissions from a waste incinerator operated by the company as the background. To investigate the behavior and response of the monitor under simulated/known conditions, stock solutions of prepared metal concentration(s) were nebulized to provide spikes for the instrument testing. Strengths of the solutions were designed such that a reference method (RM) was able to collect sufficient material on filter samples that were analyzed in a laboratory to produce 30-minute average data points. Parallel aerosol measurements were performed by using the ORNL instrument. Recorded signal of an individual element was processed and the concentration calculated from a calibration curve established prior to the campaign. RM data were able to reflect the loads simulated in the spiked waste stream. However, it missed one beryllium sample. The possibility of bias exists in the RM determination of chromium that could lead to erroneous comparison between the RM and the real-time monitoring data. …
Date: May 20, 2003
Creator: Cheng, M.-D. & Vannice, R.W.
Object Type: Report
System: The UNT Digital Library
Quantitative Assessment of Distributed Energy Resource Benefits (open access)

Quantitative Assessment of Distributed Energy Resource Benefits

Distributed energy resources (DER) offer many benefits, some of which are readily quantified. Other benefits, however, are less easily quantifiable because they may require site-specific information about the DER project or analysis of the electrical system to which the DER is connected. The purpose of this study is to provide analytical insight into several of the more difficult calculations, using the PJM power pool as an example. This power pool contains most of Pennsylvania, New Jersey, Maryland, and Delaware. The techniques used here could be applied elsewhere, and the insights from this work may encourage various stakeholders to more actively pursue DER markets or to reduce obstacles that prevent the full realization of its benefits. This report describes methodologies used to quantify each of the benefits listed in Table ES-1. These methodologies include bulk power pool analyses, regional and national marginal cost evaluations, as well as a more traditional cost-benefit approach for DER owners. The methodologies cannot however determine which stakeholder will receive the benefits; that must be determined by regulators and legislators, and can vary from one location to another.
Date: May 22, 2003
Creator: Hadley, S. W.; Van Dyke, J. W.; Poore, W. P., III & Stovall, T. K.
Object Type: Report
System: The UNT Digital Library
Linear Model for Non Isosceles Absorbers. (open access)

Linear Model for Non Isosceles Absorbers.

Previous analyses have assumed that wedge absorbers are triangularly shaped with equal angles for the two faces. In this case, to linear order, the energy loss depends only on the position in the direction of the face tilt, and is independent of the incoming angle. One can instead construct an absorber with entrance and exit faces facing rather general directions. In this case, the energy loss can depend on both the position and the angle of the particle in question. This paper demonstrates that and computes the effect to linear order.
Date: May 12, 2003
Creator: Berg, J. S.
Object Type: Article
System: The UNT Digital Library
ACTION AND PHASE ANALYSIS TO DETERMINE SEXTUPOLE ERRORS IN RHIC AND THE SPS. (open access)

ACTION AND PHASE ANALYSIS TO DETERMINE SEXTUPOLE ERRORS IN RHIC AND THE SPS.

Success in the application of the action and phase analysis to find linear errors at RHIC Interaction Regions [1] has encouraged the creation of a technique based on the action and phase analysis to find non linear errors. In this paper we show the first attempt to measure the sextupole components at RHIC interaction regions using the action and phase method. Experiments done by intentionally activating sextupoles in RHIC and in SPS [2] will also be analyzed with this method. First results have given values for the sextupole errors that at least have the same order of magnitude as the values found by an alternate technique during the RHIC 2001 run [3].
Date: May 12, 2003
Creator: Cardona, J.; Peggs, S.; Satogata, T. & Tomas, R.
Object Type: Article
System: The UNT Digital Library
Microstructure of Surface Layers in Cu(In,Ga)Se2 Thin Films (open access)

Microstructure of Surface Layers in Cu(In,Ga)Se2 Thin Films

In most Cu(In,Ga)Se2 thin films used for solar cells, there usually exist interfaces lying about 0.1 to 0.2 m below the surfaces. We report on a convergent-beam electron diffraction and energy-dispersive X-ray spectroscopy study of the microstructure and chemical composition of the surface region in Cu(In,Ga)Se2 thin films. We find that the surface region and the bulk are structurally similar, with no ordered defect chalcopyrite structure observed. However, their composition is slightly different, indicating that they can have different point-defect physics. Our results suggest that the subinterfaces and the bulk absorber may form homojunctions.
Date: May 1, 2003
Creator: Yan, Y.; Jones, K. M.; AbuShama, J.; Young, M.; Asher, S.; Al-Jassim, M. M. et al.
Object Type: Article
System: The UNT Digital Library
ELECTRON CLOUD AND PRESSURE RISE SIMULATIONS FOR RHIC. (open access)

ELECTRON CLOUD AND PRESSURE RISE SIMULATIONS FOR RHIC.

Beam induced electron multipacting may be among the main reasons for the vacuum pressure rise when circulating high intensity ion and proton beams in RHIC. Latest simulation results are benchmarked with recent experimental observations for RHIC, and compared to other general computer codes. The influence of the electron multipacting to the vacuum properties is also discussed.
Date: May 12, 2003
Creator: IRISO-ARIZ,U. BLASKIEWICZ,M. DREES,A. FISCHER,W. PEGGS,S. TRBOJEVIC,D.
Object Type: Article
System: The UNT Digital Library
ADVANCEMENT OF THE RHIC BEAM ABORT KICKER SYSTEM. (open access)

ADVANCEMENT OF THE RHIC BEAM ABORT KICKER SYSTEM.

As one of the most critical system for RHIC operation, the beam abort kicker system has to be highly available, reliable, and stable for the entire operating range. Along with the RHIC commission and operation, consistent efforts have been spend to cope with immediate issues as well as inherited design issues. Major design changes have been implemented to achieve the higher operating voltage, longer high voltage hold-off time, fast retriggering and redundant triggering, and improved system protection, etc. Recent system test has demonstrated for the first time that both blue ring and yellow ring beam abort systems have achieved more than 24 hours hold off time at desired operating voltage. In this paper, we report break down, thyratron reverse arcing, and to build a fast re-trigger system to reduce beam spreading in event of premature discharge.
Date: May 12, 2003
Creator: ZHANG,W. AHRENS,L. MI,J. OERTER,B. SANDBERG,J. WARBURTON,D.
Object Type: Article
System: The UNT Digital Library
FFAG LATTICE FOR MUON ACCELERATION WITH DISTRIBUTED RF. (open access)

FFAG LATTICE FOR MUON ACCELERATION WITH DISTRIBUTED RF.

A future muon collider or neutrino factory requires fast acceleration to minimize muon decay. We have previously described an FFAG ring that accelerated muons from 10 to 20 GeV in energy. The ring achieved its large momentum acceptance using a low-emittance lattice with a small dispersion. In this paper, we present an update on that ring. We have used design tools that more accurately represent the ring's behavior at large momentum offsets. We have also improved the dynamic aperture from the earlier design.
Date: May 12, 2003
Creator: COURANT,E. D..TRBOJEVIC,D. BERG,S. J. BLASKIEWICZ,M. COURANT,E. D..TRBOJEVIC,D. BERG,S. J. BLASKIEWICZ,M. M. PALMER,R. GARREN,A.
Object Type: Article
System: The UNT Digital Library
Commissioning Spin Rotators in RHIC. (open access)

Commissioning Spin Rotators in RHIC.

During the summer of 2002, eight superconducting helical spin rotators were installed into RHIC in order to control the polarization directions independently at the STAR and PHENIX experiments. Without the rotators, the orientation of polarization at the interaction points would only be vertical. With four rotators around each of the two experiments, we can rotate either or both beams from vertical into the horizontal plane through the interaction region and then back to vertical on the other side. This allows independent control for each beam with vertical, longitudinal, or radial polarization at the experiment. In this paper, we present results from the first run using the new spin rotators at PHENIX.
Date: May 12, 2003
Creator: MacKay, W. W.; Bai, M.; Courant, E. D.; Fischer, W.; Huang, H.; Luccio, A. et al.
Object Type: Article
System: The UNT Digital Library
Stray-Electron Accumulation and Effects in HIF Accelerators (open access)

Stray-Electron Accumulation and Effects in HIF Accelerators

None
Date: May 9, 2003
Creator: Cohen, R. H.; Friedman, A.; Furman, M. A.; Lund, S. M.; Molvik, A. W.; Stoltz, P. et al.
Object Type: Article
System: The UNT Digital Library
NSLS 2002 ACTIVITY REPORT (NATIONAL SYNCHROTRON LIGHT SOURCE ACTIVITY REPORT 2002). (open access)

NSLS 2002 ACTIVITY REPORT (NATIONAL SYNCHROTRON LIGHT SOURCE ACTIVITY REPORT 2002).

The year 2002 has been another highly productive year at the NSLS and an impressive array of highlights from this scientific activity is included in this Activity Report. They have taken significant steps this past year toward better supporting beamlines and users. The number of user science support staff has been increased by about ten positions. They have also worked with their users, DOE, and the other DOE synchrotron facilities to develop a new, more flexible user access policy. Doing things safely remains a top priority, and they are reviewing their training and safety requirements to ensure they are thorough and everyone fully understands the necessity of abiding by them. A major development this past year was approval from DOE for BNL to begin the conceptual design of the Center for Functional Nanomaterials (CFN). The CFN will have a dramatic impact on nanoscience in the Northeast, facilitating the synthesis, characterization and scientific exploration of new classes of novel nanostructured materials. It will be located adjacent to the NSLS and a number of NSLS beamlines will be optimized to serve the needs of the nanoscience community. The NSLS and CFN user programs will be coordinated to facilitate easy access to both …
Date: May 1, 2003
Creator: Miller, L.
Object Type: Report
System: The UNT Digital Library
Anodic Behavior of Alloy 22 in Calcium Chloride and in Calcium Chloride Plus Calcium Nitrate Brines (open access)

Anodic Behavior of Alloy 22 in Calcium Chloride and in Calcium Chloride Plus Calcium Nitrate Brines

Alloy 22 (UNS N60622) is a nickel-based alloy, which is extensively used in aggressive industrial applications, especially due to its resistance to localized corrosion and stress corrosion cracking in high chloride environments. The purpose of this work was to characterize the anodic behavior of Alloy 22 in concentrated calcium chloride (CaCl{sub 2}) brines and to evaluate the inhibitive effect of nitrate, especially to localized corrosion. Standard electrochemical tests such as polarization resistance and cyclic polarization were used. Results show that the corrosion potential of Alloy 22 was approximately -360 mV in the silver-silver chloride (SSC) scale and independent of the tested temperature. Cyclic polarization tests showed that Alloy 22 was mainly susceptible to localized attack in 5 M CaCl{sub 2} at 75 C and higher temperatures. The addition of nitrate in a molar ratio of chloride to nitrate equal to 10 increased the onset of localized corrosion to approximately 105 C. The addition of nitrate to the solution also decreased the uniform corrosion rate and the passive current of the alloy.
Date: May 13, 2003
Creator: Evans, K. J.; Day, S. D.; Ilevbare, G. O.; Whalen, M. T.; King, K. J.; Hust, G. A. et al.
Object Type: Article
System: The UNT Digital Library
Development of a Rolling Process Design Tool for Use in Improving Hot Roll Slab Recovery (open access)

Development of a Rolling Process Design Tool for Use in Improving Hot Roll Slab Recovery

In this quarter, our primary effort has been focused on model verification, emphasizing on consistency in result for parallel and serial simulation runs, Progress has been made in refining the parallel thermal algorithms and in diminishing discretization effects in the contact region between the rollers and slab. We have received the metrology data of the ingot profile at the end of the fifth pass from Alcoa. Detailed comparisons between the data and the initial simulation result are being performed. Forthcoming from Alcoa are modifications to the fracture model based on additional experiments at lower strain rates. The original fracture model, was implemented in the finite element code, but damage in the rolling simulation was not correct due to the modeling errors at lower strain rates and high stress triaxiality. Validation simulations for the fracture model will continue when the experimentally-based adjustments to the parameter values become available.
Date: May 6, 2003
Creator: Couch, R & Wang, P
Object Type: Report
System: The UNT Digital Library
COMMISSIONING OF RHIC DEUTERON - GOLD COLLISIONS. (open access)

COMMISSIONING OF RHIC DEUTERON - GOLD COLLISIONS.

Deuteron and gold beams have been accelerated to a collision energy of {radical}s = 200 GeV/u in the Relativistic Heavy Ion Collider (RHIC), providing the first asymmetric-species collisions of this complex. Necessary changes for this mode of operation include new ramping software and asymmetric crossing angle geometries. This paper reviews machine performance, problem encountered and their solutions, and accomplishments during the 16 weeks of ramp-up and operations.
Date: May 12, 2003
Creator: SATOGATA,T. AHRENS,L. BAI,M. BEEBE-WANG,J.
Object Type: Article
System: The UNT Digital Library