None

The development of defect-free reticle blanks is an important challenge facing the commercialization of extreme ultraviolet lithography (EUVL). The basis of EUVL reticles are mask blanks consisting of a substrate and a reflective Mo/Si multilayer. Defects on the substrate or defects introduced during multilayer deposition can result in critical phase and amplitude defects. Amplitude- or phase-defect repair techniques are being developed with the goal to repair many of these defects. In this report, we discuss progress in two areas of defect repair: (1) We discuss the effect of the residual reflectance variation over the repair zone after amplitude-defect repair on the process window. This allows the determination of the maximum tolerable residual damage induced by amplitude defect repair. (2) We further performed a quantitative assessment of the yield improvement due to defect repair. We found that amplitude- and phase-defect repair have the potential to significantly improve mask blank yield. Our calculations further show that yield can be maximized by increasing the number of Mo/Si bilayers.

This six-page brochure outlines ways for industry to integrate wind power, including assessing wind power, building wind farms, using a developer, capitalizing on technology, enhancing the corporate image, and preparing RFPs. Company examples and information resources are also provided.

Quarterly magazine with articles on Alternate Fuel Vehicles (AFVs) in India, alternative fuels for emergency preparedness, and testing of propane vehicles by UPS. Also an interview of author Jeremy Rifkin on how alternative fuels provide pathways to hydrogen.

Fact sheet describes the performance of diesel hybrid electric buses used at MTA New York City Transit.

One-page flier for distribution at the Association of Collegiate Schools of Architecture conference. The flier contains information about the release of the Request for Proposals for the 2005 competition.

In 2001, the Visteon automotive glass plant in Nashville, Tennessee renovated its millwater pumping system. This improvement saved the plant $280,000 annually in energy and operating costs, reduced annual energy consumption by 3.2 million kilowatt-hours, reduced water consumption, improved system performance, and reduced use of water treatment chemicals.