Extreme Ultraviolet Lithgraphy (EUVL) is an emerging technology for fabrication of sub-100 nm feature sizes on silicon, following the SIA roadmap well into the 21st century. The specific EUVL system described is a scanned, projection lithography system with a 4:1 reduction, using a laser plasma EUV source. The mask and all of the system optics are reflective, multilayer mirrors which function in the extreme ultraviolet at 13.4 nm wavelength. Since the masks are imaged to the wafer exposure plane, mask defects greater than 80% of the exposure plane CD (for 4:1 reduction) will in many cases render the mask useless, whereas intervening optics can have defects which are not a printing problem. For the 100 nm node, we must reduce defects to less than 0.01/cm² @ 80nm or larger to obtain acceptable mask production yields. We have succeeded in reducing the defects to less than 0.1/cm² for defects larger than 130 nm detected by visible light inspection tools, however our program goal is to achieve 0.01/cm² in the near future. More importantly though, we plan to have a detailed understanding of defect origination and the effect on multilayer growth in order to mitigate defects below the 10^-2/cm² level on the …

Maganom is a computer program for modeling magnetic data over 2-D structures. The program computes the magnetic anomalies across 2-D structures (models) to allow you to compare observed and computed magnetic data across the model structure. If a match between the computed and the observed magnetic values is unsatisfactory, you construct a new model and rerun Maganom to recalculate new magnetic values. In this way, you can continue calculations until you obtain a satisfactory match between the observed and the calculated values.

Testimony issued by the General Accounting Office with an abstract that begins "Pursuant to a congressional request, GAO discussed selected state patient protection provisions already in place and congressional proposals under consideration, focusing on state statutes that relate to seven types of patient protections: (1) coverage of emergency services; (2) access to obstetricians and gynecologists; (3) access to pediatricians; (4) access to other specialists; (5) continuity of care for enrollees whose providers leave the plan; (6) drug formularies; and (7) patient-provider communication."

A surface-micromachined MEMS process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Combined hydrogen and mercury-vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.

Correspondence issued by the General Accounting Office with an abstract that begins "GAO provided information on the North Atlantic Treaty Organization's (NATO) operations and contingency plans for stabilizing the Balkans, focusing on: (1) current and projected security conditions in the Balkans region, particularly with regard to Bosnia and the Serbia province of Kosovo; and (2) the potential impact of these conditions on: (a) prospects for a drawdown of the NATO-led Stabilization Force (SFOR) in Bosnia; (b) NATO's current operations around Kosovo; and (c) NATO and U.S. plans to deploy air and ground forces for resolving the ongoing conflict in Kosovo, in particular, ground operations planned for a permissive environment--one where all parties to the conflict agree to the presence and mission of NATO-led forces."

This report summarizes the results of cold testing, completed by AEAT, as part of the proof-of-principle testing for a proposed nested, fixed-depth fluidic sampling system. This sampling system will provide waste samples from the PHMC feed tank to support the privatization contract with BNFL. Proof-of-principle tests were completed with 2 wt% and 10 wt% sand/water and 25 wt% kaolin clay/water simulants with a test setup that spanned the 24 ft to 57 ft height required in the feed tank. The tests demonstrated that the system could pump and sample waste materials with low and with high solids content. In addition, the tests demonstrated a need for some design upgrades to the sampling system, as there was material loss when the sample bottle was removed from the sampling needle. These were complementary tests, completed as part of an EM-50 Tank Focus Area (TFA) to develop a sampling system for validating LAW and HLW waste batches for the Privatization Contract.

This report summarizes the work accomplished in the authors laboratories over the previous three years. During the funding period they have had 23 monographs published or in press, 1 book chapter, 1 patent issued and have delivered 28 invited seminars or plenary lectures on DOE sponsored research. This report covers the work that has been published (or accepted). The most notable aspect of this work involves the successful development and understanding of a new class of fused macrocyclic compounds as pseudophases and selectors in high performance separations (including high performance liquid chromatography, HPLC; capillary electrophoresis, CE; and thin layer chromatography, TLC). They have considerably extended their chiral biomarker work from amber to crude oil and coal. In the process of doing this we've developed several novel separation approaches. They finished their work on the new GSC-PLOT column which is now being used by researchers world-wide for the analysis of gases, light hydrocarbons and halocarbons. Finally, we completed basic studies on immobilizing a cyclodextrin/oligosiloxane hybrid on the wall of fused silica, as well as a basic study on the separation behavior of buckminster fullerene and higher fullerenes.

Recent space experience has shown that the use of commercial optocouplers can be problematic in spacecraft, such as TOPEX/Poseidon, that must operate in significant radiation environments. Radiation--induced failures of these devices have been observed in space and have been further documented at similar radiation doses in the laboratory. The ubiquitous use of optocouplers in spacecraft systems for a variety of applications, such as electrical isolation, switching and power transfer, is indicative of the need for optocouplers that can withstand the space radiation environment. In addition, the distributed nature of their use implies that it is not particularly desirable to shield optocouplers for use in radiation environments. Thus, it will be important for the space community to have access to radiation hardened/tolerant optocouplers. For many microelectronic and photonic devices, it is difficult to achieve radiation hardness without sacrificing performance. However, in the case of optocouplers, one should be able to achieve both superior radiation hardness and performance for such characteristics as switching speed, current transfer ratio (CTR), minimum power usage and array power transfer, if standard light emitting diodes (LEDs), such as those in the commercial optocouplers mentioned above, are avoided, and VCSELs are employed as the emitter portion of the …

Silicide Schottky contacts can be as large as 0.955 eV (E{sub v} + 0.165 eV) on n-type silicon and as large as 1.05 eV (E{sub c} {minus} 0.07 eV) on p-type silicon. Current models of Schottky barrier formation do not provide a satisfactory explanation of occurrence of this wide variation. A model for understanding Schottky contacts via screened pinning at defect levels is presented. In the present paper it is shown that most transition metal silicides are pinned approximately 0.48 eV above the valence band by interstitial Si clusters. Rare earth disilicides pin close to the divacancy acceptor level 0.41 eV below the conduction band edge while high work function silicides of Ir and Pt pin close to the divacancy donor level 0.21 eV above the valence band edge. Selection of a particular defect pinning level depends strongly on the relative positions of the silicide work function and the defect energy level on an absolute energy scale.

Testimony issued by the General Accounting Office with an abstract that begins "Pursuant to a congressional request, GAO discussed return-to-work issues facing the Disability Insurance (DI) and Supplemental Security Income (SSI) programs, focusing on: (1) structural and operational weaknesses in the current DI and SSI programs that impede return to work; (2) factors that working beneficiaries believe are helpful in becoming and staying employed; and (3) challenges that exist in improving program incentives to work."

Document issued by the Office of the Attorney General of Texas in Austin, Texas, providing an interpretation of Texas law. It provides the opinion of the Texas Attorney General, John Cornyn, regarding a legal question submitted for clarification: Whether certain provisions of the Texas Controlled Substances Act, TEX. HEALTH & SAFETY CODE ANN. ch 481 (Vernon 1992 & Supp. 1999), that authorize warrant-less administrative services violate article I, section 9 of the Texas Constitution (RQ-1198)

The objective of this manual is to present guidelines and procedures for the preparation of new data for the Tertiary Oil Recovery Information System (TORIS) data base. TORIS is an analytical system currently maintained by the Department of Energy's (DOE) Bartlesville Project Office. It uses an extensive field- and reservoir-level data base to evaluate the technical and economic recovery potential of specific crude oil reservoirs.

We describe a parallel, 3D, unstructured grid finite element, hydrodynamic diffusion code for inertial confinement fusion (ICF) applications and the ancillary software used to run it. The code system is divided into two entities, a controller and a stand-alone physics code. The code system may reside on different computers; the controller on the user� s workstation and the physics code on a supercomputer. The physics code is composed of separate hydrodynamic, equation-of-state, laser energy deposition, heat conduction, and radiation transport packages and is parallelized for distributed memory architectures. For parallelization, a SPMD model is adopted; the domain is decomposed into a disjoint collection of subdomains, one per processing element (PE). The PEs communicate using MPI. The code is used to simulate the hydrodynamic implosion of a spherical bubble.

This procedure provides instructions for readiness of the first portion of the upgraded 241-SY-101 Data Acquisition and Control System (DACS) computer system to provide proper control and monitoring of the mitigation mixer pump and instrumentation installed in the 241-SY-101 underground storage tank will be systematically evaluated by the performance of this procedure.

Seismic data for events in and around Kuwait were collected and analyzed. The authors estimated event moment, focal mechanism and depth by waveform modeling. Results showed that reliable seismic source parameters for events in and near Kuwait can be estimated from a single broadband three-component seismic station. This analysis will advance understanding of earthquake hazard in Kuwait.

We investigate the apparent charge transfer between adatoms in the GeXPb[l.XjGe(lll) interface both experimentally and theoretically. Scanning tunneling microscopy and surface core level measurements suggest significant charge transfer from the Ge adatoms to the Pb adatoms. However, first-principles calculations unambiguously find that the total electronic displacement is negligibly small, and that the results of published experiments can be explained as a result of bond rearrangement.

The Very Large Hadron Collider (VLHC) is a supercon-ducting proton-proton collider with approximately 100 TeV cm and approximately 10{sup 34} s{sup -1}cm{sup -2} luminosity [1]. Currently, beam dynamics in this future accelerator is the subject of intensive studies within the framework of the US-wide VLHC R&D program. This presentation sum-marizes recent developments in the field. Besides general discussion on relevant VLHC parameters, we consider various beam instabilities and ways to avoid them. Finally, we outline possibilities for theoretical and experimental R&D.

The Department of Energy (DOE) has as two of its strategic objectives to safely accomplish the world's largest environmental clean-up of contaminated sites and the adoption of the best management practices of the private sector to achieve business-like results efficiently and effectively. An integral part of the strategic response to the challenges facing the Department has been the use of benchmarking and best practice management to facilitate identifying and implementing leading-edge thinking, practices, approaches, and solutions.

This report describes the methodology used in conducting the Canister Storage Building (CSB) hazard analysis to support the CSB final safety analysis report (FSAR) and documents the results. The hazard analysis was performed in accordance with the DOE-STD-3009-94, ''Preparation Guide for US. Department of Energy Nonreactor Nuclear Facility Safety Analysis Reports'', and meets the intent of HNF-PRO-704, ''Hazard and Accident Analysis Process''. This hazard analysis implements the requirements of DOE Order 5480.23, ''Nuclear Safety Analysis Reports''.

The production of integrated circuits (IC's) involves a number of discrete steps which utilize hazardous or regulated solvents and generate large waste streams. ES&H considerations associated with these chemicals have prompted a search for alternative, more environmentally benign solvent systems. An emerging technology for conventional solvent replacement is the use of supercritical fluids based on carbon dioxide (CO{sub 2}). Research work, conducted at Los Alamos in conjunction with the Hewlett-Packard Company, has lead to the development of a CO{sub 2}-based supercritical fluid treatment system for the stripping of hard-baked photoresists. This treatment system, known as Supercritical CO{sub 2} Resist Remover, or CORR, uses a two-component solvent composed of a nonhazardous, non-regulated compound, dissolved in supercritical CO{sub 2}. The solvent/treatment system has been successfully tested on metallized Si wafers coated with negative and positive photoresist, the latter both before and after ion-implantation. A description of the experimental data will be presented. Based on the initial laboratory results, the project has progressed to the design and construction of prototype, single-wafer photoresist-stripping equipment. The integrated system involves a closed-loop, recirculating cycle which continuously cleans and regenerates the CO{sub 2}, recycles the dissolved solvent, and separates and concentrates the spent resist. The status of …

Chaos is a general phenomenon in nonlinear dynamical systems. Accelerators--storage rings in particular--in which particles are stored for 10{sup 10} revolutions constitute a particularly intricate nonlinear dynamical system. (In comparison, the earth has revolved around the sun for only 10{sup 9} turns.) Storage rings therefore provide an ideal testing ground for chaos physics. In fact, it is the chaos phenomenon that imposes one of the key design criteria for these accelerators. One might arguably say that the demise of the Superconducting Super Collider project originated from a misjudgement in its chaos analysis at one point along its design path, leading to its first substantial cost escalation. This talk gives an elementary introduction to the study of chaos in accelerators.

The project shown in this fact sheet uses ''break points,'' where the cost of the energy-efficient features are balanced by the reductions of other construction costs. The goal of the Building America program is to produce energy efficient, environmentally sensitive, affordable, and adaptable residences on a community scale.

We present recent results on dijet production in p{anti p} collisions at {radical}s = 1.8 TeV at the Fermilab Tevatron. Data from both CDF and D0 experiments are shown. Dijet measurements complement prior inclusive jet measurements, which have shown a possible excess above expectations at high transverse energy. The same trend is seen in the dijet mass spectra.

Energy availability in a country is of great importance to its economy and to raising and maintaining its standard of living. In 1994, the United States consumed more than 88 quadrillion Btu (quads) of energy and spent about $500 billion on fuels and electricity. Fortunately, the United States is well endowed with energy sources, notably fossil fuels, and possesses a considerable nuclear power industry. The United States also has significant renewable energy resources and already exploits much of its hydropower resources, which represent 10% of electricity production. Nevertheless, in 1994, the United States imported about 45% of the petroleum products it consumed, equivalent to about 17 quads of energy. This dependence on imported oil puts the country at risk of energy supply disruptions and oil price shocks. Previous oil shocks may have cost the country as much as $4 billion (in 1993 dollars) between 1973 and 1990. Moreover, the production and use of energy from fossil fuels are major sources of environmental damage. The corresponding situation in many parts of the world is more challenging. Developing countries are experiencing rapid growth in population, energy demand, and the environmental degradation that often results from industrial development. The near-term depletion of energy …