Resource Type

A Comparison of Spectroscopic Measurements of an Inductive Plasma Source with the INDUCT Model (open access)

A Comparison of Spectroscopic Measurements of an Inductive Plasma Source with the INDUCT Model

Noninvasive spectroscopic measurements of an inductively driven hydrogen plasma source with density and temperature characteristic of plasma processing tools have been made with an ultimate application of cleaning of silicon substrates. These measurements allow full radial and axial profiles of electron density and temperature to be measured from absolutely calibrated multichannel spectroscopic measurements of upper state number densities and a collisional radiative model. Profiles were obtained over a range of powers from 50 to 200 W and pressures from 5 to 50 mTorr in hydrogen in a small cylindrical source. The hydrogen working gas and simple cylindrical geometry was chosen to simplify detailed comparisons with a 2D computational model (INDUCT95) which uses a fluid approximation for tbc plasma and neutral gas. The code calculates the inductive coupling of the 13.56 MHz RF source, the collisional, radiative, and wall losses as well as a chemistry model for electrons, H{sub 2}, H, H{sup +}, H{sub 2}, and H{sub 3}{sup +}. Simulation results were sensitive to the value for the wall coefficient. The simulation and experimental temperature and density profiles in r and z were in rough agreement, but some details were quite different. The simulated axial density profile was located under the …
Date: October 3, 1999
Creator: Huebschman, M. L.; Bakshi, V.; Bengtson, R. D.; Ekerdt, J. G.; Vitello, P.; Wiley, J. C. et al.
System: The UNT Digital Library
Production, Distribution, and Applications of Californium-252 Neutron Sources (open access)

Production, Distribution, and Applications of Californium-252 Neutron Sources

The radioisotope {sup 252}Cf is routinely encapsulated into compact, portable, intense neutron sources with a 2.6-year half-life. A source the size of a person's little finger can emit up to 10{sup 11} neutrons/s. Californium-252 is used commercially as a reliable, cost-effective neutron source for prompt gamma neutron activation analysis (PGNAA) of coal, cement, and minerals, as well as for detection and identification of explosives, laud mines, and unexploded military ordnance. Other uses are neutron radiography, nuclear waste assays, reactor start-up sources, calibration standards, and cancer therapy. The inherent safety of source encapsulations is demonstrated by 30 years of experience and by U.S. Bureau of Mines tests of source survivability during explosions. The production and distribution center for the U. S Department of Energy (DOE) Californium Program is the Radiochemical Engineering Development Center (REDC) at Oak Ridge National Laboratory (ORNL). DOE sells The radioisotope {sup 252}Cf is routinely encapsulated into compact, portable, intense neutron sources with a 2.6- year half-life. A source the size of a person's little finger can emit up to 10 neutrons/s. Californium-252 is used commercially as a reliable, cost-effective neutron source for prompt gamma neutron activation analysis (PGNAA) of coal, cement, and minerals, as well as for …
Date: October 3, 1999
Creator: Balo, P. A.; Knauer, J. B. & Martin, R. C.
System: The UNT Digital Library
Some Tooling for Manufacturing Research Reactor Fuel Plates (open access)

Some Tooling for Manufacturing Research Reactor Fuel Plates

This paper will discuss some of the tooling necessary to manufacture aluminum-based research reactor fuel plates. Most of this tooling is intended for use in a high-production facility. Some of the tools shown have manufactured more than 150,000 pieces. The only maintenance has been sharpening. With careful design, tools can be made to accommodate the manufacture of several different fuel elements, thus, reducing tooling costs and maintaining tools that the operators are trained to use. An important feature is to design the tools using materials with good lasting quality. Good tools can increase return on investment.
Date: October 3, 1999
Creator: Knight, R.W.
System: The UNT Digital Library