Experimental studies of the relative atomic mu --meson capture probabilities in the constituents of chemical compounds are described. Fermi and Teller had predicted that the atomic-capture probability is proportional to the nuclear charge of the atomic species weighted by its atomic concentration. This is sometimes referred to as the Fermi-Teller Z law.'' Previous experiments indicated no clear systematics to this capture process, and there are conflicts between the results of several measurements made with the same or similar compounds. In these experiments the capturing atom was identified by detection of either mesic x rays or decay electrons from mu /sup -/ mesons bound in the mesic K shell in the atomic species, In these experiments oxides and sulfides of some medium- and high-Z elements as well as two metallic solutions were used, and a nuclear capture product (neutron) rather than the decay electrons was detected. Results show that among the substances examIned, namely CuO, Sb/sub 2/O/sub 3, PbO, CuS, Sb/sub 2/S/sub 3/, PbS AgLi, and CuAu, the Z law'' behavior is not indicated either in insulators or in metals, although in all cases there is a preference for capturing in the atom of higher Z. If the atomic-capture probability is …

This document is the third sub-report of the EUV AIM design study being conducted at LLNL on behalf of International Sematech (ISMT). The purpose of this study as identified in section 1.2 of the statement of work is to research the basic user requirements of an actinic defect characterization tool, potential design configurations and top-level specifications. The objectives of this design study specifically identified in section 1.3 of the statement of work were to: (1) Determine the user requirements of an actinic defect characterization tool; (2) Determine if an EUV AIM tool is an appropriate platform for actinic defect characterization; (3) Determine possible design configurations and top-level performance specifications; (4) Identify potential technical issues and risks of different technical approaches; (5) Provide estimates of cost relating to different technical approaches; and (6) Provide simulated performance for key subsystems and the entire system. The sub-sections of the study to be addressed were accordingly defined in the statement of work as being: (1) Formulation of top-level specifications; (2) Identification of system configurations suitable for meeting the top-level specifications; (3) Preliminary design of imaging systems; (4) Preliminary design of illumination systems; (5) Prediction and comparison of performance through aerial image calculation; (6) Identification …