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Fast diffusion of As in polycrystalline silicon during rapid thermal annealing (open access)

Fast diffusion of As in polycrystalline silicon during rapid thermal annealing

This article discusses fast diffusion of As in polycrystalline silicon during rapid thermal annealing.
Date: May 30, 1984
Creator: Wilson, Scott R.; Paulson, W. M.; Gregory, R. B.; Gressett, J. D.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
System: The UNT Digital Library