The effort to produce defect-free mask blanks for EUV lithography relies on increasing the detection sensitivity of advanced mask inspection tools, operating at several wavelengths. We describe the unique measurement capabilities of a prototype actinic (EUV wavelength) microscope that is capable of detecting small defects and reflectivity changes that occur on the scale of microns to nanometers. Types of defects: (a) Buried Substrate Defects: particles & pits (causes amplitude and/or phase variations); (b) Surface Contamination (reduces reflectivity and (possibly) contrast); (c) Damage from Inspection and Use (reduces the reflectivity of the multilayer coating). This paper presents an overview of several topics where scanning actinic inspection makes a unique contribution to EUVL research. We describe the role of actinic scanning inspection in four cases: defect repair studies; observations of laser damage; after scanning electron microscopy; and native and programmed defects.

Photosynthetic light-harvesting proceeds by the collection and highly efficient transfer of energy through a network of pigment-protein complexes. Inter-chromophore electronic couplings and interactions between pigments and the surrounding protein determine energy levels of excitonic states and dictate the mechanism of energy flow. The excitonic structure (orientation of excitonic transition dipoles) of pigment-protein complexes is generally deduced indirectly from x-ray crystallography in combination with predictions of transition energies and couplings in the chromophore site basis. Here, we demonstrate that coarse-grained excitonic structural information in the form of projection angles between transition dipole moments can be obtained from polarization-dependent two-dimensional electronic spectroscopy of an isotropic sample, particularly when the nonrephasing or free polarization decay signal rather than the photon echo signal is considered. The method provides an experimental link between atomic and electronic structure and accesses dynamical information with femtosecond time resolution. In an investigation of the Fenna-Matthews-Olson complex from green sulfur bacteria, energy transfer connecting two particular exciton states in the protein is isolated as being the primary contributor to a cross peak in the nonrephasing 2D spectrum at 400 fs under a specific sequence of polarized excitation pulses. The results suggest the possibility of designing experiments using combinations of tailored …

Determining the printability of substrate defects beneath the extreme ultraviolet (EUV) reflecting multilayer stack is an important issue in EUVL lithography. Several simulation studies have been performed in the past to determine the tolerable defect size on EUV mask blank substrates but the industry still has no exact specification based on real printability tests. Therefore, it is imperative to experimentally determine the printability of small defects on a mask blanks that are caused by substrate defects using direct printing of programmed substrate defect in an EUV exposure tools. SEMATECH fabricated bump type program defect masks using standard electron beam lithography and performed printing tests with the masks using an EUV exposure tool. Defect images were also captured using SEMATECH's Berkeley Actinic Imaging Tool in order to compare aerial defect images with secondary electron microscope images from exposed wafers. In this paper, a comprehensive understanding of substrate defect printability will be presented and printability specifications of EUV mask substrate defects will be discussed.

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Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.

Video footage from the KXAS-TV/NBC station in Fort Worth, Texas, to accompany a news story.