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The SEMATECH Berkeley MET: extending EUV learning to 16-nm half pitch
Several high-performing resists identified in the past two years have been exposed at the 0.3-numerical-aperture (NA) SEMATECH Berkeley Microfield Exposure Tool (BMET) with an engineered dipole illumination optimized for 18-nm half pitch. Five chemically amplified platforms were found to support 20-nm dense patterning at a film thickness of approximately 45 nm. At 19-nm half pitch, however, scattered bridging kept all of these resists from cleanly resolving larger areas of dense features. At 18-nm half pitch, none of the resists were are able to cleanly resolve a single line within a bulk pattern. With this same illumination a directly imageable metal oxide hardmask showed excellent performance from 22-nm half pitch to 17-nm half pitch, and good performance at 16-nm half pitch, closely following the predicted aerial image contrast. This indicates that observed limitations of the chemically amplified resists are indeed coming from the resist and not from a shortcoming of the exposure tool. The imageable hardmask was also exposed using a Pseudo Phase-Shift-Mask technique and achieved clean printing of 15-nm half pitch lines and modulation all the way down to the theoretical 12.5-nm resolution limit of the 0.3-NA SEMATECH BMET.
Date:
March 18, 2011
Creator:
Anderson, Christopher N.; Baclea-an, Lorie Mae; Denham, Paul E.; George, Simi; Goldberg, Kenneth A.; Jones, Michael et al.
Object Type:
Article
System:
The UNT Digital Library
The Impact of Camera Optical Alignments on Weak Lensing Measures for the Dark Energy Survey
None
Date:
March 18, 2013
Creator:
Antonik, Michelle L.; Bacon, David J.; Bridle, Sarah; Doel, Peter; Brooks, David; Worswick, Sue et al.
Object Type:
Article
System:
The UNT Digital Library
Gainesville Daily Register (Gainesville, Tex.), Vol. 127, No. 142, Ed. 1 Saturday, March 18, 2017
Daily newspaper from Gainesville, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2017
Creator:
Armstrong, Mark J.
Object Type:
Newspaper
System:
The Portal to Texas History
Management Of Experiments And Data At The National Ignition Facility
Experiments, or 'shots', conducted at the National Ignition Facility (NIF) are discrete events that occur over a very short time frame (tens of nanoseconds) separated by many hours. Each shot is part of a larger campaign of shots to advance scientific understanding in high-energy-density physics. In one campaign, scientists use energy from the 192-beam, 1.8-Megajoule pulsed laser in the NIF system to symmetrically implode a hydrogen-filled target, thereby creating conditions similar to the interior of stars in a demonstration of controlled fusion. Each NIF shot generates gigabytes of data from over 30 diagnostics that measure optical, x-ray, and nuclear phenomena from the imploding target. We have developed systems to manage all aspects of the shot cycle. Other papers will discuss the control of the lasers and targets, while this paper focuses on the setup and management of campaigns and diagnostics. Because of the low duty cycle of shots, and the thousands of adjustments for each shot (target type, composition, shape; laser beams used, their power profiles, pointing; diagnostic systems used, their configuration, calibration, settings) it is imperative that we accurately define all equipment prior to the shot. Following the shot, and capture of the data by the automatic control system, …
Date:
March 18, 2011
Creator:
Azevedo, S; Casey, A; Beeler, R; Bettenhausen, R.; Bond, E.; Chandrasekaran, H. et al.
Object Type:
Article
System:
The UNT Digital Library
Mount Pleasant Tribune (Mount Pleasant, Tex.), Vol. 143, No. 54, Ed. 1 Saturday, March 18, 2017
Semiweekly newspaper from Mount Pleasant, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2017
Creator:
Bachman, Marty
Object Type:
Newspaper
System:
The Portal to Texas History
RELAP5 Application to Accident Analysis of the NIST Research Reactor
Detailed safety analyses have been performed for the 20 MW D{sub 2}O moderated research reactor (NBSR) at the National Institute of Standards and Technology (NIST). The time-dependent analysis of the primary system is determined with a RELAP5 transient analysis model that includes the reactor vessel, the pump, heat exchanger, fuel element geometry, and flow channels for both the six inner and twenty-four outer fuel elements. A post-processing of the simulation results has been conducted to evaluate minimum critical heat flux ratio (CHFR) using the Sudo-Kaminaga correlation. Evaluations are performed for the following accidents: (1) the control rod withdrawal startup accident and (2) the maximum reactivity insertion accident. In both cases the RELAP5 results indicate that there is adequate margin to CHF and no damage to the fuel will occur because of sufficient coolant flow through the fuel channels and the negative scram reactivity insertion.
Date:
March 18, 2012
Creator:
Baek, J.; Cuadra Gascon, A.; Cheng, L. Y. & Diamond, D.
Object Type:
Article
System:
The UNT Digital Library
Oral History Interview with Joseph Baumbach, March 18, 2019
The National Museum of the Pacific War presents an interview with Joseph Baumbach. Baumbach joined the Marine Corps in November of 1942. Beginning around mid-1943, he served as a Radioman with the First Armored Amphibious Battalion, Company D. In January of 1944, they deployed to Kauai, Hawaii. They participated in the battles of Kwajalein, Guam and Okinawa. Baumbach returned to the US and received his discharge in December of 1945.
Date:
March 18, 2019
Creator:
Baumbach, Joseph
Object Type:
Sound
System:
The Portal to Texas History
Oral History Interview with Joseph Baumbach, March 18, 2019
The National Museum of the Pacific War presents an interview with Joseph Baumbach. Baumbach joined the Marine Corps in November of 1942. Beginning around mid-1943, he served as a Radioman with the First Armored Amphibious Battalion, Company D. In January of 1944, they deployed to Kauai, Hawaii. They participated in the battles of Kwajalein, Guam and Okinawa. Baumbach returned to the US and received his discharge in December of 1945.
Date:
March 18, 2019
Creator:
Baumbach, Joseph
Object Type:
Text
System:
The Portal to Texas History
Colombia: Issues for Congress
This report provides an overview of recent political developments in Colombia. It reviews the administration of President Uribe (2002-2010), continuing into the election of President Juan Manuel Santos and his first months in office. The report then provides background on the longstanding conflict with internal armed groups that has marked Colombia’s modern development, examining the roots of the conflict and its major actors as well as their present status. The report considers ongoing challenges such as human rights, demobilization and displacement, drug trends, and Colombia’s regional relations. It outlines the National Consolidation Plan which updates Plan Colombia with a whole-of-government approach to eliminate the insurgency, and it describes the U.S.-Colombia Defense Cooperation Agreement. The report raises some of the major policy issues that the U.S. Congress has had, and will continue to pursue, in relation to U.S.-Colombia policy, such as the pending U.S.-Colombia Free Trade Agreement.
Date:
March 18, 2011
Creator:
Beittel, June S.
Object Type:
Report
System:
The UNT Digital Library
Water Research Consortium U.S. Department of Energy Grant Award Number DE-FG02-05ER64132 Final Technical Report For Period Beginning: 15 September 2005 And Ending: 31 December 2009 Report Date: 16 March 2010
This report summarizes the activities of the INRA Water Research Consortium (IWRC) for the period beginning September 15, 2005 and ending December 16, 2010. This report compares accomplishments to project objectives, documents the activities associated with this project, and lists products developed during the course of the project. The Water Resources Research Needs Assessment team received funding from the Inland Northwest Research Alliance Water Resources Steering Committee to facilitate a structured needs assessment process that could provide a basis for future targeted research efforts to improve regional water resources management in the Inland Northwest region. The original INRA proposal specifically mentions the need to conduct a detailed assessment of the information and research needs of policy makers and water user groups during a period of increasing competition for scarce water supplies. A particular focus of this assessment would be to understand what types of research might facilitate water resource management during periods of drought. The specific goals of the Needs Assessment project were to: (1) Quickly ascertain the perceptions of diverse stakeholders in this region; (2) Condense this complex information into a format that can be shared with the INRA scientific panel, and (3) Develop of a realistic set of …
Date:
March 18, 2010
Creator:
Billingsley, Steven R.
Object Type:
Report
System:
The UNT Digital Library
Public Mass Shootings in the United States: Selected Implications for Federal Public Health and Safety Policy
This report focuses on mass shootings and selected implications they have for federal policy in the areas of public health and safety. While such crimes most directly impact particular citizens in very specific communities, addressing these violent episodes involves officials at all levels of government and professionals from numerous disciplines.
Date:
March 18, 2013
Creator:
Bjelopera, Jerome P.; Bagalman, Erin; Caldwell, Sarah W.; Finklea, Kristin M. & McCallion, Gail
Object Type:
Report
System:
The UNT Digital Library
Libya: Unrest and U.S. Policy
This report discusses the recent unrest in Libya, triggered by political change in neighboring Tunisia and Egypt, as well as related U.S. policy.
Date:
March 18, 2011
Creator:
Blanchard, Christopher M.
Object Type:
Report
System:
The UNT Digital Library
The United Nations Educational, Scientific, and Cultural Organization (UNESCO)
This report provides background information regarding the United Nations Educational, Scientific and Cultural Organization (UNESCO), its structure, funding, budget, effectiveness, and reform.
Date:
March 18, 2013
Creator:
Blanchfield, Luisa & Browne, Marjorie Ann
Object Type:
Report
System:
The UNT Digital Library
The Baytown Sun (Baytown, Tex.), Vol. 94, No. 55, Ed. 1 Tuesday, March 18, 2014
Daily newspaper Baytown, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2014
Creator:
Bloom, David
Object Type:
Newspaper
System:
The Portal to Texas History
The Baytown Sun (Baytown, Tex.), Vol. 94, No. 55, Ed. 1 Tuesday, March 18, 2014
Daily newspaper from Baytown, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2014
Creator:
Bloom, David
Object Type:
Newspaper
System:
The Portal to Texas History
The Baytown Sun (Baytown, Tex.), Vol. 95, No. 48, Ed. 1 Wednesday, March 18, 2015
Daily newspaper from Baytown, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2015
Creator:
Bloom, David
Object Type:
Newspaper
System:
The Portal to Texas History
The Baytown Sun (Baytown, Tex.), Vol. 96, No. 56, Ed. 1 Friday, March 18, 2016
Daily newspaper from Baytown, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2016
Creator:
Bloom, David
Object Type:
Newspaper
System:
The Portal to Texas History
The Baytown Sun (Baytown, Tex.), Vol. 98, No. 55, Ed. 1 Sunday, March 18, 2018
Daily newspaper from Baytown, Texas that includes local, state, and national news along with advertising.
Date:
March 18, 2018
Creator:
Bloom, David
Object Type:
Newspaper
System:
The Portal to Texas History
Development of a 10 picosecond time-of-flight Counter
This Advanced Detector Research proposal presented a plan to develop an extremely fast time-of-flight detector for measuring the arrival time of beam protons scattered at small angles in high energy hadron colliders, such as the Large Hadron Collider (LHC). The proposed detectors employ a gas or quartz Cerenkov radiator which produce light when a proton passes through them, coupled to a micro-channel plate photomultiplier tube (MCP-PMT) that converts the light to an electrical pulse. The very small jitter of the pulse time provided by the MCP-PMT, combined with downstream electronics that accurately measure the pulse time results in a time-of-flight measurement of unprecedented accuracy. This ADR proposal was extremely successful, culminating in the development of a 10 ps resolution time-of-flight system, about an order of magnitude better than any time-of-flight system previously deployed at a collider experiment. The primary areas of advance were the usage of new radiator geometries providing fast detector signals, using multiple measurements to obtain a superior system resolution, and development of an electronics readout system tuned to maintain the excellent timing afforded by the detector. Test beam and laser tests have improved the knowledge of MCP-PMT’s and enabled the evaluation of the new detector concepts. In …
Date:
March 18, 2010
Creator:
Brandt, Andrew G
Object Type:
Report
System:
The UNT Digital Library
The Express-Star (Chickasha, Okla.), Ed. 1 Tuesday, March 18, 2014
Daily newspaper from Chickasha, Oklahoma that includes local, state, and national news along with advertising.
Date:
March 18, 2014
Creator:
Bright, James
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
Perry Daily Journal (Perry, Okla.), Vol. 118, No. 53, Ed. 1 Thursday, March 18, 2010
Daily newspaper from Perry, Oklahoma that includes local, state, and national news along with advertising.
Date:
March 18, 2010
Creator:
Brown, Gloria
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
Perry Daily Journal (Perry, Okla.), Vol. 119, No. 54, Ed. 1 Friday, March 18, 2011
Daily newspaper from Perry, Oklahoma that includes local, state, and national news along with advertising.
Date:
March 18, 2011
Creator:
Brown, Gloria
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
The Canadian Record (Canadian, Tex.), Vol. 120, No. 11, Ed. 1 Thursday, March 18, 2010
Weekly newspaper from Canadian, Texas that includes local, state and national news along with some advertising.
Date:
March 18, 2010
Creator:
Brown, Laurie Ezzell
Object Type:
Newspaper
System:
The Portal to Texas History
Asian Carp and the Great Lakes Region
This report describes four species of non-indigenous Asian carp migrating to the United States, their potential impact, federal responses, and litigation.
Date:
March 18, 2013
Creator:
Buck, Eugene H.; Upton, Harold F.; Stern, Charles V. & Brougher, Cynthia
Object Type:
Report
System:
The UNT Digital Library