Resource Type

81 Matching Results

Results open in a new window/tab.

Composition of the Earth's Inner Core from High-pressure Sound Velocity Measurements in Fe-Ni-Si alloys (open access)

Composition of the Earth's Inner Core from High-pressure Sound Velocity Measurements in Fe-Ni-Si alloys

None
Date: March 11, 2010
Creator: Antonangeli, D.; Siebert, J.; Badro, J.; Farber, D. L.; Fiquet, G.; Morard, G. et al.
System: The UNT Digital Library
Proton Irradiation Effects in Oxide-Confined Vertical Cavity Surface Emitting Laser (VCSEL) Diodes (open access)

Proton Irradiation Effects in Oxide-Confined Vertical Cavity Surface Emitting Laser (VCSEL) Diodes

Recent space experience has shown that the use of commercial optocouplers can be problematic in spacecraft, such as TOPEX/Poseidon, that must operate in significant radiation environments. Radiation--induced failures of these devices have been observed in space and have been further documented at similar radiation doses in the laboratory. The ubiquitous use of optocouplers in spacecraft systems for a variety of applications, such as electrical isolation, switching and power transfer, is indicative of the need for optocouplers that can withstand the space radiation environment. In addition, the distributed nature of their use implies that it is not particularly desirable to shield optocouplers for use in radiation environments. Thus, it will be important for the space community to have access to radiation hardened/tolerant optocouplers. For many microelectronic and photonic devices, it is difficult to achieve radiation hardness without sacrificing performance. However, in the case of optocouplers, one should be able to achieve both superior radiation hardness and performance for such characteristics as switching speed, current transfer ratio (CTR), minimum power usage and array power transfer, if standard light emitting diodes (LEDs), such as those in the commercial optocouplers mentioned above, are avoided, and VCSELs are employed as the emitter portion of the …
Date: March 11, 1999
Creator: Armendariz, M. G.; Barnes, C. E.; Choquette, K. D.; Guertin, S.; Hash, G. L.; Schwank, J. R. et al.
System: The UNT Digital Library
Search for CP Violation in Neutral D Meson Cabibbo-suppressedThree-body Decays (open access)

Search for CP Violation in Neutral D Meson Cabibbo-suppressedThree-body Decays

Using 385 fb{sup -1} of e{sup +}e{sup -} collision data collected at center-of-mass energies around 10.6 GeV, we search for time-integrated CP violation in the Cabibbo-suppressed decays D{sup 0}/{bar D}{sup 0} {yields} {pi}{sup -}{pi}{sup +}{pi}{sup 0} and D{sup 0}/{bar D}{sup 0} {yields} K{sup -}K{sup +}{pi}{sup 0} with both model-independent and model-dependent methods. Measurements of the asymmetries in amplitudes of flavor states and CP eigenstates provide constraints on theories beyond the Standard Model, some of which predict CP violation in amplitudes at the 1% level or higher. We find no evidence of CP violation and hence no conflict with the Standard Model.
Date: March 11, 2008
Creator: Aubert, B.
System: The UNT Digital Library
Rates, Polarizations, and Asymmetries in Charmless Vector-Vector B Decays (open access)

Rates, Polarizations, and Asymmetries in Charmless Vector-Vector B Decays

With a sample of approximately 89 million B{bar B} pairs collected with the BABAR detector, they measure branching fractions, determine the degree of longitudinal polarization, and search for direct CP violation in the decays B{sup 0} {yields} {phi}K*{sup 0} and B{sup +} {yields} {phi}K*{sup +}. They perform a search for other charmless vector-vector B decays involving {rho} and K*(892) resonances and observe the decays B{sup +} {yields} {rho}{sup 0} K*{sup +} and B{sup +} {yields} {rho}{sup 0}{rho}{sup +}. The branching fractions are measured to be {Beta}({phi}K*{sup 0}) = (11.1{sub -1.2}{sup +1.3} {+-} 1.1) x 10{sup -6}, {Beta}({phi}K*{sup +}) = (12.1{sub -1.9}{sup +2.1} {+-} 1.5) x 10{sup -6}, {Beta}({rho}{sup 0} K*{sup +}) = (7.7{sub -2.0}{sup +2.1} {+-} 1.4) x 10{sup -6}, and {Beta}({rho}{sup 0}{rho}{sup +}) = (9.9{sub -2.5}{sup +2.6} {+-} 2.5) x 10{sup -6}. The longitudinal polarization fractions are measured to be {Lambda}{sub L}/{Lambda}({phi}K*{sup 0}) = 0.65 {+-} 0.07 {+-} 0.04 and {Lambda}{sub L}/{Lambda}({phi}K*{sup +}) = 0.46 {+-} 0.12 {+-} 0.05. They measure the charge asymmetries: {Alpha}{sub CP}({phi}K*{sup 0}) = +0.04 {+-} 0.12 {+-} 0.02 and {Alpha}{sub CP}({phi}K*{sup +}) = +0.16 {+-} 0.17 {+-} 0.04.
Date: March 11, 2003
Creator: Aubert, B.; Barate, R.; Boutigny, D.; Gaillard, J.-M.; Hicheur, A.; Karyotakis, Y. et al.
System: The UNT Digital Library
Vitalinks (open access)

Vitalinks

The objectives of the VITALINKS tabletop exercise are to: Raise awareness of infrastructure interdependency issues; Identify and focus on the most important vulnerabilities and restoration priorities resulting from infrastructure disruptions; Examine the resources (people and equipment) required to sustain systems under emergency conditions; Identify and highlight roles, responsibilities, and authorities (including trans-border issues); and Continue to foster a more effective interface among public and private sector service providers and public officials in developing and implementing critical infrastructure protection, mitigation, response, and recovery options.
Date: March 11, 2002
Creator: Baldwin, T. B.
System: The UNT Digital Library
Neutron Radiographic Inspection of Heavy Metals and Hydrogenous Materials (open access)

Neutron Radiographic Inspection of Heavy Metals and Hydrogenous Materials

The possibility of using thermal-neutron radiography for inspecting heavy metals and hydrogenous materials was examined. The data include exposure curves, contrast sensitivities, and an assessment of the influence of higher energy neutrons and interfering gamma radiation on image quality. It is shown that, in the case of homogeneous materials, neutron radiography presents definite advantages for the inspection of heavier metals such as uranium, bismuth, and lead, and that the images obtained in such inspections are influenced very little by other radiation in the thermal-neutron beam. This is somewhat less true for intermediate metals such as steel and tungsten, although in these cases too, some exposure time advantage can usually be gained. Nevertheless, neutron radiographic inspection of these intermediate materials may be limited to those cases in which some complication, such as radioactivity of the sample, is involved. Thermal-neutron inspection of hydrogenous materials having a thickness greater than about an inch is not recommended and may be useful primarily in special cases such as one in which the light material is in some combination with a heavier, x-ray absorbing material. (auth)
Date: March 11, 1963
Creator: Berger, H. & Kraska, I. R.
System: The UNT Digital Library
The Surface Wave Magnitude for the 9 October 2006 North Korean Nuclear Explosion (open access)

The Surface Wave Magnitude for the 9 October 2006 North Korean Nuclear Explosion

Surface waves were generated by the North Korean nuclear explosion of 9 October 2006 and recorded at epicentral distances up to 34 degrees, from which we estimated a surface wave magnitude (M{sub s}) of 2.94 with an interstation standard deviation of 0.17 magnitude units. The International Data Centre estimated a body wave magnitude (m{sub b}) of 4.1. This is the only explosion we have analyzed that was not easily screened as an explosion based on the differences between the M{sub s} and m{sub b} estimates. Additionally, this M{sub s} predicts a yield, based on empirical M{sub s}/Yield relationships, that is almost an order of magnitude larger then the 0.5 to 1 kiloton reported for this explosion. We investigate how emplacement medium effects on surface wave moment and magnitude may have contributed to the yield discrepancy.
Date: March 11, 2008
Creator: Bonner, J; Herrmann, R; Harkrider, D & Pasyanos, M
System: The UNT Digital Library
Multiple Input Microcantilever Sensor with Capacitive Readout (open access)

Multiple Input Microcantilever Sensor with Capacitive Readout

A surface-micromachined MEMS process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Combined hydrogen and mercury-vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
Date: March 11, 1999
Creator: Britton, C. L., Jr.; Brown, G. M.; Bryan, W. L.; Clonts, L. G.; DePriest, J. C.; Emergy, M. S. et al.
System: The UNT Digital Library
Low-defect reflective mask blanks for extreme ultraviolet lithography (open access)

Low-defect reflective mask blanks for extreme ultraviolet lithography

Extreme Ultraviolet Lithgraphy (EUVL) is an emerging technology for fabrication of sub-100 nm feature sizes on silicon, following the SIA roadmap well into the 21st century. The specific EUVL system described is a scanned, projection lithography system with a 4:1 reduction, using a laser plasma EUV source. The mask and all of the system optics are reflective, multilayer mirrors which function in the extreme ultraviolet at 13.4 nm wavelength. Since the masks are imaged to the wafer exposure plane, mask defects greater than 80% of the exposure plane CD (for 4:1 reduction) will in many cases render the mask useless, whereas intervening optics can have defects which are not a printing problem. For the 100 nm node, we must reduce defects to less than 0.01/cm&sup2; @ 80nm or larger to obtain acceptable mask production yields. We have succeeded in reducing the defects to less than 0.1/cm&sup2; for defects larger than 130 nm detected by visible light inspection tools, however our program goal is to achieve 0.01/cm&sup2; in the near future. More importantly though, we plan to have a detailed understanding of defect origination and the effect on multilayer growth in order to mitigate defects below the 10<sup>-2</sup>/cm&sup2; level on the …
Date: March 11, 1999
Creator: Burkhart, S. C.; Cerjarn, C.; Kearney, P.; Mirkarimi, P.; Walton, C. & Ray-Chaudhuri, A.
System: The UNT Digital Library
Comparison of the Acceptability of Various Oil Shale Processes (open access)

Comparison of the Acceptability of Various Oil Shale Processes

While oil shale has the potential to provide a substantial fraction of our nation's liquid fuels for many decades, cost and environmental acceptability are significant issues to be addressed. Lawrence Livermore National Laboratory (LLNL) examined a variety of oil shale processes between the mid 1960s and the mid 1990s, starting with retorting of rubble chimneys created from nuclear explosions [1] and ending with in-situ retorting of deep, large volumes of oil shale [2]. In between, it examined modified-in-situ combustion retorting of rubble blocks created by conventional mining and blasting [3,4], in-situ retorting by radio-frequency energy [5], aboveground combustion retorting [6], and aboveground processing by hot-solids recycle (HRS) [7,8]. This paper reviews various types of processes in both generic and specific forms and outlines some of the tradeoffs for large-scale development activities. Particular attention is given to hot-recycled-solids processes that maximize yield and minimize oil shale residence time during processing and true in-situ processes that generate oil over several years that is more similar to natural petroleum.
Date: March 11, 2006
Creator: Burnham, A K & McConaghy, J R
System: The UNT Digital Library
Dynamical Behavior of Multi-Robot Systems Using Lattice Gas Automata (open access)

Dynamical Behavior of Multi-Robot Systems Using Lattice Gas Automata

Recent attention has been given to the deployment of an adaptable sensor array realized by multi-robotic systems. Our group has been studying the collective behavior of autonomous, multi-agent systems and their applications in the area of remote-sensing and emerging threats. To accomplish such tasks, an interdisciplinary research effort at Sandia National Laboratories are conducting tests in the fields of sensor technology, robotics, and multi-robotic and multi-agents architectures. Our goal is to coordinate a constellation of point sensors that optimizes spatial coverage and multivariate signal analysis using unmanned robotic vehicles (e.g., RATLERs, Robotic All-ten-sin Lunar Exploration Rover-class vehicles). Overall design methodology is to evolve complex collective behaviors realized through simple interaction (kinetic) physics and artificial intelligence to enable real-time operational responses to emerging threats. This paper focuses on our recent work understanding the dynamics of many-body systems using the physics-based hydrodynamic model of lattice gas automata. Three design features are investigated. One, for single-speed robots, a hexagonal nearest-neighbor interaction topology is necessary to preserve standard hydrodynamic flow. Two, adaptability, defined by the swarm's deformation rate, can be controlled through the hydrodynamic viscosity term, which, in turn, is defined by the local robotic interaction rules. Three, due to the inherent non-linearity of …
Date: March 11, 1999
Creator: Cameron, S. M.; Robinett, R.; Stantz, K. M.; Trahan, M. W. & Wagner, J. S.
System: The UNT Digital Library
Effects of chemical modifications on photophysics and exciton dynamics on {pi}-conjugation attenuated and metal-chelated photoconducting polymers (open access)

Effects of chemical modifications on photophysics and exciton dynamics on {pi}-conjugation attenuated and metal-chelated photoconducting polymers

Effects of two types of chemical modifications on photoconducting polymers consisting of polyphenylenevinylene (PPV) derivatives are studied by static and ultrafast transient optical spectroscopy as well as semi-empirical ZINDO calculations. The first type of modification inserts 2,2{prime}-bipyridyl-5-vinylene units (bpy V) in the PPV backbone, and the second type involves metal-chelation with the bpy sites. Photoluminescence and exciton dynamics of polymers 1 and 2 with PV:bpyV ratios of 1 and 3 were examined in solution, and compared to those of the homopolymer, poly(2,5-bis(2{prime}-ethylhexyloxy)-1,4-phenylenevinylene) (BEH-PPV). Similar studies were carried out for several metal-chelated polymers. These results can be explained by changes in {pi}-conjugation throughout the polymer backbone. The attenuation in {pi}-conjugation by the chemical modifications transforms a conducting polymer from one-dimensional semiconductor to molecular aggregates.
Date: March 11, 2000
Creator: Chen, L. X.; Jager, W. J. H.; Gosztola, D. J.; Niemczyk, M. P. & Wasielewski, M. R.
System: The UNT Digital Library
HEU Measurements of Holdup and Recovered Residue in the Deactivation and Decommissioning Activities of the 321-M Reactor Fuel Fabrication Facility at the Savannah River Site (open access)

HEU Measurements of Holdup and Recovered Residue in the Deactivation and Decommissioning Activities of the 321-M Reactor Fuel Fabrication Facility at the Savannah River Site

This paper contains a summary of the holdup and material control and accountability (MC&amp;A) assays conducted for the determination of highly enriched uranium (HEU) in the deactivation and decommissioning (D&amp;D) of Building 321-M at the Savannah River Site (SRS). The 321-M facility was the Reactor Fuel Fabrication Facility at SRS and was used to fabricate HEU fuel assemblies, lithium-aluminum target tubes, neptunium assemblies, and miscellaneous components for the SRS production reactors. The facility operated for more than 35 years. During this time thousands of uranium-aluminum-alloy (U-Al) production reactor fuel tubes were produced. After the facility ceased operations in 1995, all of the easily accessible U-Al was removed from the building, and only residual amounts remained. The bulk of this residue was located in the equipment that generated and handled small U-Al particles and in the exhaust systems for this equipment (e.g., Chip compactor, casting furnaces, log saw, lathes A & B, cyclone separator, Freon{trademark} cart, riser crusher, ...etc). The D&amp;D project is likely to represent an important example for D&amp;D activities across SRS and across the Department of Energy weapons complex. The Savannah River National Laboratory was tasked to conduct holdup assays to quantify the amount of HEU on all …
Date: March 11, 2005
Creator: DEWBERRY, RAYMOND; SALAYMEH, SALEEM R.; CASELLA, VITO R. & MOORE, FRANK S.
System: The UNT Digital Library
Spectroscopic Monitoring of Kidney Tissue Ischemic Injury (open access)

Spectroscopic Monitoring of Kidney Tissue Ischemic Injury

Noninvasive evaluation of tissue viability of donor kidneys used for transplantation is an issue that current technology is not able to address. In this work, we explore optical spectroscopy for its potential to assess the degree of ischemic damage in kidney tissue. We hypothesized that ischemic damage to kidney tissue will give rise to changes in its optical properties which in turn may be used to asses the degree of tissue injury. The experimental results demonstrate that the autofluorescence intensity of the injured kidney is decreasing as a function of time exposed to ischemic injury. Changes were also observed in the NIR light scattering intensities most probably arising from changes due to injury and death of the tissue.
Date: March 11, 2004
Creator: Demos, S G; Fitzgerald, J T; Michalopoulou, A P & Troppmann, C
System: The UNT Digital Library
Resonance decay effects on anisotropy parameters (open access)

Resonance decay effects on anisotropy parameters

We present the elliptic flow v{sub 2} of pions produced from resonance decays. The transverse momentum p{sub T} spectra of the parent particles are taken from thermal model fits and their v{sub 2} are fit under the assumption that they follow a number-of-constituent-quark (NCQ) scaling law expected from quark-coalescence models. The v{sub 2} of pions from resonance particle decays is found to be similar to the measured pion v{sub 2}. We also propose the measurement of electron v{sub 2} as a means to extract open-charm v{sub 2} and investigate whether a thermalized system of quasi-free quarks and gluons (a quark-gluon plasma) is created in collisions of Au nuclei at RHIC.
Date: March 11, 2004
Creator: Dong, Xin; Esumi, S.; Sorensen, P.; Xu, Nu & Xu, Z.
System: The UNT Digital Library
Silicide Schottky Contacts to Silicon: Screened Pinning at Defect Levels (open access)

Silicide Schottky Contacts to Silicon: Screened Pinning at Defect Levels

Silicide Schottky contacts can be as large as 0.955 eV (E{sub v} + 0.165 eV) on n-type silicon and as large as 1.05 eV (E{sub c} {minus} 0.07 eV) on p-type silicon. Current models of Schottky barrier formation do not provide a satisfactory explanation of occurrence of this wide variation. A model for understanding Schottky contacts via screened pinning at defect levels is presented. In the present paper it is shown that most transition metal silicides are pinned approximately 0.48 eV above the valence band by interstitial Si clusters. Rare earth disilicides pin close to the divacancy acceptor level 0.41 eV below the conduction band edge while high work function silicides of Ir and Pt pin close to the divacancy donor level 0.21 eV above the valence band edge. Selection of a particular defect pinning level depends strongly on the relative positions of the silicide work function and the defect energy level on an absolute energy scale.
Date: March 11, 1999
Creator: Drummond, T.J.
System: The UNT Digital Library
General and Localized Corrosion of Austenitic And Borated Stainless Steels in Simulated Concentrated Ground Waters (open access)

General and Localized Corrosion of Austenitic And Borated Stainless Steels in Simulated Concentrated Ground Waters

Boron containing stainless steels are used in the nuclear industry for applications such as spent fuel storage, control rods and shielding. It was of interest to compare the corrosion resistance of three borated stainless steels with standard austenitic alloy materials such as type 304 and 316 stainless steels. Tests were conducted in three simulated concentrated ground waters at 90 C. Results show that the borated stainless were less resistant to corrosion than the witness austenitic materials. An acidic concentrated ground water was more aggressive than an alkaline concentrated ground water.
Date: March 11, 2004
Creator: Estill, J. C.; Rebak, R. B.; Fix, D. V. & Wong, L. L.
System: The UNT Digital Library
Determination of the Crevice Repassivation Potential of Alloy 22 by a Potentiodynamic-Galvanostatic-Potentiostatic Method (open access)

Determination of the Crevice Repassivation Potential of Alloy 22 by a Potentiodynamic-Galvanostatic-Potentiostatic Method

Alloy 22 (N06022) is a nickel-based alloy highly resistant to corrosion. In some aggressive conditions of high chloride concentration, temperature and applied potential, Alloy 22 may suffer crevice corrosion, a form of localized corrosion. There are several electrochemical methods that can be used to determine localized corrosion in metallic alloys. One of the most popular for rapid screening is the cyclic potentiodynamic polarization (CPP). This work compares the results obtained by measuring the localized corrosion resistance of Alloy 22 using both CPP and the more cumbersome Tsujikawa-Hisamatsu Electrochemical (THE) method. The electrolytes used were 1 M NaCl and 5 M CaCl{sub 2}, both at 90 C. Results show that similar repassivation potentials were obtained for Alloy 22 using both methods. That is, in cases where localized corrosion is observed using the fast CPP method, there is no need to use THE method since it takes ten times longer to obtain comparable results in spite that the mode of corrosion attack that results in the tested specimens are different.
Date: March 11, 2004
Creator: Evans, Kenneth J.; Wong, Lana L. & Rebak, Raul B.
System: The UNT Digital Library
Pressure Measurements in a PBX 9501 Gauged Acceptor When Impacted by a Steel Plate that is Accelerated by a Thermally Cooked Off PBX 9501 Charge (open access)

Pressure Measurements in a PBX 9501 Gauged Acceptor When Impacted by a Steel Plate that is Accelerated by a Thermally Cooked Off PBX 9501 Charge

Measuring the violence of a thermal explosion of a cased explosive is important for evaluating safety issues of explosive devices in fires. A sympathetic initiation scenario was studied here where a 9.0 cm diameter by 2.5 cm thick disc of PBX 9501 donor charge encased in a 304 stainless steel assembly was heated on top and bottom flat surfaces until it thermally exploded. The initial heating rate at the metal/explosive interface was 5 C per minute until it reaches 170 C; then this temperature is held for 35 minutes to allow temperature equilibration to within a few degrees throughout the explosive. The heating resumed at a rate of 1 C per minute until the PBX 9501 donor thermally exploded. A PBX 9501 acceptor charge with carbon resistor and manganin foil pressure gauges inserted at various depths was placed at a 10 cm standoff distance from the donor charge's top steel cover plate. Piezoelectric arrival time pins were placed in front of the acceptor surface to measure the velocity and shape of the impacting plate. The stainless steel cover plate of the donor charge had a nominal velocity of 0.55 {+-} 0.04 mm/{micro}s upon impact and was non-symmetrically warped. The impact …
Date: March 11, 2002
Creator: Forbes, J W; Garcia, F; Urtiew, P A; Vandersall, K S; Greenwood, D W & Tarver, C M
System: The UNT Digital Library
Social Reward Questionnaire (SRQ): development and validation (open access)

Social Reward Questionnaire (SRQ): development and validation

Article discusses study which led to the development of the Social Reward Questionnaire (SRQ), a measure of individual differences in the value of different social rewards.
Date: March 11, 2014
Creator: Foulkes, Lucy; Viding, Essi; McCrory, Eamon J. & Neumann, Craig S.
System: The UNT Digital Library
Out of band radiation effects on resist patterning (open access)

Out of band radiation effects on resist patterning

Our previous work estimated the expected out-of-band (OOB) flare contribution at the wafer level assuming that there is a given amount of OOB at the collector focus. We found that the OOB effects are wavelength, resist, and pattern dependent. In this paper, results from rigorous patterning evaluation of multiple OOB-exposed resists using the SEMATECH Berkeley 0.3-NA MET are presented. A controlled amount of OOB is applied to the resist films before patterning is completed with the MET. LER and process performance above the resolution limit and at the resolution limits are evaluated and presented. The results typically show a negative impact on LER and process performance after the OOB exposures except in the case of single resist formulation, where resolution and performance improvement was observed.
Date: March 11, 2011
Creator: George, Simi A . & Naulleau, Patrick P.
System: The UNT Digital Library
22X mask cleaning effects on EUV lithography process and lifetime (open access)

22X mask cleaning effects on EUV lithography process and lifetime

For this paper, we evaluated the impact of repetitive cleans on a photomask that was fabricated and patterned for extreme ultraviolet lithography exposure. The lithographic performance of the cleaned mask, in terms of process window and line edge roughness, was monitored with the SEMATECH Berkeley micro-exposure tool (MET). Each process measurement of the cleaned mask was compared to a reference mask with the same mask architecture. Both masks were imaged on the same day in order to eliminate any process-related measurement uncertainties. The cleaned mask was periodically monitored with atomic force microscopy (AFM) measurements and pattern widths were monitored using scanning electron microscopy (SEM). In addition, reflectivity changes were also tracked with the aid of witness plate measurements. At the conclusion of this study, the mask under evaluation was cleaned 22 times; with none of the evaluation techniques showing any significant degradation in performance.
Date: March 11, 2011
Creator: George, Simi A.; Chen, Robert J.; Baclea-an, Lorie Mae & Naulleau, Patrick P.
System: The UNT Digital Library
Replicated mask surface roughness effects on EUV lithographic pattering and line edge roughness (open access)

Replicated mask surface roughness effects on EUV lithographic pattering and line edge roughness

To quantify the roughness contributions to speckle, a programmed roughness substrate was fabricated with a number of areas having different roughness magnitudes. The substrate was then multilayer coated. Atomic force microscopy (AFM) surface maps were collected before and after multilayer deposition. At-wavelength reflectance and total integrated scattering measurements were also completed. Angle resolved scattering based power spectral densities are directly compared to the AFM based power spectra. We show that AFM overpredicts the roughness in the picometer measurements range. The mask was then imaged at-wavelength for the direct characterization of the aerial image speckle using the SEMATECH Berkeley Actinic Inspection Tool (AIT). Modeling was used to test the effectiveness of the different metrologies in predicting the measured aerial-image speckle. AIT measured contrast values are 25% or more than the calculated image contrast values obtained using the measured rms roughness input. The extent to which the various metrologies can be utilized for specifying tolerable roughness limits on EUV masks is still to be determined. Further modeling and measurements are being planned.
Date: March 11, 2011
Creator: George, Simi A.; Naulleau, Patrick P.; Gullikson, Eric M.; Mochi, Iacopo; Salmassi, Farhad; Goldberg, Kenneth A. et al.
System: The UNT Digital Library
Test for laser discs (open access)

Test for laser discs

None
Date: March 11, 1975
Creator: Glassman, A.
System: The UNT Digital Library