Plasma and Ion Sources in Large Area Coatings: A Review (open access)

Plasma and Ion Sources in Large Area Coatings: A Review

Efficient deposition of high-quality coatings often requires controlled application of excited or ionized particles. These particles are either condensing (film-forming) or assisting by providing energy and momentum to the film growth process, resulting in densification, sputtering/etching, modification of stress, roughness, texture, etc. In this review, the technical means are surveyed enabling large area application of ions and plasmas, with ion energies ranging from a few eV to a few keV. Both semiconductortype large area (single wafer or batch processing with {approx} 1000 cm{sup 2}) and in-line web and glass-coating-type large area (> 10{sup 7} m{sup 2} annually) are considered. Characteristics and differences between plasma and ion sources are explained. The latter include gridded and gridless sources. Many examples are given, including sources based on DC, RF, and microwave discharges, some with special geometries like hollow cathodes and E x B configurations.
Date: February 28, 2005
Creator: Anders, Andre
Object Type: Article
System: The UNT Digital Library
Post Hoc Evaluation of Long-Term Goals for Energy Savings in the Buildings Sector: Lessons from Hindsight (open access)

Post Hoc Evaluation of Long-Term Goals for Energy Savings in the Buildings Sector: Lessons from Hindsight

This report is one of two that re-examines the forecasted impact of individual programs currently within the Buildings Technology Program (BT) and the Weatherization and Intergovernmental Program (WIP) that appeared in the FY2000 Presidential Budget request. This report outlines the effects of re-estimating the FY 2000 budget request based on overlaying project data from subsequent years essentially revised out-year forecasts of project benefits. It shows that year-to-year long-term projections of primary energy savings can vary widely as models improve and programs change. Note that the FY2000 budget request was originally analyzed under the former Office of Building Technology, State and Community Programs (BTS), where BT and WIP were previously combined. Throughout the document, reference will be made to the predecessor of the BT and WIP programs, BTS, as FY2000 reflected that organization. A companion report develops potential methods for allowing inherent risk to be captured in the project benefits analysis. The point estimates in this paper are not influenced by uncertainty or risk. That report develops potential methods for allowing inherent risk to affect the benefits analysis via Monte Carlo simulation.
Date: April 28, 2003
Creator: Anderson, Dave M. & Hostick, Donna J.
Object Type: Report
System: The UNT Digital Library
Materials Education: Opportunities over a Lifetime (open access)

Materials Education: Opportunities over a Lifetime

A report, in the form of abbreviated notes, of the 17th Biennial Conference on National Materials Policy ''Materials Education: Opportunities over a Lifetime'' held May 20-21, 2002 in College Park, MD, sponsored by the Federation of Materials Societies and the University Materials Council.
Date: October 28, 2003
Creator: Anderson, Iver E.; Schwartz, Lyle H.; Faber, Katherine T.; Cargill, G. Slade, III & Houston, Betsy
Object Type: Article
System: The UNT Digital Library
National INFOSEC technical baseline: multi-level secure systems (open access)

National INFOSEC technical baseline: multi-level secure systems

The purpose of this report is to provide a baseline description of the state of multilevel processor/processing to the INFOSEC Research Council and at their discretion to the R&D community at large. From the information in the report, it is hoped that the members of the IRC will be aware of gaps in MLS research. A primary purpose is to bring IRC and the research community members up to date on what is happening in the MLS arena. The review will attempt to cover what MLS products are still available, and to identify companies who still offer MLS products. We have also attempted to identify requirements for MLS by interviewing senior officers of the Intelligence community as well as those elements of DoD and DOE who are or may be interested in procuring MLS products for various applications. The balance of the report consists of the following sections; a background review of the highlights of the developments of MLS, a quick summary of where we are today in terms of products, installations, and companies who are still in the business of supplying MLS systems [or who are developing MLS system], the requirements as expressed by senior members of the Intelligence …
Date: September 28, 1998
Creator: Anderson, J P
Object Type: Report
System: The UNT Digital Library
Radioactive liquid wastes discharged to ground in the 200 areas during 1974 (open access)

Radioactive liquid wastes discharged to ground in the 200 areas during 1974

None
Date: March 28, 1975
Creator: Anderson, J. D.
Object Type: Report
System: The UNT Digital Library
Magnetocentrifugal Winds in 3D: Nonaxisymmetric Steady State (open access)

Magnetocentrifugal Winds in 3D: Nonaxisymmetric Steady State

Outflows can be loaded and accelerated to high speeds along rapidly rotating, open magnetic field lines by centrifugal forces. Whether such magnetocentrifugally driven winds are stable is a longstanding theoretical problem. As a step towards addressing this problem, we perform the first large-scale 3D MHD simulations that extend to a distance {approx} 10{sup 2} times beyond the launching region, starting from steady 2D (axisymmetric) solutions. In an attempt to drive the wind unstable, we increase the mass loading on one half of the launching surface by a factor of {radical}10, and reduce it by the same factor on the other half. The evolution of the perturbed wind is followed numerically. We find no evidence for any rapidly growing instability that could disrupt the wind during the launching and initial phase of propagation, even when the magnetic field of the magnetocentrifugal wind is toroidally dominated all the way to the launching surface. The strongly perturbed wind settles into a new steady state, with a highly asymmetric mass distribution. The distribution of magnetic field strength is, in contrast, much more symmetric. We discuss possible reasons for the apparent stability, including stabilization by an axial poloidal magnetic field, which is required to bend …
Date: November 28, 2006
Creator: Anderson, Jeffrey M.; Li, Zhi-Yun; /Virginia U., Astron. Dept.; Krasnopolsky, Ruben; /Toronto U., Astron. Dept.; Blandford, Roger D. et al.
Object Type: Article
System: The UNT Digital Library
Performance acceptance test of a portable instrument to detect uranium in water at the DOE Advanced Waste Water Treatment Plant, Fernald, Ohio (open access)

Performance acceptance test of a portable instrument to detect uranium in water at the DOE Advanced Waste Water Treatment Plant, Fernald, Ohio

The Eppendorf-Biotronik Model IC 2001-2, a portable field ruggedized ion chromatography instrument, was rigorously tested at the DOE Advanced Waste Water Treatment Plant, Fernald, Ohio. This instrument rapidly detected the uranium concentration in water, and has a detection limit in the low ppb range without using the sample concentrating feature. The test set of samples analyzed included: ``Real World`` water samples from the AWWT containing uranium concentrations in the 9--110 ppb range, a sample blank, and a performance evaluation sample. The AWWT samples contained sets of both raw water and acid-preserved water samples. Selected samples were analyzed in quadruplicate to asses the instrument`s precision, and these results were compared with the results from an off-site confirmatory laboratory to assess the instrument`s accuracy. Additional comparisons with on-site laboratory instruments, Chemcheck KPA-11 and Scintrex UA-3 are reported. Overall, the Eppendorf-Biotronik IC 2001-2 performed exceptionally well providing a detection limit in the low ppb region (< 10 ppb) and giving rapid (< 5 minutes) accurate and reproducible analytical results for the AWWT, ``real world``, water samples with uranium concentrations in the region of interest (10--40 ppb). The per sample operating cost for this instrument is equivalent to the per sample cost for the …
Date: March 28, 1997
Creator: Anderson, M.S. & Weeks, S.J.
Object Type: Report
System: The UNT Digital Library
A Dynamically Adaptive Arbitrary Lagrangian-Eulerian Method for Hydrodynamics (open access)

A Dynamically Adaptive Arbitrary Lagrangian-Eulerian Method for Hydrodynamics

A new method that combines staggered grid Arbitrary Lagrangian-Eulerian (ALE) techniques with structured local adaptive mesh refinement (AMR) has been developed for solution of the Euler equations. The novel components of the combined ALE-AMR method hinge upon the integration of traditional AMR techniques with both staggered grid Lagrangian operators as well as elliptic relaxation operators on moving, deforming mesh hierarchies. Numerical examples demonstrate the utility of the method in performing detailed three-dimensional shock-driven instability calculations.
Date: January 28, 2004
Creator: Anderson, R W; Pember, R B & Elliott, N S
Object Type: Article
System: The UNT Digital Library
Regulatory facility guide for Ohio (open access)

Regulatory facility guide for Ohio

The Regulatory Facility Guide (RFG) has been developed for the DOE and contractor facilities located in the state of Ohio. It provides detailed compilations of international, federal, and state transportation-related regulations applicable to shipments originating at destined to Ohio facilities. This RFG was developed as an additional resource tool for use both by traffic managers who must ensure that transportation operations are in full compliance with all applicable regulatory requirements and by oversight personnel who must verify compliance activities.
Date: February 28, 1994
Creator: Anderson, S. S.; Bock, R. E.; Francis, M. W.; Gove, R. M.; Johnson, P. E.; Kovac, F. M. et al.
Object Type: Report
System: The UNT Digital Library
Regulatory Facility Guide for Tennessee (open access)

Regulatory Facility Guide for Tennessee

This guide provides detailed compilations of international, federal, and state transportation related regulations applicable to shipments originating at or destined to Tennessee facilities. Information on preferred routes is also given.
Date: February 28, 1994
Creator: Anderson, S. S.; Bock, R. E.; Francis, M. W.; Gove, R. M.; Johnson, P. E.; Kovac, F. M. et al.
Object Type: Report
System: The UNT Digital Library
Scotts Valley Energy Office and Human Capacity Building that will provide energy-efficiency services and develop sustainable renewable energy projects. (open access)

Scotts Valley Energy Office and Human Capacity Building that will provide energy-efficiency services and develop sustainable renewable energy projects.

The primary goal of this project is to develop a Scotts Valley Energy Development Office (SVEDO). This office will further support the mission of the Tribe's existing leadership position as the DOE Tribal Multi-County Weatherization Energy Program (TMCWEP) in creating jobs and providing tribal homes and buildings with weatherization assistance to increase energy efficiency, occupant comfort and improved indoor air quality. This office will also spearhead efforts to move the Tribe towards its further strategic energy goals of implementing renewable energy systems through specific training, resource evaluation, feasibility planning, and implementation. Human capacity building and continuing operations are two key elements of the SVEDO objectives. Therefore, the project will 1) train and employ additional Tribal members in energy efficiency, conservation and renewable resource analyses and implementation; 2) purchase materials and equipment required to implement the strategic priorities as developed by the Scotts Valley Tribe which specifically include implementing energy conservation measures and alternative energy strategies to reduce energy costs for the Tribe and its members; and 3) obtain a dedicated office and storage space for ongoing SVEDO operations.
Date: June 28, 2013
Creator: Anderson, Temashio
Object Type: Report
System: The UNT Digital Library
Range of Neutronic Parameters for Repository Criticality Analyses (open access)

Range of Neutronic Parameters for Repository Criticality Analyses

The ''Range of Neutronic Parameters for Repository Criticality Analyses'' technical report contains a summary of the benchmark criticality analyses (including the laboratory critical experiment [LCEs] and the commercial reactor criticals [CRCs]) used to support the validation of the criticality evaluation methods. This report also documents the development of the Critical Limits (CLs) for the repository criticality analyses.
Date: September 28, 1999
Creator: Anderson, W.J.
Object Type: Report
System: The UNT Digital Library
Design and Fabrication of a Single-Aperture 11T Nb3Sn Dipole Model for LHC Upgrades (open access)

Design and Fabrication of a Single-Aperture 11T Nb3Sn Dipole Model for LHC Upgrades

The planned upgrade of the LHC collimation system includes additional collimators to be installed in the dispersion suppressor areas of points 2, 3 and 7. To provide the necessary longitudinal space for the collimators, a replacement of 8.33 T Nb-Ti LHC main dipoles with 11 T dipoles based on Nb{sub 3}Sn superconductor compatible with the LHC lattice and main systems is being considered. To demonstrate this possibility FNAL and CERN have started a joint program to develop a 2 m long single-aperture dipole magnet with the nominal field of 11 T at {approx}11.85 kA current and 60 mm bore. This paper describes the demonstrator magnet magnetic and mechanical designs and analysis, coil fabrication procedure. The Nb{sub 3}Sn strand and cable parameters and test results are also reported.
Date: November 28, 2011
Creator: Andreev, N.; Apollinari, G.; Barzi, E.; Bossert, R.; Nobrega, F.; Novitski, I. et al.
Object Type: Article
System: The UNT Digital Library
Effect of Airflow and Heat Input Rates on Duct Efficiency. (open access)

Effect of Airflow and Heat Input Rates on Duct Efficiency.

Reducing the airflow and heat input rates of a furnace that is connected to a duct system in thermal contact with unconditioned spaces can significantly reduce thermal distribution efficiency. This is a straightforward theoretical calculation based on the increased residence time of the air in the duct at the lower flow rate, which results in greater conduction losses. Experimental tests in an instrumented residential-size duct system have confirmed this prediction. Results are compared with the heat-loss algorithm in ASHRAE Standid 152P. The paper concludes with a discussion of possible remedies for this loss of efficiency in existing systems and optional design strategies in new construction.
Date: May 28, 2003
Creator: Andrews, J. W.
Object Type: Report
System: The UNT Digital Library
Durability of glasses vitrified from high copper feed in the 774 Research Melter (open access)

Durability of glasses vitrified from high copper feed in the 774 Research Melter

Small scale crucible studies were performed by Schumacher to examine the effects of formate and nitrate on glass redox at high copper levels. The results of the crucible studies were used to determine the regions where copper precipitates in the glass. However, durability tests were not performed on the glass samples. Studies were performed in the 774 Research Melter using a simulated feed from the Purex 4 Campaign in the Integrated DWPF Melter System (IDMS). Three runs were performed with this simulated feed. The first used the feed as it was received to determine a baseline. The results from the second and third campaigns were compared to the baseline. The second run increased the copper concentration. The third increased the copper and formate concentrations. The purpose of these experiments was to investigate melter performance and glass durability using a feed with increased copper concentration. The Purex 4 feed did not contain the target amounts of sludge and Precipitate Hydrolysis Aqueous (PHA). Less than 20% of the feed slurry consisted of simulated sludge, making it a low waste-loading feed. The use of this feed with significantly more copper added than anticipated in the DWPF, showed no indication of copper precipitating in …
Date: April 28, 1993
Creator: Andrews, M. K.
Object Type: Report
System: The UNT Digital Library
Design Construction and Test Results of a HTS Solenoid For Energy Recovery Linac (open access)

Design Construction and Test Results of a HTS Solenoid For Energy Recovery Linac

An innovative feature of the proposed Energy Recovery Linac (ERL) is the use of a solenoid made with High Temperature Superconductor (HTS) with the Superconducting RF cavity. The use of HTS allows solenoid to be placed in close proximity to the cavity and thus provides early focusing of the electron beam. In addition, cryogenic testing at {approx}77 K is simpler and cheaper than 4 K testing. This paper will present the design, construction and test results of this HTS solenoid. The HTS solenoid in the proposed ERL will be situated in the transition region between the superconducting cavity at {approx}4 K and the cryostat at the room temperature. Solenoid inside the cryogenic structure provides an early focusing and hence low emittance beam. The temperature in the transition region will be too high for a conventional low temperature superconductor and resistive heat load from copper coils will be too high on cryogenic system. HTS coils also allow much higher current density and significant reduction in size as compared to copper coils. Hence HTS solenoid provide a unique and technically superior solution. The use of a HTS solenoid with superconducting cavity offers a unique option as it can be placed in a …
Date: March 28, 2011
Creator: Anerella, M.; Ben-Zvi, Ilan; Kayran, D.; McIntyre, G.; Muratore, J.; Plate, S. et al.
Object Type: Article
System: The UNT Digital Library
FY 2006 Infrared Photonics Final Report (open access)

FY 2006 Infrared Photonics Final Report

Research done by the Infrared Photonics team at Pacific Northwest National Laboratory (PNNL) is focused on developing miniaturized integrated optics and optical fiber processing methods for mid-wave infrared (MWIR) and long-wave infrared (LWIR) sensing applications by exploiting the unique optical and material properties of chalcogenide glass. PNNL has developed thin-film deposition capabilities, direct laser writing techniques, infrared photonic device demonstration, holographic optical element design and fabrication, photonic device modeling, and advanced optical metrology—all specific to chalcogenide glass. Chalcogenide infrared photonics provides a pathway to quantum cascade laser (QCL) transmitter miniaturization. The high output power, small size, and superb stability and modulation characteristics of QCLs make them amenable for integration as transmitters into ultra-sensitive, ultra-selective point sampling and remote short-range chemical sensors that are particularly useful for nuclear nonproliferation missions.
Date: December 28, 2006
Creator: Anheier, Norman C.; Allen, Paul J.; Bernacki, Bruce E.; Ho, Nicolas; Krishnaswami, Kannan; Qiao, Hong (Amy) et al.
Object Type: Report
System: The UNT Digital Library
FY 2006 Miniature Spherical Retroreflectors Final Report (open access)

FY 2006 Miniature Spherical Retroreflectors Final Report

Research done by the Infrared Photonics team at Pacific Northwest National Laboratory (PNNL) is focused on developing miniature spherical retroreflectors using the unique optical and material properties of chalcogenide glass to reduce both performance limiting spherical aberrations. The optimized optical performance will provide efficient signal retroreflection that enables a broad range of remote detection scenarios for mid-wave infrared (MWIR) and long-wave infrared (LWIR) sensing applications. Miniature spherical retroreflectors can be developed to aid in the detection of signatures of nuclear proliferation or other chemical vapor or radiation signatures. Miniature spherical retroreflectors are not only well suited to traditional LIDAR methods for chemical plume detection and identification, but could enable remote detection of difficult semi-volatile chemical materials or low level radiation sources.
Date: December 28, 2006
Creator: Anheier, Norman C.; Bernacki, Bruce E. & Krishnaswami, Kannan
Object Type: Report
System: The UNT Digital Library
An Innovative Reactor Analysis Methodology Based on a Quasidiffusion Nodal Core Model. Nuclear Energy Research Initiative (NERI) Program. Quarterly Technical Progress Report (open access)

An Innovative Reactor Analysis Methodology Based on a Quasidiffusion Nodal Core Model. Nuclear Energy Research Initiative (NERI) Program. Quarterly Technical Progress Report

Status Summary of NERI Tasks - Phase 1 - Task 1. The development of the following methods in ID slab geometry: (1) Homogenization and definition of discontinuity factors, (2) Group constants functionalization using assembly transport solution of multigroup eigenvalue problem with albedo boundary conditions, and (3) Solving coarse-mesh effective few-group 1D QD moment equations using tables of data parameterized with respect to the ratio {rvec n} {center_dot} {bar J}{sup G}/{bar {phi}}{sup G} on boundaries. Status Summary of NERI Tasks - Phase 1 - Task 2. Development of a numerical method for solving the 2D few-group moment QD equations: (1) Development of a nodal discretization method for 2D moment QD equations, and (2) Development of an efficient iteration method for solving the system of equations of the nodal discretization method for 2D moment QD equations.
Date: April 28, 2000
Creator: Anistratov, Dmitriy Y.; Adams, Marvin L.; Palmer, Todd S. & Smith, Kord S.
Object Type: Report
System: The UNT Digital Library
CO-FIRING COAL: FEEDLOT AND LITTER BIOMASS (CFB AND CLB) FUELS IN PULVERIZED FUEL AND FIXED BED BURNERS (open access)

CO-FIRING COAL: FEEDLOT AND LITTER BIOMASS (CFB AND CLB) FUELS IN PULVERIZED FUEL AND FIXED BED BURNERS

Intensive animal feeding operations create large amounts of animal waste that must be safely disposed of in order to avoid environmental degradation. Cattle feedlots and chicken houses are two examples. In feedlots, cattle are confined to small pens and fed a high calorie grain-diet diet in preparation for slaughter. In chicken houses, thousands of chickens are kept in close proximity. In both of these operations, millions of tons of manure are produced every year. The manure could be used as a fuel by mixing it with coal in a 90:10 blend and firing it in an existing coal suspension fired combustion systems. This technique is known as co-firing, and the high temperatures produced by the coal will allow the biomass to be completely combusted. Reburn is a process where a small percentage of fuel called reburn fuel is injected above the NO{sub x} producing, conventional coal fired burners in order to reduce NO{sub x}. The manure could also be used as reburn fuel for reducing NO{sub x} in coal fired plants. An alternate approach of using animal waste is to adopt the gasification process using a fixed bed gasifier and then use the gases for firing in gas turbine combustors. …
Date: August 28, 2003
Creator: Annamalai, Kalyan; Sweeten, John; Mukhtar, Saqib; Thein, Ben; Wei, Gengsheng; Priyadarsan, Soyuz et al.
Object Type: Report
System: The UNT Digital Library
The Genetic Privacy Act and commentary (open access)

The Genetic Privacy Act and commentary

The Genetic Privacy Act is a proposal for federal legislation. The Act is based on the premise that genetic information is different from other types of personal information in ways that require special protection. Therefore, to effectively protect genetic privacy unauthorized collection and analysis of individually identifiable DNA must be prohibited. As a result, the premise of the Act is that no stranger should have or control identifiable DNA samples or genetic information about an individual unless that individual specifically authorizes the collection of DNA samples for the purpose of genetic analysis, authorized the creation of that private information, and has access to and control over the dissemination of that information.
Date: February 28, 1995
Creator: Annas, G. J.; Glantz, L. H. & Roche, P. A.
Object Type: Report
System: The UNT Digital Library
The Genetic Privacy Act and commentary (open access)

The Genetic Privacy Act and commentary

The Genetic Privacy Act is a proposal for federal legislation. The Act is based on the premise that genetic information is different from other types of personal information in ways that require special protection. The DNA molecule holds an extensive amount of currently indecipherable information. The major goal of the Human Genome Project is to decipher this code so that the information it contains is accessible. The privacy question is, accessible to whom? The highly personal nature of the information contained in DNA can be illustrated by thinking of DNA as containing an individual`s {open_quotes}future diary.{close_quotes} A diary is perhaps the most personal and private document a person can create. It contains a person`s innermost thoughts and perceptions, and is usually hidden and locked to assure its secrecy. Diaries describe the past. The information in one`s genetic code can be thought of as a coded probabilistic future diary because it describes an important part of a unique and personal future. This document presents an introduction to the proposal for federal legislation `the Genetic Privacy Act`; a copy of the proposed act; and comment.
Date: February 28, 1995
Creator: Annas, G.J.; Glantz, L. H. & Roche, P. A.
Object Type: Report
System: The UNT Digital Library
An Investigation of Solid-State Amidization and Imidization Reactions in Vapor Deposited Poly (amic acid) (open access)

An Investigation of Solid-State Amidization and Imidization Reactions in Vapor Deposited Poly (amic acid)

The condensation polymerization reaction of 4,4'-oxydianiline (ODA) with pyromellitic dianhydride (PMDA) to form poly(amic acid) and the subsequent imidization reaction to form polyimide were investigated for films prepared using vapor deposition polymerization techniques. Fourier-transform infrared spectroscopy (FT-IR), thermal analysis, and matrix-assisted laser desorption/ionization time-of-flight mass spectrometry (MALDI-TOF MS) of films at different temperatures indicate that additional solid-state polymerization occurs prior to imidization reactions. Experiments reveal that, upon vapor deposition, poly(amic acid) oligomers form that have a number-average molecular weight of about 1500 Daltons. Between 100 - 130 C these chains undergo additional condensation reaction to form slightly higher molecular weight oligomers. Calorimetry measurements show that this reaction is exothermic ({Delta}H {approx} -30 J/g) with an activation energy of about 120 kJ/mol. Experimental reaction enthalpies are compared to results from ab initio molecular modeling calculations to estimate the number of amide groups formed. At higher temperatures (150 - 300 C) imidization of amide linkages occurs as an endothermic reaction ({Delta}H {approx} +120 J/g) with an activation energy of about 130 kJ/mol. Solid-state kinetics were found to depend on reaction conversion as well as the processing conditions used to deposit films.
Date: June 28, 2004
Creator: Anthamatten, M; Letts, S A; Day, K; Cook, R C; Gies, A P; Hamilton, T P et al.
Object Type: Article
System: The UNT Digital Library
Die Backside FIB Preparation for Identification and Characterization of Metal Voids (open access)

Die Backside FIB Preparation for Identification and Characterization of Metal Voids

Both the increased complexity of integrated circuits, resulting in six or more levels of integration, and the increasing use of flip-chip packaging have driven the development of integrated circuit (IC) failure analysis tools that can be applied to the backside of the chip. Among these new approaches are focused ion beam (FIB) tools and processes for performing chip edits/repairs from the die backside. This paper describes the use of backside FIB for a failure analysis application rather than for chip repair. Specifically, they used FIB technology to prepare an IC for inspection of voided metal interconnects (lines) and vias. Conventional FIB milling was combined with a super-enhanced gas assisted milling process that uses XeF{sub 2} for rapid removal of large volumes of bulk silicon. This combined approach allowed removal of the TiW underlayer from a large number of Ml lines simultaneously, enabling rapid localization and plan view imaging of voids in lines and vias with backscattered electron (BSE) imaging in a scanning electron microscopy (SEM). Sequential cross sections of individual voided vias enabled them to develop a 3-d reconstruction of these voids. This information clarified how the voids were formed, helping to identify the IC process steps that needed to …
Date: July 28, 1999
Creator: Antoniou, Nicholas; Campbell, Ann N. & Filter, William F.
Object Type: Article
System: The UNT Digital Library