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Results:
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Scaling behavior in interference lithography
Interference lithography is an emerging, technology that provides a means for achieving high resolution over large exposure areas (approximately 1 m{sup 2}) with virtually unlimited depth of field. One- and two-dimensional arrays of deep submicron structures can be created using near i-line wavelengths and standard resist processing. In this paper, we report on recent advances in the development of this technology, focusing, in particular, on how exposure latitude and resist profile scale with interference period We present structure width vs dose curves for periods ranging from 200 nm to 1 um, demonstrating that deep submicron structures can be generated with exposure latitudes exceeding 30%. Our experimental results are compared to simulations based on PROLITIV2.
Date:
February 27, 1998
Creator:
Agayan, R.R.; Banyai, W.C. & Fernandez, A.
Object Type:
Article
System:
The UNT Digital Library
Z-Pinch Driven Inertial Confinement Fusion Target Physics Research at Sandia National Laboratories
Three hohlraum concepts are being pursued at Sandia National Laboratories (SNL) to investigate the possibility of using pulsed power driven magnetic implosions (z-pinches) to drive high gain targets capable of yields in the range of 200-1000 MJ. This research is being conducted on SNL'S.Z facility that is capable of driving peak currents of 20 MA in z-pinch loads producing implosion velocities as high as 7.5X 107 cm/s, x-ray energies approaching 2 MJ, and x-ray powers exceeding 200 TW. This paper will discuss each of these hohlraum concepts and will overview the experiments that have been conducted on these systems to date.
Date:
October 27, 1998
Creator:
Alberts, T. E.; Asay, J. R.; Baca, P. M.; Baker, K. L.; Breeze, S. P.; Chandler, G. A. et al.
Object Type:
Article
System:
The UNT Digital Library
The Oklahoma Daily (Norman, Okla.), Vol. 83, No. 12, Ed. 1 Thursday, August 27, 1998
Student newspaper of the University of Oklahoma in Norman, Oklahoma that includes national, local, and campus news along with advertising.
Date:
August 27, 1998
Creator:
Allam, Heather
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
The Oklahoma Daily (Norman, Okla.), Vol. 83, No. 53, Ed. 1 Tuesday, October 27, 1998
Student newspaper of the University of Oklahoma in Norman, Oklahoma that includes national, local, and campus news along with advertising.
Date:
October 27, 1998
Creator:
Allam, Heather
Object Type:
Newspaper
System:
The Gateway to Oklahoma History
Multi-Level Micromachined Systems-on-a-Chip: Technology and Applications
Researchers at Sandia have recently designed and built several research prototypes, which demonstrate that truly complex mechanical systems can now be realized in a surface micromachined technology. These MicroElectro- Mechanical Systems (MEMS) include advanced actuators, torque multiplying gear tmins, rack and pinion assemblies, positionable mirrors, and mechanical discriminators. All of tile mechanical components are batch fabricated on a single chip of silicon using the infrastructure origimdly developed to support today's highly reliabk; and robust microelectronics industry. Sand ia is also developing the technology 10 integrate microelectronic circuits onto the s,ime piece of silicon that is used to fabricate the MEMS devices. This significantly increases sensitivity and reliability, while fhrther reducing package size and fabrication costs. A review of the MEMS technology and capabilities available at Sandia National Laboratories is presented.
Date:
October 27, 1998
Creator:
Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Smith, J. H. et al.
Object Type:
Article
System:
The UNT Digital Library
University Press (Beaumont, Tex.), Vol. 74, No. 37, Ed. 1 Friday, February 27, 1998
Semiweekly newspaper from Lamar University in Beaumont, Texas that includes local, national, and campus news along with advertising.
Date:
February 27, 1998
Creator:
Andris, Tonya
Object Type:
Newspaper
System:
The Portal to Texas History
University Press (Beaumont, Tex.), Vol. 74, No. 41, Ed. 1 Friday, March 27, 1998
Semiweekly newspaper from Lamar University in Beaumont, Texas that includes local, national, and campus news along with advertising.
Date:
March 27, 1998
Creator:
Andris, Tonya
Object Type:
Newspaper
System:
The Portal to Texas History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History
Cann Memorial Garden
Photograph of a scene in the Cann Memorial Garden.
Date:
July 27, 1998
Creator:
Argo, Jim
Object Type:
Photograph
System:
The Gateway to Oklahoma History