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Aerial Image Microscopes for the Inspection of Defects in EUV Masks (open access)

Aerial Image Microscopes for the Inspection of Defects in EUV Masks

The high volume inspection equipment currently available to support development of EUV blanks is non-actinic. The same is anticipated for patterned EUV mask inspection. Once potential defects are identified and located by such non-actinic inspection techniques, it is essential to have instrumentation to perform detailed characterization, and if repairs are performed, re-evaluation. The ultimate metric for the acceptance or rejection of a mask due to a defect, is the wafer level impact. Thus measuring the aerial image for the site under question is required. An EUV Aerial Image Microscope (''AIM'') similar to the current AIM tools for 248nm and 193nm exposure wavelength is the natural solution for this task. Due to the complicated manufacturing process of EUV blanks, AIM measurements might also be beneficial to accurately assessing the severity of a blank defect. This is an additional application for an EUV AIM as compared to today's use In recognition of the critical role of an EUV AIM for the successful implementation of EUV blank and mask supply, International SEMATECH initiated this design study with the purpose to define the technical requirements for accurately simulating EUV scanner performance, demonstrating the feasibility to meet these requirements and to explore various technical approaches …
Date: October 22, 2002
Creator: Barty, A.; Taylor, J. S.; Hudyma, R.; Spiller, E.; Sweeney, D. W.; Shelden, G. et al.
System: The UNT Digital Library
Assessment of lead-bismuth eutectic target material for accelerator driven transmuters. (open access)

Assessment of lead-bismuth eutectic target material for accelerator driven transmuters.

Lead-Bismuth Eutectic is under consideration as a target material with high-energy protons for generating spallation neutrons to operate actinide and fission product transmuters. An assessment has been performed to study the performance of this target material as a function of the main variables and the design selections. The assessment includes the neutron yield, the spatial energy deposition, the neutron spectrum, the beam window performance, and the target buffer requirements. Heat transfer, hydraulics, beam window material and stresses, and target engineering issues have been considered. The assessment has also considered high-energy deuteron particles to study the impact on the target performance.
Date: May 22, 2002
Creator: Gohar, Y.
System: The UNT Digital Library
Bunch shape measurement of CW heavy-ion beam. (open access)

Bunch shape measurement of CW heavy-ion beam.

An accurate bunch shape measurement is one of the most important tasks during the fine tuning of multicavity accelerators. A device for the measurement of bunch time structure of cw heavy-ion beams with time resolution {approx}20 picoseconds was developed, constructed and commissioned at ATLAS which is a 50 MV superconducting heavy-ion linac. The Bunch Shape Monitor (BSM) is based on the analysis of secondary electrons produced by a primary beam hitting a tungsten wire to which a potential of -10 kV is applied. In a BSM the longitudinal distribution of charge of the primary beam is coherently transformed into a spatial distribution of low energy secondary electrons through transverse rf modulation. The distribution of secondary electrons is detected by a chevron MCP coupled to a phosphor screen. The signal image on the screen is measured by use of a CCD camera connected to a PC. This BSM analyzes cw beams rather than pulsed beams studied by a previous device [1]. Design features of the BSM and the beam measurement results are reported.
Date: August 22, 2002
Creator: Vinogradov, N. Y.; Billquist, P.; Ostroumov, P. N.; Pardo, R. C.; Portillo, M.; Sharamentov, S. I. et al.
System: The UNT Digital Library
Certification Testing and Demonstration of Insulated Pressure Vessels for Vehicular Hydrogen and Natural Gas Storage (open access)

Certification Testing and Demonstration of Insulated Pressure Vessels for Vehicular Hydrogen and Natural Gas Storage

We are working on developing an alternative technology for storage of hydrogen or natural gas on light-duty vehicles. This technology has been titled insulated pressure vessels. Insulated pressure vessels are cryogenic-capable pressure vessels that can accept either liquid fuel or ambient-temperature compressed fuel. Insulated pressure vessels offer the advantages of cryogenic liquid fuel tanks (low weight and volume), with reduced disadvantages (fuel flexibility, lower energy requirement for fuel liquefaction and reduced evaporative losses). The work described in this paper is directed at verifying that commercially available pressure vessels can be safely used to store liquid hydrogen or LNG. The use of commercially available pressure vessels significantly reduces the cost and complexity of the insulated pressure vessel development effort. This paper describes a series of tests that have been done with aluminum-lined, fiber-wrapped vessels to evaluate the damage caused by low temperature operation. All analysis and experiments to date indicate that no significant damage has resulted. Future activities include a demonstration project in which the insulated pressure vessels will be installed and tested on two vehicles. A draft standard will also be generated for obtaining insulated pressure vessel certification.
Date: May 22, 2002
Creator: Aceves, S. M.; Martinez-Frias, J.; Espinosa-Loza, F.; Schaffer, R. & Clapper, W.
System: The UNT Digital Library
Certification Testing and Demonstration of Insulated Pressure Vessels for Vehicular Hydrogen Storage (open access)

Certification Testing and Demonstration of Insulated Pressure Vessels for Vehicular Hydrogen Storage

Insulated pressure vessels are cryogenic-capable pressure vessels that can be fueled with liquid hydrogen or ambient-temperature compressed hydrogen. This flexibility results in multiple advantages with respect to compressed hydrogen tanks or low-pressure liquid hydrogen tanks. Our work is directed at verifying that commercially available aluminum-lined, fiber-wrapped pressure vessels can be safely used to store liquid hydrogen. A series of tests have been conducted, and the results indicate that no significant vessel damage has resulted from cryogenic operation. Future activities include a demonstration project in which the insulated pressure vessels will be installed and tested on two vehicles. A draft standard will also be generated for certification of insulated pressure vessels.
Date: May 22, 2002
Creator: Aceves, S. M.; Martinez-Frias, J. & Espinosa-Loza, F.
System: The UNT Digital Library
Conceptual design study of Nb3Sn low-beta quadrupoles for 2nd generation LHC IRs (open access)

Conceptual design study of Nb3Sn low-beta quadrupoles for 2nd generation LHC IRs

Conceptual designs of 90-mm aperture high-gradient quadrupoles based on the Nb{sub 3}Sn superconductor, are being developed at Fermilab for possible 2nd generation IRs with the similar optics as in the current low-beta insertions. Magnet designs and results of magnetic, mechanical, thermal and quench protection analysis for these magnets are presented and discussed.
Date: October 22, 2002
Creator: al., Alexander V Zlobin et
System: The UNT Digital Library
Confidence limits and their errors (open access)

Confidence limits and their errors

Confidence limits are common place in physics analysis. Great care must be taken in their calculation and use especially in cases of limited statistics. We introduce the concept of statistical errors of confidence limits and argue that not only should limits be calculated but also their errors in order to represent the results of the analysis to the fullest. We show that comparison of two different limits from two different experiments becomes easier when their errors are also quoted. Use of errors of confidence limits will lead to abatement of the debate on which method is best suited to calculate confidence limits.
Date: March 22, 2002
Creator: Raja, Rajendran
System: The UNT Digital Library
Connectivity in Random Grain Boundary Networks (open access)

Connectivity in Random Grain Boundary Networks

Mechanical properties of FCC metals and alloys can be improved by exercising control over the population of grain boundary types in the microstructure. The existing studies also suggest that such properties tend to have percolative mechanisms that depend on the topology of the grain boundary network. With the emergence of SEM-based automated electron backscatter diffraction (EBSD), statistically significant datasets of interface crystallography can be analyzed in a routine manner, giving new insight into the topology and percolative properties of grain boundary networks. In this work, we review advanced analysis techniques for EBSD datasets to quantify microstructures in terms of grain boundary character and triple junction distributions, as well as detailed percolation-theory based cluster analysis.
Date: October 22, 2002
Creator: Kumar, M; Schuh, C A & King, W E
System: The UNT Digital Library
Corrosion of Titanium Matrix Composites (open access)

Corrosion of Titanium Matrix Composites

The corrosion behavior of unalloyed Ti and titanium matrix composites containing up to 20 vol% of TiC or TiB{sub 2} was determined in deaerated 2 wt% HCl at 50, 70, and 90 degrees C. Corrosion rates were calculated from corrosion currents determined by extrapolation of the tafel slopes. All curves exhibited active-passive behavior but no transpassive region. Corrosion rates for Ti + TiC composites were similar to those for unalloyed Ti except at 90 degrees C where the composites were slightly higher. Corrosion rates for Ti + TiB{sub 2} composites were generally higher than those for unalloyed Ti and increased with higher concentrations of TiB{sub 2}. XRD and SEM-EDS analyses showed that the TiC reinforcement did not react with the Ti matrix during fabrication while the TiB{sub 2} reacted to form a TiB phase.
Date: September 22, 2002
Creator: Covino, B. S., Jr. & Alman, D. E.
System: The UNT Digital Library
Cryogenic Operation and Test Results for Bnl Built Lhc Insertion Magnets. (open access)

Cryogenic Operation and Test Results for Bnl Built Lhc Insertion Magnets.

The D1 and D2 magnets, the first two types of magnets Brookhaven National Laboratory (BNL) is building for the Insertion Regions of Large Hadron Collider (LHC), are being constructed and tested in the BNL magnet test facility. The D1 magnet is cooled using 4.5 K forced flow cooling with three types of bore tube conditions. The D2 magnet is cooled using both liquid helium and forced flow cooling. The liquid cooling scheme, using the shell of the D2 cold mass as the helium vessel and a level gauge in the end volume of the cold mass for liquid control, has been successfully demonstrated. Test results prove that both D1 and D2 meet the performance requirements and that the 4.5 K liquid cooling scheme to be used for D2 and other magnets in the Insertion Regions of LHC is adequate.
Date: July 22, 2002
Creator: Wu, K. C.; Anerella, M.; Cozzolino, J.; Ganetis, G.; Ghosh, A.; Gupta, R. et al.
System: The UNT Digital Library
Cryogenics in Bepcii Upgrade. (open access)

Cryogenics in Bepcii Upgrade.

THIS PAPER PRESENTS A CRYOGENIC DESIGN FOR UPGRADING THE BEIJING ELECTRON POSITRON COLLIDER AT THE INSTITUTE OF HIGH ENERGY PHYSICS IN BEIJING. THE UPGRADE INVOLVES 3 NEW SUPERCONDUCTING FACILITIES, THE INTERACTION REGION QUADRUPOLE MAGNETS, THE DETECTOR SOLENOID MAGNETS AND THE SRF CAVITIES. FOR COOLING OF THESE DEVICES, A NEW CRYPLANT WITH A TOTAL CAPACITY OF 1.0KW AT 4.5K IS TO BE BUILT AT IHEP. AN INTEGRATED CRYOGENIC DESIGN TO FIT THE BEPCII CRYOGENIC LOADS WITH HIGH EFFICIENCY IS CARRIEDOUT USING COMPUTATIONAL PROCESS ANALYSIS SOFTWARE WITH THE EMPHASES ON ECONOMICS AND SAFETY IN BOTH CONSTRUCTION AND OPERATION OF THE PLANT. THIS PAPER DESCRIBES THE CRYOGENIC CHARACTERISTICS OF EACH SUPERCONDUCTING DEVICE, THEIR COOLING SCHEMES AND THE OVERALL CRYOPLANT.
Date: July 22, 2002
Creator: Jia, L.; Wang, L. & Li, S.
System: The UNT Digital Library
CTE and Ratchet Growth Measurements on LX17-1 and Constituents (open access)

CTE and Ratchet Growth Measurements on LX17-1 and Constituents

Dimensional changes in PBX materials resulting from temperature change are of interest to engineers, designers and modelers. In this paper we present data from recent measurements made on LX17-1, as well as on the material's binder and its energetic constituent. LX17-1 is made from 7.5% KEL-F 800 binder combined with 92.5% wet aminated TATB energetic crystals. Due apparently to the anisotropic expansionary behavior of the TATB, the material exhibits irreversible growth, in addition to the usual reversible expansions and contractions associated with temperature change. In an effort understand reversible and irreversible growth behavior and to verify consistency between our measurements and those made historically, measurements were performed on billet pressed LX17-1, on die pressed TATB, and on KEL-F alone. It is important to realize that, for materials involving TATB, expansionary behavior results from the combined effects of reversible and irreversible (ratchet growth) phenomena.
Date: February 22, 2002
Creator: Cunningham, B; Weese, R; Lewis, P; Harwood, P & Tran, T
System: The UNT Digital Library
Current status of dense ceramic membranes for hydrogen separation. (open access)

Current status of dense ceramic membranes for hydrogen separation.

We have developed cermet membranes that nongalvanically separate hydrogen from gas mixtures. The highest measured hydrogen flux was 16.2 cm{sup 3} (STP)/min-cm{sup 2} for an ANL-3a membrane at 900 C. For ANL-3 membranes with thickness of 0.04-0.5 mm, permeation rate is limited by the bulk diffusion of hydrogen through the metal phase. The effect of hydrogen partial pressure on permeation rate confirmed this conclusion and suggested that higher permeation rates may be obtained by decreasing the membrane thickness. Permeation rate in a syngas atmosphere for times up to 190 h showed no degradation in performance, which indicates that ANL-3 may be suitable for long-term, practical hydrogen separation.
Date: February 22, 2002
Creator: Balachandran, U.; Lee, T. H.; Wang, S.; Zhang, G. & Dorris, S. E.
System: The UNT Digital Library
A double-grid method for modeling microstructure evolution. (open access)

A double-grid method for modeling microstructure evolution.

The microstructure of materials, i.e. the size, shape and arrangement of grains, determines essentially the material properties such as mechanical strength, toughness, electrical conductivity and magnetic susceptibility. In general the desirable property of materials can be controlled and improved by understanding of microstructure evolution processes in grain growth controlled by grain boundary migration, and grain boundary diffusion. The process of grain growth involves both grain boundary migration (moving interfaces) and topological changes of grain boundary geometry, and it can not be effectively modeled by Lagrangian, Eulerian, or Arbitrary Lagrangian Eulerian finite element method when in addition the stress effect is considered. A double-grid method is proposed for modeling grain boundary migration under stress. In this approach, the material grid carries kinematic and kinetic material variables, whereas the grain boundary grid carries only grain boundary kinematic variables. The material domain is discretized by a reproducing kernel approximation with strain discontinuity enrichment across the grain boundaries. The grain boundaries, on the other hand, are discretized by the standard finite elements. This approach allows modeling of arbitrary evolution of grain boundaries without remeshing.
Date: May 22, 2002
Creator: Chen, J. S.; Lu, H.; Moldovan, D. & Wolf, D.
System: The UNT Digital Library
Energy levels of isoelectronic impurities by large scale LDA calculations (open access)

Energy levels of isoelectronic impurities by large scale LDA calculations

Isoelectronic impurity states are localized states induced by stoichiometric single atom substitution in bulk semiconductor. Photoluminescence spectra indicate deep impurity levels of 0.5 to 0.9eV above the top of valence band for systems like: GaN:As, GaN:P, CdS:Te, ZnS:Te. Previous calculations based on small supercells seemingly confirmed these experimental results. However, the current ab initio calculations based on thousand atom supercells indicate that the impurity levels of the above systems are actually much shallower(0.04 to 0.23 eV), and these impurity levels should be compared with photoluminescence excitation spectra, not photoluminescence spectra.
Date: November 22, 2002
Creator: Li, Jingbo & Wang, Lin-Wang
System: The UNT Digital Library
Epimorphin mediates mammary luminal morphogenesis through control of C/EBPbeta (open access)

Epimorphin mediates mammary luminal morphogenesis through control of C/EBPbeta

We have previously shown that epimorphin, a protein expressed on the surface of myoepithelial and fibroblast cells of the mammary gland, acts as a multifunctional morphogen of mammary epithelial cells. Here, we present the molecular mechanism by which epimorphin mediates luminal morphogenesis. Treatment of cells with epimorphin to induce lumen formation greatly increases the overall expression of transcription factor CCAAT/enhancer binding protein beta (C/EBPbeta) and alters the relative expression of its two principal isoforms, LIP and LAP. These alterations were shown to be essential for the morphogenetic activities, as constitutive expression of LIP was sufficient to produce lumen formation, while constitutive expression of LAP blocked epimorphin-mediated luminal morphogenesis. Furthermore, in a transgenic mouse model in which epimorphin expression was expressed in an apolar fashion on the surface of mammary epithelial cells, we found increased expression of C/EBPbeta, increased relative expression of LIP to LAP, and enlarged ductal lumina. Together, our studies demonstrate a role for epimorphin in luminal morphogenesis through control of C/EBPbeta expression.
Date: March 22, 2002
Creator: Hirai, Yohei; Radisky, Derek; Boudreau, Rosanne; Simian, Marina; Stevens, Mary E.; Oka, Yumiko et al.
System: The UNT Digital Library
EUVL Mask Blank Repair (open access)

EUVL Mask Blank Repair

EUV mask blanks are fabricated by depositing a reflective Mo/Si multilayer film onto super-polished substrates. Small defects in this thin film coating can significantly alter the reflected field and introduce defects in the printed image. Ideally one would want to produce defect-free mask blanks; however, this may be very difficult to achieve in practice. One practical way to increase the yield of mask blanks is to effectively repair multilayer defects, and to this effect they present two complementary defect repair strategies for use on multilayer-coated EUVL mask blanks. A defect is any area on the mask which causes unwanted variations in EUV dose in the aerial image obtained in a printing tool, and defect repair is correspondingly defined as any strategy that renders a defect unprintable during exposure. The term defect mitigation can be adopted to describe any strategy which renders a critical defect non-critical when printed, and in this regard a non-critical defect is one that does not adversely affect device function. Defects in the patterned absorber layer consist of regions where metal, typically chrome, is unintentionally added or removed from the pattern leading to errors in the reflected field. There currently exists a mature technology based on ion …
Date: May 22, 2002
Creator: Barty, A.; Mirkarimi, P.; Stearns, D. G.; Sweeney, D.; Chapman, H. N.; Clift, M. et al.
System: The UNT Digital Library
Experiences with remote electron microscopy (open access)

Experiences with remote electron microscopy

With the advent of a rapidly proliferating international computer network, it became feasible to consider remote operation of instrumentation normally operated locally. For modern electron microscopes, the growing automation and computer control of many instrumental operations facilitated the task of providing remote operation. In order to provide use of NCEM TEMs by distant users, a project was instituted in 1995 to place a unique instrument, a Kratos EM-1500 operating at 1.5MeV, on-line for remote use. In 1996, the Materials Microcharacterization Collaboratory (MMC) was created as a pilot project within the US Department of Energy's DOE2000 program to establish national collaboratories to provide access via the Internet to unique or expensive DOE research facilities as well as to expertise for remote collaboration, experimentation, production, software development, modeling, and measurement. A major LBNL contribution to the MMC was construction of DeepView, a microscope-independent computer-control system that could be ported to other MMC members to provide a common graphical user-interface (GUI) for control of any MMC instrument over the wide area network.
Date: February 22, 2002
Creator: O'Keefe, Michael A. & Parvin, Bahram
System: The UNT Digital Library
Flow of a two-dimensional liquid metal jet in a strong magnetic field. (open access)

Flow of a two-dimensional liquid metal jet in a strong magnetic field.

Two-dimensional, steady flow of a liquid metal slender jet pouring from a nozzle in the presence of a transverse, nonuniform magnetic field is studied. The surface tension has been neglected, while gravity is shown to be not important. The main aim of the study is to evaluate the importance of the inertial effects. It has been shown that for gradually varying fields characteristic for the divertor region of a tokamak, inertial effects are negligible for N > 10, where N is the interaction parameter. Thus the inertialess flow model is expected to give good results even for relatively low magnetic fields and high jet velocity. Simple relations for the jet thickness and velocity have been derived. The results show that the jet becomes thicker if the field increases along the flow and thinner if it decreases.
Date: February 22, 2002
Creator: Reed, C. B. & Molokov, S.
System: The UNT Digital Library
Fracture Toughness Properties of Savannah River Site Storage Tank ASTM A285 Low Carbon Steel (open access)

Fracture Toughness Properties of Savannah River Site Storage Tank ASTM A285 Low Carbon Steel

A materials test program was developed to measure mechanical properties of ASTM A285 Grade B low carbon steel for application to structural and flaw stability analysis of storage tanks at the Department of Energy (DOE) Savannah River Site (SRS). Under this plan, fracture toughness and tensile testing are being performed at conditions that are representative of storage tank
Date: May 22, 2002
Creator: Subramanian, K.H.
System: The UNT Digital Library
A high-gradient high-duty-factor Rf photo-cathode electron gun (open access)

A high-gradient high-duty-factor Rf photo-cathode electron gun

We describe the analysis and preliminary design of a high-gradient, high-duty factor RF photocathode gun. The gun is designed to operate at high repetition rate or CW, with high gradient on the cathode surface to minimize emittance growth due to space charge forces at high bunch charge. The gun may also be operated in a solenoidal magnetic field for emittance compensation. The design is intended for use in short-pulse, high-charge, and high-repetition rate applications such as linac based X-ray sources. We present and compare the results of gun simulations using different codes, as well as RF and thermal analysis of the structure.
Date: May 22, 2002
Creator: Rimmer, Robert A.; Hartman, Neal; Lidia, Steven M. & Wang, Shaoheng
System: The UNT Digital Library
A High-Speed Four-Channel Infrared Pryometer. (open access)

A High-Speed Four-Channel Infrared Pryometer.

None
Date: August 22, 2002
Creator: Boboridis, Konstatinos & Obst, Andrew W.
System: The UNT Digital Library
High-temperature corrosion in power-generating systems. (open access)

High-temperature corrosion in power-generating systems.

Several technologies are being developed to convert coal into clean fuel for use in power generation. From the standpoint of component materials in these technologies, the environments created by coal conversion and their interactions with materials are of interest. Coal is a complex and relatively dirty fuel that contains varying amounts of sulfur and a substantial fraction of noncombustible mineral constituents, commonly called ash. Corrosion of metallic and ceramic structural materials is a potential problem at elevated temperatures in the presence of complex gas environments and coal-derived solid/liquid deposits. This paper discusses the coal-fired systems currently under development, identifies several modes of corrosion degradation that occur in many of these systems, and suggests possible mechanisms of metal wastage. Available data on the performance of materials in some of the environments are highlighted, and the research needed to improve the corrosion resistance of various materials is presented.
Date: May 22, 2002
Creator: Natesan, K.
System: The UNT Digital Library
Impulsive Stimulated Light Scattering at High Pressure - Precise Determination of Elastic Constants of Opaque Materials (open access)

Impulsive Stimulated Light Scattering at High Pressure - Precise Determination of Elastic Constants of Opaque Materials

Impulsive stimulated light scattering has been used to measure interfacial wave propagation speeds and elastic constants under conditions of high pressure. Data obtained from single-crystal Ge and Fe, and from polycrystalline Ta is presented. The method is complementary to other techniques for obtaining this type of information. There appears no fundamental reason why it cannot be extended to the 1 Mbar regime.
Date: August 22, 2002
Creator: Crowhurst, J C; Zaug, J M; Abramson, E H; Brown, J M & Ahre, D W
System: The UNT Digital Library