Degree Department

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Wafer Fabrication Monitoring/Control System and Method (open access)

Wafer Fabrication Monitoring/Control System and Method

Patent relating to systems and methods for monitoring and testing patterning processes including etching, cleaning, and depositing of low k and ultra-low k dielectrics for semiconductor technologies.
Date: March 15, 2012
Creator: Chen, Jin-Jian & Chyan, Oliver M. R.
System: The UNT Digital Library
Metal Ablation in Supersonic Expansion Gas Coupled to an Ion Mass Filter (open access)

Metal Ablation in Supersonic Expansion Gas Coupled to an Ion Mass Filter

Patent relating to metal ablation in supersonic expansion gas coupled to an ion mass filter.
Date: December 1, 2011
Creator: Verbeck, Guido F.
System: The UNT Digital Library