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Large Area Deposition of Field Emission Cathodes for Flat Panel Displays (open access)

Large Area Deposition of Field Emission Cathodes for Flat Panel Displays

The convention for field emission cathode (FEC) synthesis involves coating with a very-high tolerance in thickness uniformity using a planetary substrate fixture and a large source-to-substrate separation. New criteria for a deposition process must facilitate a reduction in the operating voltage by increasing the density of emitters through a reduction of cathode size and spacing. The objective of scaling the substrate size from small (less than 30 cm{sup 2}) to large (greater than 500 cm{sup 2}) areas further compounds manufacturing requirements to a point beyond that easily obtained by modifications to the convention for FEC deposition. A new patented approach to design, assemble, and operate a coating system enables FEC deposition over large areas through process control of source divergence coupled to incremental substrate positioning.
Date: February 11, 1999
Creator: Ferreira, J.; Hayes, J.; Jankowski, Alan Frederic & Morse, J.
System: The UNT Digital Library