This invention comprises a new deflection structure which deflects a beam of charged particles, such as an electron beam, includes a serpentine set for transmitting a deflection field, and shielding frame for housing the serpentine set. The serpentine set includes a vertical serpentine deflection element and a horizontal serpentine deflection element. These deflection elements are identical and are interdigitatedly and orthogonally disposed relative to each other, for forming a central transmission passage, through which the electron beam passes and is deflected by the deflection field to minimize drift space signal distortion. The shielding frame includes a plurality of ground blocks and forms an internal serpentine trough within these ground blocks for housing the serpentine set. The deflection structure further includes a plurality of feedthrough connectors which are inserted through the shielding frame and which are electrically connected to the serpentine set.

This paper describes an invention which relates to microtechnology and the fabrication process for developing microelectrical systems. It describes a means for fabricating a gas-driven microturbine capable of providing autonomous propulsion in which the rapidly moving gases are directed through a micromachined turbine to power devices by direct linkage or turbo-electric generators components in a domain ranging from tenths of micrometers to thousands of micrometers.