This paper describes an invention which relates to microtechnology and the fabrication process for developing microelectrical systems. It describes a means for fabricating a gas-driven microturbine capable of providing autonomous propulsion in which the rapidly moving gases are directed through a micromachined turbine to power devices by direct linkage or turbo-electric generators components in a domain ranging from tenths of micrometers to thousands of micrometers.

This invention comprises a new deflection structure which deflects a beam of charged particles, such as an electron beam, includes a serpentine set for transmitting a deflection field, and shielding frame for housing the serpentine set. The serpentine set includes a vertical serpentine deflection element and a horizontal serpentine deflection element. These deflection elements are identical and are interdigitatedly and orthogonally disposed relative to each other, for forming a central transmission passage, through which the electron beam passes and is deflected by the deflection field to minimize drift space signal distortion. The shielding frame includes a plurality of ground blocks and forms an internal serpentine trough within these ground blocks for housing the serpentine set. The deflection structure further includes a plurality of feedthrough connectors which are inserted through the shielding frame and which are electrically connected to the serpentine set.