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Low Loss Composition of BA{sub X}SR{sub Y}CA{sub 1-X-Y}TIO{sub 3}:BA{sub 0.12-0.25}SR{sub 0.35-0.47}CA{sub 0.32-0.53}TIO{sub 3}
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba{sub x}Sr{sub y}Ca{sub 1-x-y})TiO{sub 3}. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.
Date:
October 19, 1999
Creator:
Xiang, Xiao-Dong; Chang, Hauyee & Takeuchi, Ichiro
System:
The UNT Digital Library