The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized from pyromellitic anhydride and oxydianiline (PMDA-ODA).

A method for integrating liquid metal magnetohydrodynamic power generation with fusion blanket technology to produce electrical power from a thermonuclear fusion reactor located within a confining magnetic field and within a toroidal structure. A hot liquid metal flows from a liquid metal blanket region into a pump duct of an electromagnetic pump which moves the liquid metal to a mixer where a gas of predetermined pressure is mixed with the pressurized liquid metal to form a Froth mixture. Electrical power is generated by flowing the Froth mixture between electrodes in a generator duct. When the Froth mixture exits the generator the gas is separated from the liquid metal and both are recycled.

A cryogenic pumping system is provided, comprising a vacuum environment, an aerogel sorbent formed from a carbon aerogel disposed within the vacuum environment, and cooling means for cooling the aerogel sorbent sufficiently to adsorb molecules from the vacuum environment onto the aerogel sorbent. Embodiments of the invention include a liquid refrigerant cryosorption pump, a compressed helium cryogenic pump, a cryopanel and a Meissner coil, each of which uses carbon aerogel as a sorbent material.