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Focused Ion beam source method and Apparatus
A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud of laser ablated particles having unique characteristics, and extracting and focusing a charged particle beam from the laser ablated cloud. The method is especially suited for producing focused ion beams for semiconductor device analysis and modification.
Date:
August 17, 1998
Creator:
Pellin, Michael J.; Lykke, Keith R. & Lill, Thorsten B.
System:
The UNT Digital Library