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Gas-driven microturbine (open access)

Gas-driven microturbine

This paper describes an invention which relates to microtechnology and the fabrication process for developing microelectrical systems. It describes a means for fabricating a gas-driven microturbine capable of providing autonomous propulsion in which the rapidly moving gases are directed through a micromachined turbine to power devices by direct linkage or turbo-electric generators components in a domain ranging from tenths of micrometers to thousands of micrometers.
Date: June 27, 1996
Creator: Sniegowski, J. J.; Rodgers, M. S.; McWhorter, P. J.; Aeschliman, D. P. & Miller, W. M.
System: The UNT Digital Library