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Process for fabrication of metal oxide films (open access)

Process for fabrication of metal oxide films

This invention is comprised of a method of fabricating metal oxide films from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of metal oxides, e.g. electro-optically active transition metal oxides, at a high deposition rate. The presence of hydrogen during the plasma reaction enhances the deposition rate of the metal oxide. Various types of metal oxide films can be produced.
Date: July 17, 1990
Creator: Tracy, C. E.; Benson, D. & Svensson, S.
System: The UNT Digital Library
Highly conductive electrolyte composites and method of fabrication thereof (open access)

Highly conductive electrolyte composites and method of fabrication thereof

An electrolyte composite is manufactured by pressurizing a mixture of ionically conductive glass and an ionically conductive compound at between 12,000 and 24,000 pounds per square inch to produce a pellet. The resulting pellet is then sintered at relatively lower temperatures (800{degrees}C--1200{degrees}C), for example 1000{degrees}C, than are typically required (1400{degrees}C) when fabricating single constituent ceramic electrolytes. The resultant composite is 100 percent conductive at 250{degrees}C with conductivity values of 2.5 to 4 {times} 10{sup {minus}2} (ohm-cm){sup {minus}1}. The matrix exhibits chemical stability against sodium for 100 hours at 250 to 300{degrees}C.
Date: July 17, 1990
Creator: Hash, M. C. & Bloom, I. D.
System: The UNT Digital Library