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Silicon tetrafluoride generation. [Patent application; from hexafluorosilicic acid]
This invention is directed to a process of generating silicon tetrafluoride (SiF/sub 4/) from aqueous solutions of hexafluorosilicic acid (H/sub 2/SiF/sub 6/), comprising reacting an aqueous solution of H/sub 2/SiF/sub 6/ with a concentrated aqueous salt solution to produce a precipitate, separating and drying the precipitate, and heating the precipitate in an inert atmosphere to decompose the precipitate producing SiF/sub 4/.
Date:
January 3, 1982
Creator:
Hansen, K. C. & Yaws, C. L.
System:
The UNT Digital Library