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Method of Making Integrated Circuits Using Ruthenium and its Oxides as a Cu Diffusion Barrier (open access)

Method of Making Integrated Circuits Using Ruthenium and its Oxides as a Cu Diffusion Barrier

Patent relating to a method of making integrated circuits using ruthenium and its oxides as a Cu diffusion barrier.
Date: June 20, 2003
Creator: Chyan, Oliver M. R. & Ponnuswamy, Thomas
System: The UNT Digital Library
Purification of Gases. (open access)

Purification of Gases.

Patent for the purification of gases. The object purifies gases by transporting them through an electric discharge to convert sulfur into other forms of gas.
Date: December 8, 1914
Creator: Hall, Elmon L.
System: The Portal to Texas History