U N T Established 1890 U N T
University Libraries

Digital Collections

Resource Type

Degree Department

Decade

Day

1 Matching Results

Start Over Resource Type Patent Degree Department Physics Decade 2010-2019 Day 20th

Results open in a new window/tab.

Results: 1 - 1 of 1
Best Match Title Creator Date Created (Newest) Date Created (Oldest) Date Added (Newest) Date Added (Oldest)
Single Reflective Optical Element for Interference Lithography (open access)

Single Reflective Optical Element for Interference Lithography

Patent relating to optical elements for use in interference lithography.
Date: August 1, 2014
Creator: Lin, Yuankun; Lutkenhaus, Jeffrey & George, David
System: The UNT Digital Library