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Metal Ablation in Supersonic Expansion Gas Coupled to an Ion Mass Filter
Patent relating to metal ablation in supersonic expansion gas coupled to an ion mass filter.
Date:
December 1, 2011
Creator:
Verbeck, Guido F.
System:
The UNT Digital Library
Wafer Fabrication Monitoring/Control System and Method
Patent relating to systems and methods for monitoring and testing patterning processes including etching, cleaning, and depositing of low k and ultra-low k dielectrics for semiconductor technologies.
Date:
March 15, 2012
Creator:
Chen, Jin-Jian & Chyan, Oliver M. R.
System:
The UNT Digital Library