High-precision reflectometry of multilayer coatings for extreme ultraviolet lithography (open access)

High-precision reflectometry of multilayer coatings for extreme ultraviolet lithography

Synchrotron-based reflectometry is an important technique for the precise determination of optical properties of reflective multilayer coatings for Extreme Ultraviolet Lithography (EUVL). Multilayer coatings enable normal incidence reflectances of more than 65% in the wavelength range between 11 and 15 nm. In order to achieve high resolution and throughput of EUVL systems, stringent requirements not only apply to their mechanical and optical layout, but also apply to the optical properties of the multilayer coatings. Therefore, multilayer deposition on near-normal incidence optical surfaces of projection optics, condenser optics and reflective masks requires suitable high-precision metrology. Most important, due to their small bandpass on the order of only 0.5 nm, all reflective multilayer coatings in EUVL systems must be wavelength-matched to within {+-}0.05 nm. In some cases, a gradient of the coating thickness is necessary for wavelength matching at variable average angle of incidence in different locations on the optical surfaces. Furthermore, in order to preserve the geometrical figure of the optical substrates, reflective multilayer coatings need to be uniform to within 0.01 nm in their center wavelength. This requirement can only be fulfilled with suitable metrology, which provides a precision of a fraction of this value. In addition, for the detailed …
Date: December 29, 1999
Creator: Wedowski, M; Underwood, J H; Gullikson, E M; Bajt, S; Folta, J A; Kearney, P A et al.
System: The UNT Digital Library
Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings (open access)

Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings

Laser modulated scattering (LMS) is introduced as a non-destructive evaluation tool for defect inspection and characterization of optical surfaces and thin film coatings. This technique is a scatter sensitive version of the well-known photothermal microscopy (PTM) technique. It allows simultaneous measurement of the DC and AC scattering signals of a probe laser beam from an optical surface. By comparison between the DC and AC scattering signals, one can differentiate absorptive defects from non-absorptive ones. This paper describes the principle of the LMS technique and the experimental setup, and illustrates examples on using LMS as a tool for nondestructive evaluation of high quality optics.
Date: December 22, 1999
Creator: Feit, M D; Kozlowski, M R; Rubenchik, A M; Sheehan, L & Wu, Z L
System: The UNT Digital Library
Laser conditioning methods of Hafnia Silica multilayer mirrors (open access)

Laser conditioning methods of Hafnia Silica multilayer mirrors

None
Date: December 23, 1999
Creator: Hue, J; Maricle, S M; Schwartz, S; Sheehan, L M & Stolz, C J
System: The UNT Digital Library
Role of starting material composition in interfacial damage morphology of Hafnia Silica multilayer coatings (open access)

Role of starting material composition in interfacial damage morphology of Hafnia Silica multilayer coatings

None
Date: December 23, 1999
Creator: Bevis, R P; Stolz, C J; Von Gunten, M K; Weakley, S C & Wu, Z L
System: The UNT Digital Library
Migrating Relational Data to an ODBMS: Strategies and Lessons from a Molecular Biology Experience (open access)

Migrating Relational Data to an ODBMS: Strategies and Lessons from a Molecular Biology Experience

The growing maturity of ODBMS technology is causing many enterprises to consider migrating relational databases to ODBIMS's. While data remapping is relatively straight-forward in most cases, greater challenges lie in economically and non-invasively adapting legacy application software. We report on a genetics laboratory database migration experiment, which was facilitated by both organization of the relational data in object-like form and a C++-framework designed to insulate application code from relational artifacts. Although this experiment was largely successful, we discovered to our surprise that the framework failed to encapsulate three subtle aspects of the relational implementation, thereby ''contaminating'' application code. We analyze the underlying issues, and offer cautionary guidance to future migrators.
Date: December 1, 1999
Creator: Oler, J.; Lindstrom, G. & Critchlow, T.
System: The UNT Digital Library
12th Annual ALS Users' Association Meeting (open access)

12th Annual ALS Users' Association Meeting

Science took the front seat as 219 Advanced Light Source (ALS) users and staff gathered on Monday and Tuesday, October 18 and 19 for the twelfth annual users' meeting. The bulk of the meeting was dedicated to reports on science at the ALS. Packed into two busy days were 31 invited oral presentations and 80 submitted poster presentations, as well as time to visit 24 vendor booths. The oral sessions were dedicated to environmental science, chemical dynamics, biosciences, magnetic materials, and atomic and molecular science. In addition, there was an ALS highlights session that emphasized new results and a session comprising highlights from the young scientists who will carry the ALS into the future.
Date: December 17, 1999
Creator: Robinson, Arthur L.
System: The UNT Digital Library
Effect of Flux Adjustments on Temperature Variability in Climate Models (open access)

Effect of Flux Adjustments on Temperature Variability in Climate Models

It has been suggested that ''flux adjustments'' in climate models suppress simulated temperature variability. If true, this might invalidate the conclusion that at least some of observed temperature increases since 1860 are anthropogenic, since this conclusion is based in part on estimates of natural temperature variability derived from flux-adjusted models. We assess variability of surface air temperatures in 17 simulations of internal temperature variability submitted to the Coupled Model Intercomparison Project. By comparing variability in flux-adjusted vs. non-flux adjusted simulations, we find no evidence that flux adjustments suppress temperature variability in climate models; other, largely unknown, factors are much more important in determining simulated temperature variability. Therefore the conclusion that at least some of observed temperature increases are anthropogenic cannot be questioned on the grounds that it is based in part on results of flux-adjusted models. Also, reducing or eliminating flux adjustments would probably do little to improve simulations of temperature variability.
Date: December 27, 1999
Creator: Duffy, P.; Bell, J.; Covey, C. & Sloan, L.
System: The UNT Digital Library
Nuclear Waste Cross Site Transfer Pump Operational Resonance Resolution (open access)

Nuclear Waste Cross Site Transfer Pump Operational Resonance Resolution

Two single-volute, multi-stage centrifugal pumps are installed at a nuclear waste transfer station operated by the Department of Energy in Hanford, WA. The two parallel 100% pumps are Variable Frequency Drive operated and designed to transport waste etc.
Date: December 1, 1999
Creator: Hauck, F. M.
System: The UNT Digital Library
A Strength and Damage Model for Rock Under Dynamic Loading (open access)

A Strength and Damage Model for Rock Under Dynamic Loading

A thermodynamically consistent strength and failure model for granite under dynamic loading has been developed and evaluated. The model agrees with static strength measurements and describes the effects of pressure hardening, bulking, shear-enhanced compaction, porous dilation, tensile failure, and failure under compression due to distortional deformations. This paper briefly describes the model and the sensitivity of the simulated response to variations in the model parameters and in the inelastic deformation processes used in different simulations. Numerical simulations of an underground explosion in granite are used in the sensitivity study.
Date: December 1, 1999
Creator: Vorobiev, O. Y.; Antoun, T. H.; Lomov, I. N. & Glenn, L. A.
System: The UNT Digital Library
Spherical Harmonic Solutions to the 3D Kobayashi Benchmark Suite (open access)

Spherical Harmonic Solutions to the 3D Kobayashi Benchmark Suite

Spherical harmonic solutions of order 5, 9 and 21 on spatial grids containing up to 3.3 million cells are presented for the Kobayashi benchmark suite. This suite of three problems with simple geometry of pure absorber with large void region was proposed by Professor Kobayashi at an OECD/NEA meeting in 1996. Each of the three problems contains a source, a void and a shield region. Problem 1 can best be described as a box in a box problem, where a source region is surrounded by a square void region which itself is embedded in a square shield region. Problems 2 and 3 represent a shield with a void duct. Problem 2 having a straight and problem 3 a dog leg shaped duct. A pure absorber and a 50% scattering case are considered for each of the three problems. The solutions have been obtained with Ardra, a scalable, parallel neutron transport code developed at Lawrence Livermore National Laboratory (LLNL). The Ardra code takes advantage of a two-level parallelization strategy, which combines message passing between processing nodes and thread based parallelism amongst processors on each node. All calculations were performed on the IBM ASCI Blue-Pacific computer at LLNL.
Date: December 29, 1999
Creator: Brown, P.N.; Chang, B. & Hanebutte, U.R.
System: The UNT Digital Library
Influence of Processing Method on the Grain Boundary Character Distribution and Network Connectivity (open access)

Influence of Processing Method on the Grain Boundary Character Distribution and Network Connectivity

There exists a growing body of literature that correlates the fraction of ''special'' boundaries in a microstructure, as described by the Coincident Site Lattice Model, to properties such as corrosion resistance, intergranular stress corrosion cracking, creep, etc. Several studies suggest that the grain boundary character distribution (GBCD), which is defined in terms of the relative fractions of ''special'' and ''random'' grain boundaries, can be manipulated through thermomechanical processing. This investigation evaluates the influence of specific thermomechanical processing methods on the resulting GBCD in FCC materials such as oxygen-free electronic (ofe) copper and Inconel 600. We also demonstrate that the primary effect of thermomechanical processing is to reduce or break the connectivity of the random grain boundary network. Samples of ofe Cu were subjected to a minimum of three different deformation paths to evaluate the influence of deformation path on the resulting GBCD. These include: rolling to 82% reduction in thickness, compression to 82% strain, repeated compression to 20% strain followed by annealing. In addition, the influence of annealing temperature was probed by applying, for each of the processes, three different annealing temperatures of 400, 560, and 800 C. The observations obtained from automated electron backscatter diffraction (EBSD) characterization of the …
Date: December 20, 1999
Creator: Kumar, M & King, W.E.
System: The UNT Digital Library
The Design and Implementation of the Integrated Timing System to be Used in the National Ignition Facility (open access)

The Design and Implementation of the Integrated Timing System to be Used in the National Ignition Facility

The National Ignition Facility, or NIF, currently under construction at the Lawrence Livermore National Laboratory will contain the world's most powerful laser. By the year 2003 the NIF laser will be a research tool allowing scientists a glimpse into plasma interactions that are equivalent to those found in the center of the sun. Every eight hours the NIF will generate 1.8 MJ of 351-nm light carried by 192 pulsed laser beams and focus it onto a pea-sized target. This will result in a fusion reaction between two isotopes of hydrogen, creating for a few hundred picoseconds stellar conditions. Synchronizing the beams and diagnosing the fusion reaction requires generation and delivery of over 1000 precisely timed triggers to a multitude of systems. The NIF Integrated Timing System (ITS) was developed to provide reliable, accurately timed triggers that allow each client system to operate independently during periods of shot preparation and maintenance, yet be coordinated to a few tens of picoseconds during the experiment. The ITS applies technologies developed for fiber communications and Two-Way Time Transfer, and integrates them by way of a computer communications network to achieve distributed control, dynamically configurable coordination and independent among timing channels, and integrated self-diagnostics.
Date: December 7, 1999
Creator: Coutts, G. W.; Wiedwald, J. D.; Sewall, N. & Lagin, L.
System: The UNT Digital Library
Observation of Secondary Plasma Waves in Laser-Plasma Interaction Experiments (open access)

Observation of Secondary Plasma Waves in Laser-Plasma Interaction Experiments

An experiment is described where the two products of the Langmuir Decay Instability (LDI) of a primary electron plasma wave have been observed and identified without any ambiguity. Primary Langmuir waves are driven by Stimulated Raman Scattering (SRS) of an incident laser which provides well-defined electron plasma waves. Thomson scattering of a short wavelength probe beam yields measurements of the amplitude of the waves resolved in time, space, wavelength and wavevector, that allow identification of the probed waves.
Date: December 8, 1999
Creator: Depierreux, S.; Labaune, C.; Baldis, H. A.; Fuchs, J. & Michard, A.
System: The UNT Digital Library
Numerical simulation of laminar reacting flows with complex chemistry (open access)

Numerical simulation of laminar reacting flows with complex chemistry

We present an adaptive algorithm for low Mach number reacting flows with complex chemistry. Our approach uses a form of the low Mach number equations that discretely conserves both mass and energy. The discretization methodology is based on a robust projection formulation that accommodates large density contrasts. The algorithm uses an operator-split treatment of stiff reaction terms and includes effects of differential diffusion. The basic computational approach is embedded in an adaptive projection framework that uses structured hierarchical grids with subcycling in time that preserves the discrete conservation properties of the underlying single-grid algorithm. We present numerical examples illustrating the performance of the method on both premixed and non-premixed flames.
Date: December 1, 1999
Creator: Day, Marcus S. & Bell, John B.
System: The UNT Digital Library
Pressure Induced Phase Transformation of Pb(Zr(0.95)Ti(0.05))O(3) Based Ceramics: Grain Size Dependence (open access)

Pressure Induced Phase Transformation of Pb(Zr(0.95)Ti(0.05))O(3) Based Ceramics: Grain Size Dependence

A substantial decrease in hydrostatic ferroelectric (FE) to antiferroelectric (AFE) transformation pressure was measured for Pb(Zr{sub 0.949}Ti{sub 0.051}){sub 0.989}Nb{sub 0.0182}O{sub 3} ceramics with decreasing grain size. The 150 MPa decrease in hydrostatic FE to AFE transformation pressure over the grain size range of 8.5 {micro}m to 0.7{micro}m was shown to be consistent with enhanced internal stress with decreasing grain size. Further, the Curie Point decreased and the dielectric constant measured at 25 C increased with decreasing grain size. All three properties: dielectric constant magnitude, Curie point shift and FE to AFE phase transformation pressure were shown to be semi-quantitatively consistent with internal stress differences on the order of 100 MPa. Calculations of Curie point shifts from the Clausius-Clapeyron equation, using internal stress levels derived from the hydrostatic depoling characteristics, were consistent with measured values.
Date: December 21, 1999
Creator: Tuttle, Bruce A.; Voigt, James A.; Scofield, Timothy W.; Aselage, Terrence L.; Rodriguez, Mark A.; Yang, Pin et al.
System: The UNT Digital Library
Tevatron Top Quark Studies (open access)

Tevatron Top Quark Studies

The authors present a summary of recent measurements utilizing top quark candidate events extracted from approximately 110 pb{sup -1} of p{bar p} data collected by the CDF and D0 experiments at the Tevatron collider. They report on a new combined Tevatron top quark mass of 174.3 {+-} 5.1 GeV/c{sup 2} which takes into account five separate measurements made by the two experiments. They also demonstrate how the techniques developed for the mass analysis have been applied to further studies of the top quark and the t{bar t} system.
Date: December 9, 1999
Creator: James, E. B.
System: The UNT Digital Library
Thermal and Fluid Flow Brazing Simulations (open access)

Thermal and Fluid Flow Brazing Simulations

The thermal response of fixtured parts in a batch-type brazing furnace can require numerous, time-consuming development runs before an acceptable furnace schedule or joint design is established. Powerful computational simulation tools are being developed to minimize the required number of verification experiments, improve furnace throughput, and increase product yields. Typical furnace simulations are based on thermal, fluid flow, and structural codes that incorporate the fundamental physics of the brazing process. The use of massively parallel computing to predict furnace and joint-level responses is presented. Measured and computed data are compared. Temperature values are within 1-270 of the expected peak brazing temperature for different loading conditions. Sensitivity studies reveal that the thermal response is more sensitive to the thermal boundary conditions of the heating enclosure than variability y in the materials data. Braze flow simulations predict fillet geometry and free surface joint defects. Dynamic wetting conditions, interfacial reactions, and solidification structure add a high degree of uncertainty to the flow results.
Date: December 15, 1999
Creator: Hosking, Floyd Michael; Gianolakis, Steven E.; Givler, Richard C. & Schunk, P. Randall
System: The UNT Digital Library
B-Physics prospects at CDF (open access)

B-Physics prospects at CDF

Between 1992 to 1996, the CDF experiment has collected a data sample of 110 pb{sup -1} of p{bar p} collisions at {radical}s = 1.8 TeV at the Fermilab Tevatron. In the year 2001 the Tevatron will commence p{bar p} collisions again at {radical}s = 2.0 TeV delivering an integrated luminosity of 1 fb{sup -1} per year. In the mean time the CDF detector will have undergone substantial upgrades which will allow for a rich B physics program with unique capabilities. In this paper we discuss the B physics prospects at CDF with the data that will be collected during this upcoming Tevatron run.
Date: December 13, 1999
Creator: Papadimitriou, Vaia
System: The UNT Digital Library
Simulation of Grain Growth in a Near-Eutectic Solder Alloy (open access)

Simulation of Grain Growth in a Near-Eutectic Solder Alloy

Microstructural evolution due to aging of solder alloys determines their long-term reliability as electrical, mechanical and thermal interconnects in electronics packages. The ability to accurately determine the reliability of existing electronic components as well as to predict the performance of proposed designs depends upon the development of reliable material models. A kinetic Monte Carlo simulation was used to simulate microstructural evolution in solder-class materials. The grain growth model simulated many of the microstructural features observed experimentally in 63Sn-37Pb, a popular near-eutectic solder alloy. The model was validated by comparing simulation results to new experimental data on coarsening of Sn-Pb solder. The computational and experimental grain growth exponent for two-phase solder was found to be much lower than that for normal, single phase grain growth. The grain size distributions of solders obtained from simulations were narrower than that of normal grain growth. It was found that the phase composition of solder is important in determining grain growth behavior.
Date: December 16, 1999
Creator: TIKARE,VEENA & VIANCO,PAUL T.
System: The UNT Digital Library
Monte Carlo Simulations of Phosphate Polyhedron Connectivity in Glasses (open access)

Monte Carlo Simulations of Phosphate Polyhedron Connectivity in Glasses

Monte Carlo simulations of phosphate tetrahedron connectivity distributions in alkali and alkaline earth phosphate glasses are reported. By utilizing a discrete bond model, the distribution of next-nearest neighbor connectivities between phosphate polyhedron for random, alternating and clustering bonding scenarios was evaluated as a function of the relative bond energy difference. The simulated distributions are compared to experimentally observed connectivities reported for solid-state two-dimensional exchange and double-quantum NMR experiments of phosphate glasses. These Monte Carlo simulations demonstrate that the polyhedron connectivity is best described by a random distribution in lithium phosphate and calcium phosphate glasses.
Date: December 21, 1999
Creator: ALAM,TODD M.
System: The UNT Digital Library
Fragmentation of CDF jets: Perturbative or non-perturbative? (open access)

Fragmentation of CDF jets: Perturbative or non-perturbative?

Presented are the most recent jet fragmentation results from CDF: inclusive distributions of charged particle momenta and their k{sub T} in jets; average track multiplicities, as well as angular distributions of multiplicity flow, for a wide range of jet energies with E{sub T} from 40 to 300 GeV. The results are compared with Monte-Carlo and, when possible, analytical calculations performed in resumed perturbative QCD approximations (MLLA).
Date: December 10, 1999
Creator: Safonov, Alexei N.
System: The UNT Digital Library
Microstructure and Performance of Kovar/Alumina Joints Made with Silver-Copper Base Active Metal Braze Alloys (open access)

Microstructure and Performance of Kovar/Alumina Joints Made with Silver-Copper Base Active Metal Braze Alloys

Poor hermeticity performance was observed for Al{sub 2}O{sub 3}-Al{sub 2}O{sub 3} ceramic-ceramic joints having a Kovar{trademark} alloy interlayer. The active Ag-Cu-Ti filler metal was used to braze the substrates together. The Ti active element was scavenged from the filler metal by the formation of a (Fe, Ni, Co){sub x}Ti phase (x= 2-3) that prevented development of a continuous Ti{sub x}O{sub y} layer at the filler metal/Al{sub 2}O{sub 3} interface. Altering the process parameters did not circumvent the scavenging of Ti. Molybdenum barrier layers 1000, 2500, or 5000 {angstrom} thick on the Kovar{trademark} surfaces successfully allowed Ti{sub x}O{sub y} formation at the filler metal/Al{sub 2}O{sub 3} interface and hermetic joints. The problems with the Ag-Cu-Ti filler metal for Kovar{trademark}/Al{sub 2}O{sub 3} braze joints led to the evaluation of a Ag-Cu-Zr filler metal. The Zr (active element) in Ag-Cu-Zr filler metal was not susceptible to the scavenging problem.
Date: December 15, 1999
Creator: STEPHENS, JOHN J.; VIANCO,PAUL T.; HLAVA,PAUL F. & WALKER,CHARLES A.
System: The UNT Digital Library
Residual Stress Predictions in Polycrystalline Alumina (open access)

Residual Stress Predictions in Polycrystalline Alumina

Microstructure-level residual stresses arise in polycrystalline ceramics during processing as a result of thermal expansion anisotropy and crystallographic disorientation across the grain boundaries. Depending upon the grain size, the magnitude of these stresses can be sufficiently high to cause spontaneous microcracking during the processing of these materials. They are also likely to affect where cracks initiate and propagate under macroscopic loading. The magnitudes of residual stresses in untextured and textured alumina samples were predicted using object oriented finite (OOF) element analysis and experimentally determined grain orientations. The crystallographic orientations were obtained by electron-backscattered diffraction (EBSD). The residual stresses were lower and the stress distributions were narrower in the textured samples compared to those in the untextured samples. Crack initiation and propagation were also simulated using the Griffith fracture criterion. The grain boundary to surface energy ratios required for computations were estimated using AFM groove measurements.
Date: December 13, 1999
Creator: VEDULA,VENKATA R.; GLASS,S. JILL; SAYLOR,DAVID M.; ROHRER,GREGORY S.; CARTER,W. CRAIG & LANGER,STEPHEN A.
System: The UNT Digital Library
Observation of direct-CP violation - {epsilon}{prime}{epsilon} from KTeV (open access)

Observation of direct-CP violation - {epsilon}{prime}{epsilon} from KTeV

The authors report the first KTeV measurement for the search of direct-CP violation by using 23% of the data sample collected in the 1996-97 fixed target run at Fermilab. The result is, Re({epsilon}{prime}/{epsilon}) = (28.0 {+-} 4.1) x 10{sup -4}, nearly 7{delta} above zero obtained by a blind analysis. This firmly establishes the long-sought direct-CP violation effect in the two-pion system ({pi}{sup +}{pi}{sup -} versus {pi}{sup 0}{pi}{sup 0}) of neutral kaon decays.
Date: December 14, 1999
Creator: Hsiung, Yee Bob
System: The UNT Digital Library