The 6th Workshop on High Energy Density and High Power RF (RF 2003) was held from June 22 to June 26 at the Coolfont Resort and Conference Center in Berkeley Springs, West Virginia. The Workshop was hosted by the Institute for Research in Electronics and Applied Physics (IREAP) of the University of Maryland, College Park and by the Naval Research Laboratory, Washington DC. As its name implies this was the sixth in a series of biennial workshops devoted to exchanging information and ideas on high power microwave sources and components. The applications addressed included particle accelerators, radar, HPM, space exploration, neutron sources and plasma heating and current driven in controlled thermonuclear fusion research. This Final Report includes a brief description of the RF 2003 Workshop and the distribution of the published proceedings.